Assignee
BROOKS AUTOMATION INC
US·344 granted patents·18 pending applications·10,417 citations·filing 1987–2022
Top patents by PatentIndex Score
362 records- 0199US6990430B2System and method for on-the-fly eccentricity recognitionBROOKS AUTOMATION INC·Filed 2003·Granted Jan 24, 2006·541 cites·39 claims
- 0299US6158941ASubstrate transport apparatus with double substrate holdersBROOKS AUTOMATION INC·Filed 1999·Granted Dec 12, 2000·496 cites·2 claims
- 0398US11175298B2Automated system for storing, retrieving and managing samplesBROOKS AUTOMATION INC·Filed 2020·Granted Nov 16, 2021·10 cites·20 claims
- 0498US10120374B2Intelligent condition monitoring and fault diagnostic system for preventative maintenanceBROOKS AUTOMATION INC·Filed 2015·Granted Nov 6, 2018·66 cites·42 claims
- 0598US7988398B2Linear substrate transport apparatusBROOKS AUTOMATION INC·Filed 2004·Granted Aug 2, 2011·141 cites·10 claims
- 0698US7959395B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2006·Granted Jun 14, 2011·92 cites·9 claims
- 0798US7882394B2Intelligent condition-monitoring and fault diagnostic system for predictive maintenanceBROOKS AUTOMATION INC·Filed 2006·Granted Feb 1, 2011·165 cites·209 claims
- 0898US6441350B1Temperature control system for a thermal reactorBROOKS AUTOMATION INC·Filed 1999·Granted Aug 27, 2002·530 cites·24 claims
- 0998US5539323ASensor for articles such as wafers on end effectorBROOKS AUTOMATION INC·Filed 1993·Granted Jul 23, 1996·153 cites·8 claims
- 1097US11476139B2Substrate process apparatusBROOKS AUTOMATION INC·Filed 2021·Granted Oct 18, 2022·8 cites·24 claims
- 1197US9948155B2Sealed robot driveBROOKS AUTOMATION INC·Filed 2014·Granted Apr 17, 2018·16 cites·47 claims
- 1297US8356207B2Intelligent condition monitoring and fault diagnostic system for preventative maintenanceBROOKS AUTOMATION INC·Filed 2011·Granted Jan 15, 2013·67 cites·31 claims
- 1397US7988399B2Mid-entry load lock for semiconductor handling systemBROOKS AUTOMATION INC·Filed 2008·Granted Aug 2, 2011·43 cites·20 claims
- 1497US7945348B2Methods and systems for controlling a semiconductor fabrication processBROOKS AUTOMATION INC·Filed 2007·Granted May 17, 2011·31 cites·20 claims
- 1597US7925378B2Process apparatus with on-the-fly workpiece centeringBROOKS AUTOMATION INC·Filed 2006·Granted Apr 12, 2011·545 cites·10 claims
- 1696US11235935B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2021·Granted Feb 1, 2022·3 cites·33 claims
- 1796US10336539B2Automated cryogenic storage systemBROOKS AUTOMATION INC·Filed 2016·Granted Jul 2, 2019·15 cites·27 claims
- 1896US9884726B2Semiconductor wafer handling transportBROOKS AUTOMATION INC·Filed 2014·Granted Feb 6, 2018·20 cites·19 claims
- 1996US9862554B2Semiconductor wafer handling and transportBROOKS AUTOMATION INC·Filed 2012·Granted Jan 9, 2018·17 cites·20 claims
- 2096US9761478B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2015·Granted Sep 12, 2017·11 cites·42 claims
- 2196US9751209B2Compact direct drive spindleBROOKS AUTOMATION INC·Filed 2015·Granted Sep 5, 2017·9 cites·11 claims
- 2296US8008884B2Substrate processing apparatus with motors integral to chamber wallsBROOKS AUTOMATION INC·Filed 2008·Granted Aug 30, 2011·32 cites·31 claims
- 2396US7946800B2Substrate transport apparatus with multiple independently movable articulated armsBROOKS AUTOMATION INC·Filed 2007·Granted May 24, 2011·37 cites·15 claims
- 2496US7769482B2Methods and systems for controlling a semiconductor fabrication processBROOKS AUTOMATION INC·Filed 2007·Granted Aug 3, 2010·22 cites·20 claims
- 2596US7575406B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2003·Granted Aug 18, 2009·118 cites·38 claims
- 2696US6643563B2Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic armBROOKS AUTOMATION INC·Filed 2002·Granted Nov 4, 2003·156 cites·27 claims
- 2796US6587744B1Run-to-run controller for use in microelectronic fabricationBROOKS AUTOMATION INC·Filed 2000·Granted Jul 1, 2003·260 cites·56 claims
- 2896US5447431ALow-gas temperature stabilization systemBROOKS AUTOMATION INC·Filed 1993·Granted Sep 5, 1995·52 cites·7 claims
- 2995US11764093B2Automatic wafer centering method and apparatusBROOKS AUTOMATION INC·Filed 2021·Granted Sep 19, 2023·3 cites·33 claims
- 3095US10493620B2Compact direct drive spindleBROOKS AUTOMATION INC·Filed 2017·Granted Dec 3, 2019·6 cites·20 claims
- 3195US10421607B2Cryogenic freezerBROOKS AUTOMATION INC·Filed 2016·Granted Sep 24, 2019·8 cites·22 claims
- 3295US10325795B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2017·Granted Jun 18, 2019·7 cites·25 claims
- 3395US10086511B2Semiconductor manufacturing systemsBROOKS AUTOMATION INC·Filed 2013·Granted Oct 2, 2018·21 cites·21 claims
- 3495US9224628B2Reduced capacity carrier, transport, load port, buffer systemBROOKS AUTOMATION INC·Filed 2012·Granted Dec 29, 2015·16 cites·17 claims
- 3595US8029226B2Semiconductor manufacturing systemsBROOKS AUTOMATION INC·Filed 2008·Granted Oct 4, 2011·25 cites·10 claims
- 3695US7891935B2Dual arm robotBROOKS AUTOMATION INC·Filed 2003·Granted Feb 22, 2011·70 cites·23 claims
- 3795US7806643B2Elevator-based tool loading and buffering systemBROOKS AUTOMATION INC·Filed 2005·Granted Oct 5, 2010·27 cites·11 claims
- 3895US7233842B2Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by itBROOKS AUTOMATION INC·Filed 2005·Granted Jun 19, 2007·20 cites·4 claims
- 3995US6737826B2Substrate transport apparatus with multiple independent end effectorsBROOKS AUTOMATION INC·Filed 2002·Granted May 18, 2004·83 cites·30 claims
- 4095US6062798AMulti-level substrate processing apparatusBROOKS AUTOMATION INC·Filed 1996·Granted May 16, 2000·171 cites·43 claims
- 4195US5899658AArticulated arm transfer deviceBROOKS AUTOMATION INC·Filed 1997·Granted May 4, 1999·146 cites·23 claims
- 4294US10978330B2On the fly automatic wafer centering method and apparatusBROOKS AUTOMATION INC·Filed 2018·Granted Apr 13, 2021·14 cites·30 claims
- 4394US10493457B2Sample storage and retrieval systemBROOKS AUTOMATION INC·Filed 2015·Granted Dec 3, 2019·12 cites·7 claims
- 4494US10092929B2Wafer tray sorter with door coupled to detectorBROOKS AUTOMATION INC·Filed 2016·Granted Oct 9, 2018·12 cites·5 claims
- 4594US9104650B2Intelligent condition monitoring and fault diagnostic system for preventative maintenanceBROOKS AUTOMATION INC·Filed 2013·Granted Aug 11, 2015·45 cites·15 claims
- 4694US7904182B2Scalable motion control systemBROOKS AUTOMATION INC·Filed 2005·Granted Mar 8, 2011·41 cites·34 claims
- 4794US7607879B2Substrate processing apparatus with removable component moduleBROOKS AUTOMATION INC·Filed 2005·Granted Oct 27, 2009·36 cites·10 claims
- 4894US7234310B2Very low temperature refrigeration system having a scroll compressor with liquid injectionBROOKS AUTOMATION INC·Filed 2005·Granted Jun 26, 2007·38 cites·21 claims
- 4994US6918731B2Fast swap dual substrate transport for load lockBROOKS AUTOMATION INC·Filed 2001·Granted Jul 19, 2005·62 cites·17 claims
- 5094US6002840ASubstrate transport apparatusBROOKS AUTOMATION INC·Filed 1997·Granted Dec 14, 1999·144 cites·11 claims
Showing the top 50 of 362 patent records by PatentIndex Score.
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