Inventor · disambiguated record
Li-Kong Turn
Also filed as: TURN LI-KONG
18 granted patents·2 pending applications·72 citations·filing 1999–2020
92Inventor score
Files withTAIWAN SEMICONDUCTOR MFG9TAIWAN SEMICONDUCTOR MFG CO LTD6CHANG CHING-YU1LAING CHE-RONG1LIN TING-YU1
Top patents by PatentIndex Score
20 records- 0185US10101662B2Developing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 16, 2018·3 cites·20 claims
- 0282US9733568B2Tool and method of developingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 15, 2017·4 cites·19 claims
- 0376US10627718B2Developing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 21, 2020·1 cites·20 claims
- 0475US6734116B2Damascene method employing multi-layer etch stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 11, 2004·19 cites·14 claims
- 0574US8852673B2Defect monitoring for resist layerLAING CHE-RONG·Filed 2011·Granted Oct 7, 2014·4 cites·20 claims
- 0674US7029800B2Reticle with antistatic coatingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 18, 2006·13 cites·20 claims
- 0770US11150558B2Developing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 19, 2021·0 cites·20 claims
- 0865US8683395B2Method and system for feed-forward advanced process controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 25, 2014·1 cites·19 claims
- 0962US9442391B2Overlay sampling methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 13, 2016·2 cites·20 claims
- 1058US8429569B2Method and system for feed-forward advanced process controlYU CHIH-JEN·Filed 2011·Granted Apr 23, 2013·1 cites·17 claims
- 1155US9908201B2Systems and methods for edge bead removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Mar 6, 2018·0 cites·21 claims
- 1254US6975407B1Method of wafer height mappingTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Dec 13, 2005·7 cites·12 claims
- 1352US6190810B1Mark focusing system for steppersTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Feb 20, 2001·4 cites·19 claims
- 1449US7301604B2Method to predict and identify defocus wafersTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Nov 27, 2007·3 cites·19 claims
- 1548US8101340B2Method of inhibiting photoresist pattern collapseCHANG CHING-YU·Filed 2007·Granted Jan 24, 2012·0 cites·20 claims
- 1644US7514184B2Reticle with antistatic coatingTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Apr 7, 2009·0 cites·20 claims
- 1742US8048589B2Phase shift photomask performance assurance methodTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Nov 1, 2011·0 cites·20 claims
- 1841US6330355B1Frame layout to monitor overlay performance of chip composed of multi-exposure imagesTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Dec 11, 2001·10 cites·22 claims
- 1937US2005248754A1Wafer aligner with WEE (water edge exposure) functionWANG CHUN-SHENG·Filed 2004·Application pending·0 cites
- 2033US2006201848A1Method for reducing mask precipitation defectsLIN TING-YU·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →