Inventor · disambiguated record
Shingo Togashi
Also filed as: TOGASHI SHINGO
43 granted patents·4 pending applications·1,558 citations·filing 2010–2025
98Inventor score
Files withEBARA CORP47
Top patents by PatentIndex Score
47 records- 0199USD793976SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Aug 8, 2017·434 cites·1 claims
- 0299USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0399USD633452SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 1, 2011·342 cites·1 claims
- 0495US12183642B2Film-thickness measuring method, method of detecting notch portion, and polishing apparatusEBARA CORP·Filed 2022·Granted Dec 31, 2024·2 cites·10 claims
- 0595US9403255B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Aug 2, 2016·14 cites·49 claims
- 0694US8859070B2Elastic membraneEBARA CORP·Filed 2012·Granted Oct 14, 2014·16 cites·25 claims
- 0793USD769200SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2013·Granted Oct 18, 2016·48 cites·1 claims
- 0892US11472001B2Elastic membrane and substrate holding apparatusEBARA CORP·Filed 2020·Granted Oct 18, 2022·2 cites·9 claims
- 0990US11548113B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2019·Granted Jan 10, 2023·2 cites·8 claims
- 1090US10391603B2Polishing apparatus, control method and recording mediumEBARA CORP·Filed 2016·Granted Aug 27, 2019·4 cites·19 claims
- 1189US11179823B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2017·Granted Nov 23, 2021·3 cites·19 claims
- 1289US10702972B2Polishing apparatusEBARA CORP·Filed 2014·Granted Jul 7, 2020·7 cites·15 claims
- 1389USD839224SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2017·Granted Jan 29, 2019·28 cites·1 claims
- 1489US9662764B2Substrate holder, polishing apparatus, and polishing methodEBARA CORP·Filed 2013·Granted May 30, 2017·7 cites·18 claims
- 1587US11958163B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2021·Granted Apr 16, 2024·1 cites·16 claims
- 1685US10464185B2Substrate polishing method, top ring, and substrate polishing apparatusEBARA CORP·Filed 2017·Granted Nov 5, 2019·2 cites·8 claims
- 1784USD766849SSubstrate retaining ringEBARA CORP·Filed 2013·Granted Sep 20, 2016·25 cites·1 claims
- 1884US2025312885A1Rubber membrane having first and second hardness for use in a polishing headEBARA CORP·Filed 2025·Application pending·0 cites
- 1983USD918161SElastic membraneEBARA CORP·Filed 2018·Granted May 4, 2021·1 cites·1 claims
- 2082US12358096B2Rubber membrane having first and second hardness for use in a polishing headEBARA CORP·Filed 2022·Granted Jul 15, 2025·0 cites·8 claims
- 2180US11088011B2Elastic membrane, substrate holding device, and polishing apparatusEBARA CORP·Filed 2018·Granted Aug 10, 2021·2 cites·13 claims
- 2279US10486284B2Substrate holding device, and substrate polishing apparatusEBARA CORP·Filed 2016·Granted Nov 26, 2019·1 cites·11 claims
- 2379USD808349SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2016·Granted Jan 23, 2018·18 cites·1 claims
- 2476US10307882B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2016·Granted Jun 4, 2019·1 cites·2 claims
- 2576USD799437SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Oct 10, 2017·16 cites·1 claims
- 2675US9815171B2Substrate holder, polishing apparatus, polishing method, and retaining ringEBARA CORP·Filed 2014·Granted Nov 14, 2017·2 cites·27 claims
- 2775US2025100107A1Elastic membrane, polishing head, and polishing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 2874US11478895B2Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding deviceEBARA CORP·Filed 2019·Granted Oct 25, 2022·0 cites·7 claims
- 2973USD989012SElastic membraneEBARA CORP·Filed 2021·Granted Jun 13, 2023·4 cites·1 claims
- 3072US2024399526A1Polishing head and polishing systemEBARA CORP·Filed 2024·Application pending·0 cites
- 3170US9884401B2Elastic membrane and substrate holding apparatusEBARA CORP·Filed 2013·Granted Feb 6, 2018·2 cites·12 claims
- 3269USD794585SRetainer ring for substrateEBARA CORP·Filed 2016·Granted Aug 15, 2017·12 cites·1 claims
- 3366USD859332SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2017·Granted Sep 10, 2019·10 cites·1 claims
- 3465US12068189B2Elastic membrane, substrate holding device, and polishing apparatusEBARA CORP·Filed 2021·Granted Aug 20, 2024·0 cites·4 claims
- 3565US10213896B2Elastic membrane, substrate holding apparatus, and polishing apparatusEBARA CORP·Filed 2017·Granted Feb 26, 2019·0 cites·21 claims
- 3661US12128523B2Polishing apparatusEBARA CORP·Filed 2020·Granted Oct 29, 2024·0 cites·14 claims
- 3759US11745306B2Polishing apparatus and method of controlling inclination of stationary ringEBARA CORP·Filed 2019·Granted Sep 5, 2023·0 cites·7 claims
- 3856USD913977SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2018·Granted Mar 23, 2021·5 cites·1 claims
- 3955US10414015B2Polishing apparatus and polishing methodEBARA CORP·Filed 2016·Granted Sep 17, 2019·0 cites·11 claims
- 4055US9999956B2Polishing device and polishing methodEBARA CORP·Filed 2015·Granted Jun 19, 2018·0 cites·21 claims
- 4152US11654524B2Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatusEBARA CORP·Filed 2020·Granted May 23, 2023·0 cites·6 claims
- 4249US9676076B2Polishing method and polishing apparatusEBARA CORP·Filed 2013·Granted Jun 13, 2017·0 cites·8 claims
- 4349USD770990SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2014·Granted Nov 8, 2016·6 cites·1 claims
- 4446US11731235B2Polishing apparatus and polishing methodEBARA CORP·Filed 2019·Granted Aug 22, 2023·0 cites·2 claims
- 4546US2022168864A1Polishing recipe determination deviceEBARA CORP·Filed 2019·Application pending·0 cites
- 4645USD1021832SElastic membraneEBARA CORP·Filed 2023·Granted Apr 9, 2024·0 cites·1 claims
- 4741USD813180SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2016·Granted Mar 20, 2018·2 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →