Inventor · disambiguated record
Jeffrey E. Krampert
Also filed as: KRAMPERT JEFFREY · KRAMPERT JEFFREY E
15 granted patents·6 pending applications·28 citations·filing 2009–2024
89Inventor score
Files withAPPLIED MATERIALS INC6FAIRHURST JOHN ROBERT4VARIAN SEMICONDUCTOR EQUIPMENT ASS INC4KRAMPERT JEFFREY E3VARIAN SEMICONDUCTOR EQUIPMENT3
Top patents by PatentIndex Score
21 records- 0189US12014898B2Active temperature control for RF window in immersed antenna sourceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 18, 2024·2 cites·20 claims
- 0284US10569299B2Hydrophobic shafts for use in process chambersVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Feb 25, 2020·1 cites·9 claims
- 0381US8585115B2Method and apparatus for lifting a horizontally-oriented substrate from a cassetteFAIRHURST JOHN ROBERT·Filed 2011·Granted Nov 19, 2013·6 cites·17 claims
- 0479US10925146B1Ion source chamber with embedded heaterAPPLIED MATERIALS INC·Filed 2019·Granted Feb 16, 2021·3 cites·19 claims
- 0579US9865433B1Gas injection system for ion beam deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 9, 2018·2 cites·20 claims
- 0678US7977652B2Optical heater for cryogenic ion implanter surface regenerationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Jul 12, 2011·4 cites·11 claims
- 0773US8328494B2In vacuum optical wafer heater for cryogenic processingFISH ROGER B·Filed 2009·Granted Dec 11, 2012·4 cites·19 claims
- 0870US9417138B2Gas coupled probe for substrate temperature measurementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Aug 16, 2016·2 cites·20 claims
- 0969US10974276B2Hydrophobic shafts for use in process chambersVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Apr 13, 2021·0 cites·10 claims
- 1066US8550520B2Method and apparatus for manipulating a substrateFAIRHURST JOHN ROBERT·Filed 2011·Granted Oct 8, 2013·2 cites·13 claims
- 1162US2025273425A1Air Bearing Shaft With Wide Operating Temperature RangeAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1261US9218990B2Method and apparatus for holding a plurality of substrates for processingFAIRHURST JOHN ROBERT·Filed 2011·Granted Dec 22, 2015·1 cites·14 claims
- 1361US2025201514A1Radiation Heating to Clean Deposits from Air Bearing ShaftAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1461US2025201510A1Radiation Heating to Dry Moisture from Air Bearing ShaftAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1559US9175710B2Contained ceramic fastenerVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 3, 2015·1 cites·20 claims
- 1654US2025285835A1Heated Dynamic Seal Rotary Union for Delivery of Cryogenic FluidAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1752US9212949B2Technique for temperature measurement and calibration of semiconductor workpieces using infraredVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Dec 15, 2015·0 cites·20 claims
- 1839US9070730B2Method and apparatus for removing a vertically-oriented substrate from a cassetteFAIRHURST JOHN ROBERT·Filed 2011·Granted Jun 30, 2015·0 cites·16 claims
- 1933US9520264B2Method and apparatus for clamping and cooling a substrate for ion implantationKRAMPERT JEFFREY E·Filed 2012·Granted Dec 13, 2016·0 cites·15 claims
- 2032US2012241648A1Heat lip seal for cryogenic processingKRAMPERT JEFFREY E·Filed 2011·Application pending·0 cites
- 2128US2012060353A1Mechanism and method for ensuring alignment of a workpiece to a maskKRAMPERT JEFFREY E·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →