Inventor · disambiguated record
Mahadevan Ganapathisubramanian
Also filed as: GANAPATHISUBRAMANIAN MAHADEVAN
17 granted patents·1 pending application·168 citations·filing 2005–2018
94Inventor score
Files withGANAPATHISUBRAMANIAN MAHADEVAN4MOLECULAR IMPRINTS INC4CANON NANOTECHNOLOGIES INC3CHOI BYUNG JIN3UNIV TEXAS2
Top patents by PatentIndex Score
18 records- 0198US7906058B2Bifurcated contact printing techniqueMOLECULAR IMPRINTS INC·Filed 2005·Granted Mar 15, 2011·19 cites·21 claims
- 0294US7803308B2Technique for separating a mold from solidified imprinting materialMOLECULAR IMPRINTS INC·Filed 2005·Granted Sep 28, 2010·24 cites·22 claims
- 0394US7641840B2Method for expelling gas positioned between a substrate and a moldMOLECULAR IMPRINTS INC·Filed 2007·Granted Jan 5, 2010·22 cites·20 claims
- 0493US7307697B2Adaptive shape substrate support systemUNIV TEXAS·Filed 2005·Granted Dec 11, 2007·25 cites·5 claims
- 0592US8215946B2Imprint lithography system and methodGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2009·Granted Jul 10, 2012·24 cites·16 claims
- 0688US9529274B2Chucking system with recessed support featureCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Dec 27, 2016·6 cites·26 claims
- 0787US9616614B2Large area imprint lithographyCHOI BYUNG-JIN·Filed 2013·Granted Apr 11, 2017·7 cites·5 claims
- 0886US8309008B2Separation in an imprint lithography processCHOI BYUNG-JIN·Filed 2009·Granted Nov 13, 2012·8 cites·19 claims
- 0985US8913230B2Chucking system with recessed support featureGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2010·Granted Dec 16, 2014·4 cites·19 claims
- 1080US10578964B2Asymmetric template shape modulation for partial field imprintingCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Mar 3, 2020·3 cites·6 claims
- 1177US7504268B2Adaptive shape substrate support methodUNIV TEXAS·Filed 2005·Granted Mar 17, 2009·9 cites·8 claims
- 1276US8237133B2Energy sources for curing in an imprint lithography systemGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2009·Granted Aug 7, 2012·6 cites·18 claims
- 1371US8968620B2Safe separation for nano imprintingIM SE-HYUK·Filed 2011·Granted Mar 3, 2015·6 cites·27 claims
- 1469US9164375B2Dual zone template chuckGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2010·Granted Oct 20, 2015·3 cites·11 claims
- 1569US8231821B2Substrate alignmentCHOI BYUNG-JIN·Filed 2009·Granted Jul 31, 2012·2 cites·17 claims
- 1665US11020894B2Safe separation for nano imprintingMOLECULAR IMPRINTS INC·Filed 2018·Granted Jun 1, 2021·0 cites·10 claims
- 1758US2015165671A1Safe separation for nano imprintingCANON NANOTECHNOLOGIES INC·Filed 2015·Application pending·0 cites
- 1841US10409156B2Mold, imprint apparatus, and method of manufacturing articleCANON KK·Filed 2016·Granted Sep 10, 2019·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →