Inventor · disambiguated record
Richard E. Demaray
Also filed as: DEMARAY RICHARD E · DEMARAY RICHARD ERNEST
41 granted patents·4 pending applications·2,120 citations·filing 1985–2013
99Inventor score
Files withAPPLIED MATERIALS INC10SPRINGWORKS LLC8SYMMORPHIX INC6APPLIED KOMATSU TECHNOLOGY INC5DEMARAY RICHARD E3
Top patents by PatentIndex Score
45 records- 0198US5433835ASputtering device and target with cover to hold cooling fluidAPPLIED MATERIALS INC·Filed 1993·Granted Jul 18, 1995·115 cites·26 claims
- 0297US7959769B2Deposition of LiCoO2INFINITE POWER SOLUTIONS INC·Filed 2006·Granted Jun 14, 2011·44 cites·32 claims
- 0397US5252194ARotating sputtering apparatus for selected erosionVARIAN ASSOCIATES·Filed 1992·Granted Oct 12, 1993·181 cites·28 claims
- 0497US4676994AAdherent ceramic coatingsBOC GROUP INC·Filed 1985·Granted Jun 30, 1987·153 cites·17 claims
- 0596US7544276B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2005·Granted Jun 9, 2009·22 cites·13 claims
- 0696US5603816ASputtering device and target with cover to hold cooling fluidAPPLIED MATERIALS INC·Filed 1995·Granted Feb 18, 1997·91 cites·2 claims
- 0796US5565071AIntegrated sputtering target assemblyAPPLIED MATERIALS INC·Filed 1995·Granted Oct 15, 1996·126 cites·11 claims
- 0896US5518593AShield configuration for vacuum chamberAPPLIED KOMATSU TECHNOLOGY INC·Filed 1994·Granted May 21, 1996·105 cites·34 claims
- 0996US5487822AIntegrated sputtering target assemblyAPPLIED MATERIALS INC·Filed 1994·Granted Jan 30, 1996·106 cites·9 claims
- 1095US7413998B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2005·Granted Aug 19, 2008·17 cites·13 claims
- 1195US6533907B2Method of producing amorphous silicon for hard mask and waveguide applicationsSYMMORPHIX INC·Filed 2001·Granted Mar 18, 2003·91 cites·4 claims
- 1295US6506289B2Planar optical devices and methods for their manufactureSYMMORPHIX INC·Filed 2001·Granted Jan 14, 2003·101 cites·32 claims
- 1394US7838133B2Deposition of perovskite and other compound ceramic films for dielectric applicationsSPRINGWORKS LLC·Filed 2005·Granted Nov 23, 2010·27 cites·26 claims
- 1494US6884327B2Mode size converter for a planar waveguideFiled 2002·Granted Apr 26, 2005·78 cites·11 claims
- 1594US6827826B2Planar optical devices and methods for their manufactureSYMMORPHIX INC·Filed 2002·Granted Dec 7, 2004·62 cites·5 claims
- 1693US8105466B2Biased pulse DC reactive sputtering of oxide filmsZHANG HONGMEI·Filed 2005·Granted Jan 31, 2012·13 cites·22 claims
- 1793US7262131B2Dielectric barrier layer filmsSYMMORPHIX INC·Filed 2005·Granted Aug 28, 2007·21 cites·24 claims
- 1892US7238628B2Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxidesSYMMORPHIX INC·Filed 2004·Granted Jul 3, 2007·59 cites·42 claims
- 1992US5855744ANon-planar magnet tracking during magnetron sputteringAPPLIED KOMATSU TECHNOLOGY INC·Filed 1996·Granted Jan 5, 1999·132 cites·42 claims
- 2091US6199259B1Autoclave bonding of sputtering target assemblyAPPLIED KOMATSU TECHNOLOGY INC·Filed 1995·Granted Mar 13, 2001·76 cites·32 claims
- 2190US8636876B2Deposition of LiCoO2ZHANG HONGMEI·Filed 2005·Granted Jan 28, 2014·9 cites·17 claims
- 2290US7378356B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2002·Granted May 27, 2008·30 cites·35 claims
- 2390US5676803ASputtering deviceFiled 1997·Granted Oct 14, 1997·46 cites·12 claims
- 2489US7381657B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2004·Granted Jun 3, 2008·26 cites·21 claims
- 2589US5595337ASputtering device and target with cover to hold cooling fluidAPPLIED MATERIALS INC·Filed 1995·Granted Jan 21, 1997·44 cites·3 claims
- 2688US8045832B2Mode size converter for a planar waveguideSPRINGWORKS LLC·Filed 2005·Granted Oct 25, 2011·17 cites·8 claims
- 2788US5799860APreparation and bonding of workpieces to form sputtering targets and other assembliesAPPLIED MATERIALS INC·Filed 1995·Granted Sep 1, 1998·56 cites·16 claims
- 2885US7469558B2As-deposited planar optical waveguides with low scattering loss and methods for their manufactureSPRINGWORKS LLC·Filed 2001·Granted Dec 30, 2008·34 cites·12 claims
- 2983US8076005B2Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxidesDEMARAY RICHARD E·Filed 2007·Granted Dec 13, 2011·9 cites·36 claims
- 3079US6773562B1Shadow frame for substrate processingAPPLIED MATERIALS INC·Filed 1998·Granted Aug 10, 2004·54 cites·2 claims
- 3176US6436509B1Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatusAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·10 cites·37 claims
- 3276US6362097B1Collimated sputtering of semiconductor and other filmsAPPLIED KOMATSU TECHNLOLOGY IN·Filed 1998·Granted Mar 26, 2002·54 cites·30 claims
- 3372US7404877B2Low temperature zirconia based thermal barrier layer by PVDSPRINGWORKS LLC·Filed 2002·Granted Jul 29, 2008·12 cites·6 claims
- 3470US7205662B2Dielectric barrier layer filmsSYMMORPHIX INC·Filed 2004·Granted Apr 17, 2007·11 cites·44 claims
- 3567US6257045B1Automated substrate processing systems and methodsAPPLIED KOMATSU TECHNOLOGY INC·Filed 1999·Granted Jul 10, 2001·31 cites·29 claims
- 3667US6033483AElectrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Mar 7, 2000·16 cites·10 claims
- 3760US6821562B2Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatusAPPLIED MATERIALS INC·Filed 2002·Granted Nov 23, 2004·3 cites·20 claims
- 3859US6205870B1Automated substrate processing systems and methodsAPPLIED KOMATSU TECHNOLOGY INC·Filed 1997·Granted Mar 27, 2001·22 cites·22 claims
- 3955US8728285B2Transparent conductive oxidesDEMARAY RICHARD E·Filed 2004·Granted May 20, 2014·2 cites·28 claims
- 4051US4834860AMagnetron sputtering targetsBOC GROUP INC·Filed 1987·Granted May 30, 1989·14 cites·14 claims
- 4146US8173482B2Devices and methods of protecting a cadmium sulfide for further processingDRAYTON JENNIFER ANN·Filed 2010·Granted May 8, 2012·0 cites·19 claims
- 4246US2007045108A1Monolithic sputter target backing plate with integrated cooling passagesDEMARAY RICHARD E·Filed 2006·Application pending·0 cites
- 4342US2016181066A1Laminated materials, methods and apparatus for making same, and uses thereofNITRIDE SOLUTIONS INC·Filed 2013·Application pending·0 cites
- 4437US2003174391A1Gain flattened optical amplifierFiled 2002·Application pending·0 cites
- 4535US2004081415A1Planar optical waveguide amplifier with mode size converterFiled 2003·Application pending·0 cites
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