Inventor · disambiguated record
Takahito Umehara
Also filed as: UMEHARA TAKAHITO
10 granted patents·4 pending applications·12 citations·filing 2002–2021
81Inventor score
Files withTOKYO ELECTRON LTD13
Top patents by PatentIndex Score
14 records- 0182US10648076B2Cleaning method and film deposition apparatus executing the cleaning method for uniformly cleaning rotary tableTOKYO ELECTRON LTD·Filed 2017·Granted May 12, 2020·1 cites·8 claims
- 0272US9388496B2Method for depositing a film on a substrate, and film deposition apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jul 12, 2016·2 cites·7 claims
- 0369US10344382B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jul 9, 2019·1 cites·10 claims
- 0459US2021180182A1Method of cleaning exhaust pipeTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0558US7651733B2Method for forming a vapor phase growth filmTOKYO ELECTRON LTD·Filed 2006·Granted Jan 26, 2010·0 cites·4 claims
- 0654US7041546B2Film forming method for depositing a plurality of high-k dielectric filmsTOKYO ELECTRON LTD·Filed 2003·Granted May 9, 2006·5 cites·4 claims
- 0751US10975466B2Method of cleaning exhaust pipeTOKYO ELECTRON LTD·Filed 2018·Granted Apr 13, 2021·0 cites·4 claims
- 0849US7229917B2Film formation method and apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2004·Granted Jun 12, 2007·3 cites·13 claims
- 0944US2003186560A1Gaseous phase growing deviceFiled 2002·Application pending·0 cites
- 1040US2019157098A1Etching Method and Method of Filling Recessed Pattern Using the SameTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1139US11075076B2Method for manufacturing a semiconductor device and film deposition apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 27, 2021·0 cites·2 claims
- 1238US11214864B2Method for reducing metal contamination and film deposition apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 4, 2022·0 cites·5 claims
- 1336US10151028B2Film deposition apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Dec 11, 2018·0 cites·10 claims
- 1434US2017125282A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Takahito Umehara files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →