Inventor · disambiguated record
Yung-Ho Alex Chuang
Also filed as: CHUANG YUNG-HO · CHUANG YUNG-HO ALEX
163 granted patents·16 pending applications·2,917 citations·filing 1983–2024
99Inventor score
Top patents by PatentIndex Score
179 records- 0199US8929406B2193NM laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Jan 6, 2015·63 cites·26 claims
- 0299US5717518ABroad spectrum ultraviolet catadioptric imaging systemKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·243 cites·20 claims
- 0398US10921261B2Strontium tetraborate as optical coating materialKLA CORP·Filed 2020·Granted Feb 16, 2021·11 cites·17 claims
- 0498US10748730B2Photocathode including field emitter array on a silicon substrate with boron layerKLA TENCOR CORP·Filed 2016·Granted Aug 18, 2020·16 cites·27 claims
- 0598US7528943B2Method and apparatus for simultaneous high-speed acquisition of multiple imagesKLA TENCOR TECH CORP·Filed 2005·Granted May 5, 2009·76 cites·28 claims
- 0698US5999310AUltra-broadband UV microscope imaging system with wide range zoom capabilityFiled 1997·Granted Dec 7, 1999·224 cites·23 claims
- 0797US11237455B2Frequency conversion using stacked strontium tetraborate platesKLA CORP·Filed 2021·Granted Feb 1, 2022·6 cites·23 claims
- 0897US9818887B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2016·Granted Nov 14, 2017·11 cites·15 claims
- 0997US9660409B2Low noise, high stability, deep ultra-violet, continuous wave laserKLA TENCOR CORP·Filed 2016·Granted May 23, 2017·11 cites·11 claims
- 1097US9529182B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Dec 27, 2016·33 cites·3 claims
- 1197US9496425B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2013·Granted Nov 15, 2016·29 cites·26 claims
- 1297US9478402B2Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensorKLA TENCOR CORP·Filed 2014·Granted Oct 25, 2016·20 cites·10 claims
- 1397US9461435B2Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon populationKLA TENCOR CORP·Filed 2015·Granted Oct 4, 2016·13 cites·11 claims
- 1497US9151940B2Semiconductor inspection and metrology system using laser pulse multiplierKLA TENCOR CORP·Filed 2012·Granted Oct 6, 2015·32 cites·16 claims
- 1597US8873596B2Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystalDRIBINSKI VLADIMIR·Filed 2012·Granted Oct 28, 2014·56 cites·15 claims
- 1697US8675188B2Method and system for determining one or more optical characteristics of structure of a semiconductor waferKLA TENCOR CORP·Filed 2013·Granted Mar 18, 2014·33 cites·29 claims
- 1797US8441639B2Metrology systems and methodsKANDEL DANIEL·Filed 2010·Granted May 14, 2013·35 cites·22 claims
- 1897US7952633B2Apparatus for continuous clocking of TDI sensorsKLA TENCOR TECH CORP·Filed 2005·Granted May 31, 2011·63 cites·26 claims
- 1997US7627007B1Non-critical phase matching in CLBO to generate sub-213nm wavelengthsKLA TENCOR TECH CORP·Filed 2006·Granted Dec 1, 2009·42 cites·17 claims
- 2097US7345825B2Beam delivery system for laser dark-field illumination in a catadioptric optical systemKLA TENCOR TECH CORP·Filed 2005·Granted Mar 18, 2008·60 cites·23 claims
- 2197US6842298B1Broad band DUV, VUV long-working distance catadioptric imaging systemKLA TENCOR TECH CORP·Filed 2001·Granted Jan 11, 2005·83 cites·38 claims
- 2297US6064517AHigh NA system for multiple mode imagingKLA TENCOR CORP·Filed 1998·Granted May 16, 2000·135 cites·65 claims
- 2396US11360032B2Strontium tetraborate as optical coating materialKLA CORP·Filed 2021·Granted Jun 14, 2022·4 cites·7 claims
- 2496US11114491B2Back-illuminated sensor and a method of manufacturing a sensorKLA CORP·Filed 2019·Granted Sep 7, 2021·8 cites·16 claims
- 2596US10121914B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2017·Granted Nov 6, 2018·9 cites·14 claims
- 2696US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 2796US9748729B2183NM laser and inspection systemKLA TENCOR CORP·Filed 2015·Granted Aug 29, 2017·14 cites·13 claims
- 2896US9608399B2193 nm laser and an inspection system using a 193 nm laserKLA TENCOR CORP·Filed 2014·Granted Mar 28, 2017·21 cites·18 claims
- 2996US9601299B2Photocathode including silicon substrate with boron layerKLA TENCOR CORP·Filed 2013·Granted Mar 21, 2017·18 cites·12 claims
- 3096US9459215B2Passivation of nonlinear optical crystalsKLA TENCOR CORP·Filed 2016·Granted Oct 4, 2016·14 cites·22 claims
- 3196US9250178B2Passivation of nonlinear optical crystalsCHUANG YUNG-HO·Filed 2012·Granted Feb 2, 2016·21 cites·24 claims
- 3296US9080971B2Metrology systems and methodsKLA TENCOR CORP·Filed 2014·Granted Jul 14, 2015·21 cites·12 claims
- 3396US7957066B2Split field inspection system using small catadioptric objectivesKLA TENCOR CORP·Filed 2008·Granted Jun 7, 2011·55 cites·21 claims
- 3495US11567391B1Frequency conversion using interdigitated nonlinear crystal gratingsKLA CORP·Filed 2021·Granted Jan 31, 2023·5 cites·21 claims
- 3595US11180866B2Passivation of nonlinear optical crystalsKLA TENCOR CORP·Filed 2014·Granted Nov 23, 2021·7 cites·20 claims
- 3695US10446696B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2018·Granted Oct 15, 2019·5 cites·18 claims
- 3795US10325004B1Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrologyDZIURA THADDEUS G·Filed 2016·Granted Jun 18, 2019·11 cites·14 claims
- 3895US10283366B2Passivation of nonlinear optical crystalsKLA TENCOR CORP·Filed 2016·Granted May 7, 2019·8 cites·15 claims
- 3995US10175555B2183 nm CW laser and inspection systemKLA TENCOR CORP·Filed 2017·Granted Jan 8, 2019·12 cites·35 claims
- 4095US10044166B2CW DUV laser with improved stabilityKLA TENCOR CORP·Filed 2016·Granted Aug 7, 2018·10 cites·19 claims
- 4195US9865447B2High brightness laser-sustained plasma broadband sourceKLA TENCOR CORP·Filed 2016·Granted Jan 9, 2018·19 cites·38 claims
- 4295US9767986B2Scanning electron microscope and methods of inspecting and reviewing samplesKLA TENCOR CORP·Filed 2015·Granted Sep 19, 2017·13 cites·21 claims
- 4395US9748294B2Anti-reflection layer for back-illuminated sensorKLA TENCOR CORP·Filed 2015·Granted Aug 29, 2017·15 cites·10 claims
- 4495US9426400B2Method and apparatus for high speed acquisition of moving images using pulsed illuminationKLA TENCOR CORP·Filed 2013·Granted Aug 23, 2016·32 cites·20 claims
- 4595US8624971B2TDI sensor modules with localized driving and signal processing circuitry for high speed inspectionBROWN DAVID L·Filed 2009·Granted Jan 7, 2014·22 cites·46 claims
- 4695US7609309B2Continuous clocking of TDI sensorsKLA TENCOR TECH CORP·Filed 2004·Granted Oct 27, 2009·78 cites·66 claims
- 4795US7136159B2Excimer laser inspection systemKLA TENCOR TECH CORP·Filed 2002·Granted Nov 14, 2006·69 cites·44 claims
- 4895US6693930B1Peak power and speckle contrast reduction for a single laser pulseKLA TENCOR TECH CORP·Filed 2000·Granted Feb 17, 2004·66 cites·14 claims
- 4995US6137570ASystem and method for analyzing topological features on a surfaceKLA TENCOR CORP·Filed 1998·Granted Oct 24, 2000·161 cites·29 claims
- 5094US9509112B2CW DUV laser with improved stabilityKLA TENCOR CORP·Filed 2014·Granted Nov 29, 2016·13 cites·22 claims
Showing the top 50 of 179 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →