Inventor · disambiguated record
Tsutomu Ueyama
Also filed as: UEYAMA TSUTOMU
14 granted patents·3 pending applications·541 citations·filing 1984–2006
93Inventor score
Top patents by PatentIndex Score
17 records- 0195US5571325ASubtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatusDAINIPPON SCREEN MFG·Filed 1995·Granted Nov 5, 1996·235 cites·13 claims
- 0292US5916366ASubstrate spin treating apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Jun 29, 1999·130 cites·19 claims
- 0386US6859616B2Apparatus for and method of heat treatment by light irradiationDAINIPPON SCREEN MFG·Filed 2003·Granted Feb 22, 2005·38 cites·12 claims
- 0478US4757223ALinear actuatorDAINIPPON SCREEN MFG·Filed 1987·Granted Jul 12, 1988·37 cites·8 claims
- 0576US6893805B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2002·Granted May 17, 2005·20 cites·17 claims
- 0672US4642701ADevice of switching a scanning beam diameterDAINIPPON SCREEN MFG·Filed 1984·Granted Feb 10, 1987·20 cites·8 claims
- 0764US6926057B2Thin film forming apparatus and thin film forming methodDAINIPPON SCREEN MFG·Filed 2002·Granted Aug 9, 2005·9 cites·16 claims
- 0863US4743792APiezoelectric motorDAINIPPON SCREEN MFG·Filed 1986·Granted May 10, 1988·20 cites·11 claims
- 0962US7017637B2Thin film forming apparatus and thin film forming methodNIPPON TELEGRAPH & TELEPHONE·Filed 2002·Granted Mar 28, 2006·7 cites·14 claims
- 1057US4707123AFilm end holding deviceDAINIPPON SCREEN MFG·Filed 1986·Granted Nov 17, 1987·11 cites·3 claims
- 1153US4770404AMethod and device for loading and unloading a film on and out of a rotary drum in the exposure/recording apparatusDAINIPPON SCREEN MFG·Filed 1987·Granted Sep 13, 1988·10 cites·12 claims
- 1249US6918421B2Thin film forming apparatus and thin film forming methodDAINIPPON SCREEN MFG·Filed 2002·Granted Jul 19, 2005·2 cites·10 claims
- 1348US2006113021A1Thin film forming apparatus and thin film forming methodNIPPON TELEGRAPH & TELEPHONE·Filed 2006·Application pending·0 cites
- 1446US2005139313A1Thin film forming apparatus and thin film forming methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1543US2005230035A1Thin film forming apparatus and thin film forming methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1638US6911088B2Substrate processing apparatus and slit nozzleDAINIPPON SCREEN MFG·Filed 2003·Granted Jun 28, 2005·0 cites·19 claims
- 1733US4847634AMethod and apparatus for correcting snaking in a rollfilm feeding apparatusDAINIPPON SCREEN MFG·Filed 1987·Granted Jul 11, 1989·2 cites·22 claims
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