Inventor · disambiguated record
David A. Markle
Also filed as: MARKLE DAVID · MARKLE DAVID A · MARKLE DAVID ARTHUR
81 granted patents·12 pending applications·3,024 citations·filing 1974–2024
99Inventor score
Files withULTRATECH INC23ULTRATECH STEPPER INC19PERKIN ELMER CORP15APPLIED MATERIALS INC13MARKLE DAVID A5
Top patents by PatentIndex Score
93 records- 0199US6072251AMagnetically positioned X-Y stage having six degrees of freedomULTRATECH STEPPER INC·Filed 1999·Granted Jun 6, 2000·270 cites·35 claims
- 0299US5691541AMaskless, reticle-free, lithographyUNIV CALIFORNIA·Filed 1996·Granted Nov 25, 1997·358 cites·20 claims
- 0398US6747245B2Laser scanning apparatus and methods for thermal processingULTRATECH STEPPER INC·Filed 2002·Granted Jun 8, 2004·190 cites·43 claims
- 0498US6531681B1Apparatus having line source of radiant energy for exposing a substrateULTRATECH STEPPER INC·Filed 2000·Granted Mar 11, 2003·241 cites·27 claims
- 0598US6479821B1Thermally induced phase switch for laser thermal processingULTRATECH STEPPER INC·Filed 2000·Granted Nov 12, 2002·289 cites·48 claims
- 0696US9329484B1Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resistPERIODIC STRUCTURES INC·Filed 2015·Granted May 3, 2016·16 cites·9 claims
- 0796US7514305B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateULTRATECH INC·Filed 2006·Granted Apr 7, 2009·37 cites·22 claims
- 0896US6441514B1Magnetically positioned X-Y stage having six degrees of freedomULTRATECH STEPPER INC·Filed 2000·Granted Aug 27, 2002·99 cites·11 claims
- 0995US7154066B2Laser scanning apparatus and methods for thermal processingULTRATECH INC·Filed 2004·Granted Dec 26, 2006·81 cites·10 claims
- 1094US9645496B2Maskless digital lithography systems and methods with image motion compensationMARKLE DAVID A·Filed 2015·Granted May 9, 2017·7 cites·21 claims
- 1194US7494942B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2006·Granted Feb 24, 2009·22 cites·9 claims
- 1294US7399945B2Method of thermal processing a substrate with direct and redirected reflected radiationULTRATECH INC·Filed 2006·Granted Jul 15, 2008·23 cites·6 claims
- 1393US7098155B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2004·Granted Aug 29, 2006·57 cites·8 claims
- 1493US4011011AOptical projection apparatusPERKIN ELMER CORP·Filed 1974·Granted Mar 8, 1977·77 cites·8 claims
- 1592US7744274B1Methods and apparatus for temperature measurement and control on a remote substrate surfaceULTRATECH INC·Filed 2007·Granted Jun 29, 2010·30 cites·20 claims
- 1692US6671235B1Method of and apparatus for defining disk tracks in magnetic recording mediaULTRATECH STEPPER INC·Filed 2000·Granted Dec 30, 2003·37 cites·31 claims
- 1792US5886432AMagnetically-positioned X-Y stage having six-degrees of freedomULTRATECH STEPPER INC·Filed 1997·Granted Mar 23, 1999·80 cites·19 claims
- 1892US4241390ASystem for illuminating an annular fieldPERKIN ELMER CORP·Filed 1978·Granted Dec 23, 1980·65 cites·34 claims
- 1991US6753947B2Lithography system and method for device manufactureULTRATECH STEPPER INC·Filed 2001·Granted Jun 22, 2004·53 cites·100 claims
- 2091US6381077B1Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrateULTRATECH STEPPER INC·Filed 2000·Granted Apr 30, 2002·44 cites·24 claims
- 2190US9250509B2Optical projection array exposure systemAPPLIED MATERIALS INC·Filed 2013·Granted Feb 2, 2016·6 cites·16 claims
- 2288US6556279B1Motion compensation system and method for lithographyULTRATECH STEPPER INC·Filed 2001·Granted Apr 29, 2003·34 cites·25 claims
- 2388US4068947AOptical projection and scanning apparatusPERKIN ELMER CORP·Filed 1976·Granted Jan 17, 1978·61 cites·8 claims
- 2487US8153930B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2009·Granted Apr 10, 2012·8 cites·19 claims
- 2587US7879741B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2006·Granted Feb 1, 2011·10 cites·18 claims
- 2687US7253376B2Methods and apparatus for truncating an image formed with coherent radiationULTRATECH INC·Filed 2005·Granted Aug 7, 2007·15 cites·43 claims
- 2787US6825101B1Methods for annealing a substrate and article produced by such methodsULTRATECH INC·Filed 2000·Granted Nov 30, 2004·36 cites·65 claims
- 2887US5822066APoint diffraction interferometer and pin mirror for use therewithULTRATECH STEPPER INC·Filed 1997·Granted Oct 13, 1998·68 cites·74 claims
- 2987US3951546AThree-fold mirror assembly for a scanning projection systemPERKIN ELMER CORP·Filed 1974·Granted Apr 20, 1976·34 cites·5 claims
- 3086US7763828B2Laser thermal processing with laser diode radiationULTRATECH INC·Filed 2003·Granted Jul 27, 2010·35 cites·22 claims
- 3186US7157660B2Laser scanning apparatus and methods for thermal processingULTRATECH INC·Filed 2004·Granted Jan 2, 2007·30 cites·33 claims
- 3286US7148159B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2003·Granted Dec 12, 2006·31 cites·17 claims
- 3386US4549084AAlignment and focusing system for a scanning mask alignerPERKIN ELMER CORP·Filed 1982·Granted Oct 22, 1985·39 cites·18 claims
- 3485US7238915B2Methods and apparatus for irradiating a substrate to avoid substrate edge damageULTRATECH INC·Filed 2005·Granted Jul 3, 2007·8 cites·14 claims
- 3584US7947968B1Processing substrates using direct and recycled radiationULTRATECH INC·Filed 2009·Granted May 24, 2011·9 cites·21 claims
- 3683US9733573B2Optical projection array exposure systemAPPLIED MATERIALS INC·Filed 2016·Granted Aug 15, 2017·2 cites·15 claims
- 3781US11499306B2Differential settlement anchorsTHERMACRETE LLC·Filed 2019·Granted Nov 15, 2022·3 cites·9 claims
- 3880US8742286B1Apparatus and method for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2012·Granted Jun 3, 2014·3 cites·3 claims
- 3980US6809888B1Apparatus and methods for thermal reduction of optical distortionULTRATECH INC·Filed 2003·Granted Oct 26, 2004·20 cites·12 claims
- 4080US6731376B1System and method for reducing colinearity effects in manufacturing microdevicesULTRATECH STEPPER INC·Filed 2001·Granted May 4, 2004·17 cites·27 claims
- 4178US4545683AWafer alignment devicePERKIN ELMER CORP·Filed 1983·Granted Oct 8, 1985·28 cites·10 claims
- 4277US4650315AOptical lithographic systemPERKIN ELMER CORP·Filed 1985·Granted Mar 17, 1987·25 cites·8 claims
- 4376US5621813APattern recognition alignment systemULTRATECH STEPPER INC·Filed 1995·Granted Apr 15, 1997·68 cites·16 claims
- 4473US9304410B2Apparatus and method of direct writing with photons beyond the diffraction limitMARKLE DAVID A·Filed 2013·Granted Apr 5, 2016·2 cites·20 claims
- 4573US8642232B2Method of direct writing with photons beyond the diffraction limitMARKLE DAVID A·Filed 2012·Granted Feb 4, 2014·2 cites·19 claims
- 4672US5557469ABeamsplitter in single fold optical system and optical variable magnification method and systemULTRATECH STEPPER INC·Filed 1994·Granted Sep 17, 1996·36 cites·28 claims
- 4771US6833908B2Computer architecture for and method of high-resolution imaging using a low-resolution image transducerULTRATECH INC·Filed 2001·Granted Dec 21, 2004·9 cites·7 claims
- 4871US5040882AUnit magnification optical system with improved reflective reticleGEN SIGNAL CORP·Filed 1990·Granted Aug 20, 1991·34 cites·12 claims
- 4971US4964705AUnit magnification optical systemGEN SIGNAL CORP·Filed 1988·Granted Oct 23, 1990·28 cites·26 claims
- 5070US2022403646A1Structural assembly using differential settlement anchorsTHERMACRETE LLC·Filed 2022·Application pending·0 cites
Showing the top 50 of 93 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →