Inventor · disambiguated record
Reza Golzarian
Also filed as: GOLZARIAN REZA · GOLZARIAN REZA M
20 granted patents·8 pending applications·140 citations·filing 1997–2023
93Inventor score
Top patents by PatentIndex Score
28 records- 0186US10385236B2Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substratesBASF SE·Filed 2015·Granted Aug 20, 2019·5 cites·14 claims
- 0284US6875086B2Surface planarizationINTEL CORP·Filed 2003·Granted Apr 5, 2005·26 cites·13 claims
- 0383US6976907B2Polishing pad conditioningINTEL CORP·Filed 2003·Granted Dec 20, 2005·29 cites·33 claims
- 0482US10899945B2Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substratesBASF SE·Filed 2016·Granted Jan 26, 2021·3 cites·20 claims
- 0579US6419553B2Methods for break-in and conditioning a fixed abrasive polishing padRODEL INC·Filed 2001·Granted Jul 16, 2002·19 cites·2 claims
- 0675US11264250B2Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substratesBASF SE·Filed 2016·Granted Mar 1, 2022·2 cites·21 claims
- 0772US12351737B2Chemical mechanical polishing of substrates containing copper and rutheniumBASF SE·Filed 2023·Granted Jul 8, 2025·0 cites·12 claims
- 0871US6406641B1Liquid etch endpoint detection and process metrologyLUXTRON CORP·Filed 1997·Granted Jun 18, 2002·39 cites·12 claims
- 0969US2024002698A1Chemical mechanical polishing of substrates containing copper and rutheniumBASF SE·Filed 2023·Application pending·0 cites
- 1067US7153760B2Using acoustic energy including two lasers to activate implanted speciesINTEL CORP·Filed 2003·Granted Dec 26, 2006·10 cites·18 claims
- 1159US7405419B2Unidirectionally conductive materials for interconnectionINTEL CORP·Filed 2005·Granted Jul 29, 2008·1 cites·13 claims
- 1259US2021102093A1Use of a chemical mechanical polishing (cmp) composition for polishing of cobalt comprising substratesBASF SE·Filed 2020·Application pending·0 cites
- 1355US2022049125A1Chemical mechanical polishing of substrates containing copper and rutheniumBASF SE·Filed 2019·Application pending·0 cites
- 1455US2022064485A1Chemical mechanical polishing of substrates containing copper and rutheniumBASF SE·Filed 2019·Application pending·0 cites
- 1554US7084053B2Unidirectionally conductive materials for interconnectionINTEL CORP·Filed 2003·Granted Aug 1, 2006·5 cites·8 claims
- 1647US10570316B2Chemical mechanical polishing (CMP) compositionBASF SE·Filed 2015·Granted Feb 25, 2020·0 cites·20 claims
- 1746US11725117B2Chemical mechanical polishing of substrates containing copper and rutheniumBASF SE·Filed 2019·Granted Aug 15, 2023·0 cites·17 claims
- 1845US11993729B2Chemical mechanical polishing compositionBASF SE·Filed 2018·Granted May 28, 2024·0 cites·21 claims
- 1944US7156947B2Energy enhanced surface planarizationINTEL CORP·Filed 2004·Granted Jan 2, 2007·1 cites·22 claims
- 2041US2007251157A1Pre-coated particles for chemical mechanical polishingGOLZARIAN REZA M·Filed 2007·Application pending·0 cites
- 2140US11286402B2Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substratesBASF SE·Filed 2015·Granted Mar 29, 2022·0 cites·12 claims
- 2240US10738219B2Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substratesBASF SE·Filed 2015·Granted Aug 11, 2020·0 cites·14 claims
- 2338US10214663B2Chemical-mechanical polishing composition comprising organic/inorganic composite particlesBASF SE·Filed 2015·Granted Feb 26, 2019·0 cites·20 claims
- 2438US7097536B2Electrically enhanced surface planarizationINTEL CORP·Filed 2004·Granted Aug 29, 2006·0 cites·27 claims
- 2538US2006000806A1Substrate carrier for surface planarizationGOLZARIAN REZA M·Filed 2004·Application pending·0 cites
- 2636US2002173235A1Methods for break-in and conditioning a fixed abrasive polishing padFiled 2002·Application pending·0 cites
- 2734US7229484B2Pre-coated particles for chemical mechanical polishingINTEL CORP·Filed 2002·Granted Jun 12, 2007·0 cites·11 claims
- 2832US2001039175A1Polishing pad surface on hollow postsFiled 2001·Application pending·0 cites
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