Assignee
LUXTRON CORP
US·65 granted patents·1 pending application·4,511 citations·filing 1978–2008
Top patents by PatentIndex Score
66 records- 0199US4560286AOptical temperature measurement techniques utilizing phosphorsLUXTRON CORP·Filed 1983·Granted Dec 24, 1985·153 cites·27 claims
- 0299US4448547AOptical temperature measurement technique utilizing phosphorsLUXTRON CORP·Filed 1980·Granted May 15, 1984·176 cites·67 claims
- 0399US4215275AOptical temperature measurement technique utilizing phosphorsLUXTRON CORP·Filed 1978·Granted Jul 29, 1980·134 cites·21 claims
- 0496US4986671AThree-parameter optical fiber sensor and systemLUXTRON CORP·Filed 1989·Granted Jan 22, 1991·722 cites·44 claims
- 0596US4752141AFiberoptic sensing of temperature and/or other physical parametersLUXTRON CORP·Filed 1986·Granted Jun 21, 1988·154 cites·24 claims
- 0696US4652143AOptical temperature measurement techniquesLUXTRON CORP·Filed 1985·Granted Mar 24, 1987·118 cites·30 claims
- 0796US4621929AFiber optic thermal anemometerLUXTRON CORP·Filed 1983·Granted Nov 11, 1986·85 cites·79 claims
- 0895US5304809ALuminescent decay time measurements by use of a CCD cameraLUXTRON CORP·Filed 1992·Granted Apr 19, 1994·144 cites·22 claims
- 0994US6010538AIn situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication linkLUXTRON CORP·Filed 1996·Granted Jan 4, 2000·216 cites·44 claims
- 1094US5499733AOptical techniques of measuring endpoint during the processing of material layers in an optically hostile environmentLUXTRON CORP·Filed 1993·Granted Mar 19, 1996·139 cites·23 claims
- 1194US5154512ANon-contact techniques for measuring temperature or radiation-heated objectsLUXTRON CORP·Filed 1990·Granted Oct 13, 1992·119 cites·32 claims
- 1293US5695660AOptical techniques of measuring endpoint during the processing of material layers in an optically hostile environmentLUXTRON CORP·Filed 1996·Granted Dec 9, 1997·98 cites·46 claims
- 1393US4678905AOptical sensors for detecting physical parameters utilizing vibrating piezoelectric elementsLUXTRON CORP·Filed 1984·Granted Jul 7, 1987·53 cites·61 claims
- 1492US5490728ANon-contact optical techniques for measuring surface conditionsLUXTRON CORP·Filed 1994·Granted Feb 13, 1996·96 cites·56 claims
- 1592US5183338ATemperature measurement with combined photo-luminescent and black body sensing techniquesLUXTRON CORP·Filed 1991·Granted Feb 2, 1993·104 cites·6 claims
- 1692US5107445AModular luminescence-based measuring system using fast digital signal processingLUXTRON CORP·Filed 1990·Granted Apr 21, 1992·89 cites·22 claims
- 1791US4897541ASensors for detecting electromagnetic parameters utilizing resonating elementsLUXTRON CORP·Filed 1988·Granted Jan 30, 1990·70 cites·39 claims
- 1891US4883354AFiberoptic sensing of temperature and/or other physical parametersLUXTRON CORP·Filed 1988·Granted Nov 28, 1989·53 cites·20 claims
- 1990US6572265B1In situ optical surface temperature measuring techniques and devicesLUXTRON CORP·Filed 2001·Granted Jun 3, 2003·56 cites·36 claims
- 2090US5364186AApparatus and method for monitoring a temperature using a thermally fused composite ceramic blackbody temperature probeLUXTRON CORP·Filed 1992·Granted Nov 15, 1994·97 cites·5 claims
- 2190US5166080ATechniques for measuring the thickness of a film formed on a substrateLUXTRON CORP·Filed 1991·Granted Nov 24, 1992·90 cites·28 claims
- 2290US4988212AFiberoptic sensing of temperature and/or other physical parametersLUXTRON CORP·Filed 1989·Granted Jan 29, 1991·74 cites·4 claims
- 2390US4789992AOptical temperature measurement techniquesLUXTRON CORP·Filed 1987·Granted Dec 6, 1988·84 cites·38 claims
- 2489US7042581B2Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafersLUXTRON CORP·Filed 2004·Granted May 9, 2006·34 cites·18 claims
- 2589US6654132B1Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafersLUXTRON CORP·Filed 2000·Granted Nov 25, 2003·35 cites·21 claims
- 2689US5052214AKnock detector using optical fiber thermometerLUXTRON CORP·Filed 1989·Granted Oct 1, 1991·36 cites·24 claims
- 2788US7080940B2In situ optical surface temperature measuring techniques and devicesLUXTRON CORP·Filed 2004·Granted Jul 25, 2006·37 cites·16 claims
- 2888US5769540ANon-contact optical techniques for measuring surface conditionsLUXTRON CORP·Filed 1994·Granted Jun 23, 1998·84 cites·33 claims
- 2988US4859079AOptical system using a luminescent material sensor for measuring very high temperaturesLUXTRON CORP·Filed 1988·Granted Aug 22, 1989·57 cites·14 claims
- 3086US6077452AOptical techniques of measuring endpoint during the processing of material layers in an optically hostile environmentLUXTRON CORP·Filed 1999·Granted Jun 20, 2000·56 cites·30 claims
- 3184US7374335B2In situ optical surface temperature measuring techniques and devicesLUXTRON CORP·Filed 2006·Granted May 20, 2008·12 cites·27 claims
- 3284US6028669ASignal processing for in situ monitoring of the formation or removal of a transparent layerLUXTRON CORP·Filed 1997·Granted Feb 22, 2000·57 cites·42 claims
- 3384US5351268AModular luminescence-based measuring system using fast digital signal processingLUXTRON CORP·Filed 1991·Granted Sep 27, 1994·51 cites·17 claims
- 3484US5310260ANon-contact optical techniques for measuring surface conditionsLUXTRON CORP·Filed 1992·Granted May 10, 1994·57 cites·33 claims
- 3582US5717608AElectro-optical board assembly for measuring the temperature of an object surface from infra-red emissions thereof, including an automatic gain control thereforeLUXTRON CORP·Filed 1994·Granted Feb 10, 1998·47 cites·23 claims
- 3682US4626110ATechnique for optically measuring the temperature of an ultrasonically heated objectLUXTRON CORP·Filed 1985·Granted Dec 2, 1986·44 cites·15 claims
- 3779US5318362ANon-contact techniques for measuring temperature of radiation-heated objectsLUXTRON CORP·Filed 1992·Granted Jun 7, 1994·42 cites·31 claims
- 3879US5308447AEndpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layerLUXTRON CORP·Filed 1992·Granted May 3, 1994·77 cites·34 claims
- 3977US5190614AMethod of endpoint detection and structure thereforLUXTRON CORP·Filed 1990·Granted Mar 2, 1993·41 cites·5 claims
- 4077US5110216AFiberoptic techniques for measuring the magnitude of local microwave fields and powerLUXTRON CORP·Filed 1990·Granted May 5, 1992·40 cites·53 claims
- 4176US5099681AKnock detector using optical fiber thermometerLUXTRON CORP·Filed 1991·Granted Mar 31, 1992·30 cites·10 claims
- 4274US6426232B1Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environmentLUXTRON CORP·Filed 1998·Granted Jul 30, 2002·35 cites·23 claims
- 4372US5897610AElectro optical board assembly for measuring the temperature of an object surface from infra red emissions thereof including an automatic gain control thereforeLUXTRON CORP·Filed 1997·Granted Apr 27, 1999·35 cites·1 claims
- 4472US5112137ATemperature measurement with combined photo-luminescent and black body sensing techniquesLUXTRON CORP·Filed 1991·Granted May 12, 1992·39 cites·32 claims
- 4572US4785824AOptical fiber probe for measuring the temperature of an ultrasonically heated objectLUXTRON CORP·Filed 1987·Granted Nov 22, 1988·31 cites·17 claims
- 4671US6406641B1Liquid etch endpoint detection and process metrologyLUXTRON CORP·Filed 1997·Granted Jun 18, 2002·39 cites·12 claims
- 4771US4558217AMultiplexing and calibration techniques for optical signal measuring instrumentsLUXTRON CORP·Filed 1983·Granted Dec 10, 1985·32 cites·11 claims
- 4870US4459044AOptical system for an instrument to detect the temperature of an optical fiber phosphor probeLUXTRON CORP·Filed 1981·Granted Jul 10, 1984·32 cites·10 claims
- 4969US5891352AOptical techniques of measuring endpoint during the processing of material layers in an optically hostile environmentLUXTRON CORP·Filed 1997·Granted Apr 6, 1999·27 cites·26 claims
- 5067US6934040B1Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafersLUXTRON CORP·Filed 2003·Granted Aug 23, 2005·10 cites·15 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
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