Polishing pad surface on hollow posts

Abstract

A polishing pad comprising: a base from which extends multiple posts having top surfaces that collectively provide a polishing surface on the polishing pad, and each of the top surfaces being recessed with an opening to provide a second cutting edge on the post, and the opening providing a reservoir for polishing fluid.

What is claimed is:  
     
         1 . A polishing pad comprising: a base from which multiple posts extend, the posts having top surfaces that collectively provide a polishing surface on the polishing pad, a leading first cutting edge on each of the posts, and each of the top surfaces being recessed to provide a second cutting edge on each of the posts.  
     
     
         2 . A polishing pad as recited in    claim 1    wherein each of the top surfaces is recessed by an opening providing a reservoir for polishing fluid. A polishing pad comprising: a base from which extends multiple posts having top surfaces that collectively provide a polishing surface on the polishing pad, and each of the top surfaces being recessed to provide a reservoir for polishing fluid.  
     
     
         3 . The polishing pad of    claim 1    wherein the post has an annular cross-sectional shape.  
     
     
         4 . The polishing pad of    claim 1    wherein the top surface is inclined with respect to the base surface.  
     
     
         5 . A polishing pad comprising: a base from which extends multiple posts having top surfaces that collectively provide a polishing surface on the polishing pad, a leading first cutting edge on each of the posts, and each of the top surfaces being recessed to provide a second cutting edge on each of the posts.  
     
     
         6 . A polishing pad as recited in    claim 5    wherein, each of the top surfaces is recessed to provide an opening providing a reservoir for polishing fluid.  
     
     
         7 . A polishing pad comprising: a base from which extends multiple posts having top surfaces that collectively provide a polishing surface on the polishing pad, and each of the top surfaces being recessed to provide a reservoir for polishing fluid.