Inventor · disambiguated record
Michael Hopkins
Also filed as: HOPKINS MICHAEL · HOPKINS MICHAEL B
8 granted patents·2 pending applications·372 citations·filing 1997–2021
90Inventor score
Top patents by PatentIndex Score
10 records- 0191US7015703B2Radio frequency Langmuir probeSCIENT SYSTEMS RES LTD·Filed 2004·Granted Mar 21, 2006·123 cites·6 claims
- 0289US7062411B2Method for process control of semiconductor manufacturing equipmentSCIENT SYSTEMS RES LTD·Filed 2004·Granted Jun 13, 2006·71 cites·10 claims
- 0383US6677246B2Endpoint detection in the etching of dielectric layersSCIENT SYSTEMS RES LTD·Filed 2001·Granted Jan 13, 2004·41 cites·9 claims
- 0481US5808415AApparatus for sensing RF current delivered to a plasma with two inductive loopsSCIENT SYSTEMS RESEARCH LIMITE·Filed 1997·Granted Sep 15, 1998·48 cites·10 claims
- 0580US6061006AApparatus for sensing RF current delivered to a plasma with two inductive loopsSCIENT SYSTEMS RESEARCH LIMITE·Filed 1998·Granted May 9, 2000·43 cites·4 claims
- 0677US6826489B2Fault classification in a plasma process chamberSCIENT SYSTEMS RES LTD·Filed 2002·Granted Nov 30, 2004·15 cites·7 claims
- 0772US6501285B1RF current sensorSCIENT SYSTEMS RES LTD·Filed 2000·Granted Dec 31, 2002·19 cites·7 claims
- 0858US6469488B1Method of processing a high frequency signal containing multiple fundamental frequenciesSCIENT SYSTEMS RES LTD·Filed 2000·Granted Oct 22, 2002·12 cites·5 claims
- 0945US2022196558A1Apparatus and method for sensing rf signals from rf plasma processing equipmentIMPEDANS LTD·Filed 2021·Application pending·0 cites
- 1036US2015276833A1Analysing rf signals from a plasma systemIMPEDANS LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →