Assignee
SCIENT SYSTEMS RES LTD
IE·10 granted patents·1 pending application·431 citations·filing 2000–2005
Top patents by PatentIndex Score
11 records- 0192US6656848B1Plasma chamber conditioningSCIENT SYSTEMS RES LTD·Filed 2002·Granted Dec 2, 2003·140 cites·2 claims
- 0291US7015703B2Radio frequency Langmuir probeSCIENT SYSTEMS RES LTD·Filed 2004·Granted Mar 21, 2006·123 cites·6 claims
- 0389US7062411B2Method for process control of semiconductor manufacturing equipmentSCIENT SYSTEMS RES LTD·Filed 2004·Granted Jun 13, 2006·71 cites·10 claims
- 0483US6677246B2Endpoint detection in the etching of dielectric layersSCIENT SYSTEMS RES LTD·Filed 2001·Granted Jan 13, 2004·41 cites·9 claims
- 0577US6826489B2Fault classification in a plasma process chamberSCIENT SYSTEMS RES LTD·Filed 2002·Granted Nov 30, 2004·15 cites·7 claims
- 0674US7113842B2Method for transferring process control models between plasma processing chambersSCIENT SYSTEMS RES LTD·Filed 2005·Granted Sep 26, 2006·4 cites·12 claims
- 0772US6501285B1RF current sensorSCIENT SYSTEMS RES LTD·Filed 2000·Granted Dec 31, 2002·19 cites·7 claims
- 0858US6781383B2Method for fault detection in a plasma processSCIENT SYSTEMS RES LTD·Filed 2002·Granted Aug 24, 2004·4 cites·6 claims
- 0958US6469488B1Method of processing a high frequency signal containing multiple fundamental frequenciesSCIENT SYSTEMS RES LTD·Filed 2000·Granted Oct 22, 2002·12 cites·5 claims
- 1052US6855209B2Plasma chamber cleaningSCIENT SYSTEMS RES LTD·Filed 2002·Granted Feb 15, 2005·2 cites·8 claims
- 1140US2005212450A1Method and system for detecting electrical arcing in a plasma process powered by an AC sourceSCIENT SYSTEMS RES LTD·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when SCIENT SYSTEMS RES LTD files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →