Inventor · disambiguated record
Norbert Rosenkranz
Also filed as: ROSENKRANZ NORBERT
5 granted patents·1 pending application·19 citations·filing 2003–2010
71Inventor score
Files withBRUNNER ROBERT1CARL ZEISS MICROELECTRIC SYSTE1KIENZLE OLIVER1MATEJKA ULRICH1TOTZECK MICHAEL1
Top patents by PatentIndex Score
6 records- 0158US7286284B2Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspectionZEISS CARL SMS GMBH·Filed 2004·Granted Oct 23, 2007·13 cites·34 claims
- 0257USRE44216EMicroscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspectionTOTZECK MICHAEL·Filed 2009·Granted May 14, 2013·0 cites·35 claims
- 0357US6894837B2Imaging system for an extreme ultraviolet (EUV) beam-based microscopeCARL ZEISS MICROELECTRIC SYSTE·Filed 2003·Granted May 17, 2005·6 cites·11 claims
- 0437US8970951B2Mask inspection microscope with variable illumination settingMATEJKA ULRICH·Filed 2010·Granted Mar 3, 2015·0 cites·51 claims
- 0536US2007070502A1Illuminating and imaging system comprising a diffractive beam splitterBRUNNER ROBERT·Filed 2004·Application pending·0 cites
- 0634US8264535B2Method and apparatus for analyzing a group of photolithographic masksKIENZLE OLIVER·Filed 2008·Granted Sep 11, 2012·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →