Assignee
TOTZECK MICHAEL
DE·7 granted patents·18 citations·filing 2008–2011
Top patents by PatentIndex Score
7 records- 0189US8237918B2Optical system of a microlithographic projection exposure apparatusTOTZECK MICHAEL·Filed 2009·Granted Aug 7, 2012·11 cites·27 claims
- 0267US8593618B2Optical system of a microlithographic projection exposure apparatus and microlithographic exposure methodTOTZECK MICHAEL·Filed 2010·Granted Nov 26, 2013·1 cites·18 claims
- 0367US8339574B2Lithographic apparatus and device manufacturing methodTOTZECK MICHAEL·Filed 2008·Granted Dec 25, 2012·2 cites·7 claims
- 0464US8126669B2Optimization and matching of optical systems by use of orientation Zernike polynomialsTOTZECK MICHAEL·Filed 2009·Granted Feb 28, 2012·4 cites·20 claims
- 0557USRE44216EMicroscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspectionTOTZECK MICHAEL·Filed 2009·Granted May 14, 2013·0 cites·35 claims
- 0655US8107054B2Microlithographic projection exposure apparatusTOTZECK MICHAEL·Filed 2008·Granted Jan 31, 2012·0 cites·24 claims
- 0754US8982325B2Microlithographic projection exposure apparatusTOTZECK MICHAEL·Filed 2011·Granted Mar 17, 2015·0 cites·24 claims
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