Inventor · disambiguated record
Craig M. Carpenter
Also filed as: CARPENTER CRAIG M
44 granted patents·19 pending applications·1,471 citations·filing 1996–2016
98Inventor score
Files withMICRON TECHNOLOGY INC47CARPENTER CRAIG M4GLOBAL ADVANCED METALS USA INC2DERDERIAN GARO J1GORE & ASS1
Top patents by PatentIndex Score
63 records- 0198US7387685B2Apparatus and method for depositing materials onto microelectronic workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jun 17, 2008·502 cites·16 claims
- 0296US6845734B2Deposition apparatuses configured for utilizing phased microwave radiationMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 25, 2005·59 cites·19 claims
- 0396US6838114B2Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 4, 2005·77 cites·38 claims
- 0496US6821347B2Apparatus and method for depositing materials onto microelectronic workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Nov 23, 2004·94 cites·54 claims
- 0595US6797337B2Method for delivering precursorsMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 28, 2004·60 cites·29 claims
- 0695US6412437B1Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition processMICRON TECHNOLOGY INC·Filed 2000·Granted Jul 2, 2002·54 cites·28 claims
- 0792US6814813B2Chemical vapor deposition apparatusMICRON TECHNOLOGY INC·Filed 2002·Granted Nov 9, 2004·45 cites·15 claims
- 0892US6677250B2CVD apparatuses and methods of forming a layer over a semiconductor substrateMICRON TECHNOLOGY INC·Filed 2001·Granted Jan 13, 2004·56 cites·19 claims
- 0992US6468925B2Plasma enhanced chemical vapor deposition processMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 22, 2002·44 cites·11 claims
- 1091US8974611B2Methods of producing deformed metal articlesGLOBAL ADVANCED METALS USA INC·Filed 2013·Granted Mar 10, 2015·4 cites·31 claims
- 1190US6613587B1Method of replacing at least a portion of a semiconductor substrate deposition chamber linerMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 2, 2003·33 cites·28 claims
- 1288US7229666B2Chemical vapor deposition methodMICRON TECHNOLOGY INC·Filed 2004·Granted Jun 12, 2007·34 cites·19 claims
- 1387US7422986B2Deposition methods utilizing microwave excitationMICRON TECHNOLOGY INC·Filed 2006·Granted Sep 9, 2008·5 cites·9 claims
- 1487US6858264B2Chemical vapor deposition methodsMICRON TECHNOLOGY INC·Filed 2002·Granted Feb 22, 2005·28 cites·58 claims
- 1587US6271139B1Polishing slurry and method for chemical-mechanical polishingMICRON TECHNOLOGY INC·Filed 1998·Granted Aug 7, 2001·65 cites·11 claims
- 1686US6926775B2Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2003·Granted Aug 9, 2005·25 cites·38 claims
- 1785US7185601B2Chemically sensitive warning apparatus and methodMICRON TECHNOLOGY INC·Filed 2001·Granted Mar 6, 2007·27 cites·32 claims
- 1885US6800172B2Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processorMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 5, 2004·30 cites·68 claims
- 1984US7767365B2Methods for forming and cleaning photolithography reticlesMICRON TECHNOLOGY INC·Filed 2006·Granted Aug 3, 2010·7 cites·51 claims
- 2082US8382920B2Methods of producing deformed metal articlesGLOBAL ADVANCED METALS USA INC·Filed 2007·Granted Feb 26, 2013·4 cites·47 claims
- 2182US7335396B2Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambersMICRON TECHNOLOGY INC·Filed 2003·Granted Feb 26, 2008·39 cites·17 claims
- 2281US7311947B2Laser assisted material depositionMICRON TECHNOLOGY INC·Filed 2003·Granted Dec 25, 2007·19 cites·13 claims
- 2379US6558570B2Polishing slurry and method for chemical-mechanical polishingMICRON TECHNOLOGY INC·Filed 2001·Granted May 6, 2003·13 cites·10 claims
- 2476US7468104B2Chemical vapor deposition apparatus and deposition methodMICRON TECHNOLOGY INC·Filed 2002·Granted Dec 23, 2008·15 cites·5 claims
- 2573US7118783B2Methods and apparatus for vapor processing of micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 10, 2006·10 cites·21 claims
- 2672US7270715B2Chemical vapor deposition apparatusMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 18, 2007·9 cites·39 claims
- 2772US7234412B2Semiconductor substrate deposition processor chamber liner apparatusMICRON TECHNOLOGY INC·Filed 2003·Granted Jun 26, 2007·9 cites·7 claims
- 2872US6969309B2Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assembliesMICRON TECHNOLOGY INC·Filed 2004·Granted Nov 29, 2005·10 cites·20 claims
- 2970US6620253B1Engagement mechanism for semiconductor substrate deposition process kit hardwareMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 16, 2003·20 cites·39 claims
- 3069US6787373B2Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substratesMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 7, 2004·7 cites·17 claims
- 3166US6439967B2Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assembliesMICRON TECHNOLOGY INC·Filed 1998·Granted Aug 27, 2002·27 cites·14 claims
- 3264US7481887B2Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jan 27, 2009·5 cites·21 claims
- 3363US7427425B2Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Sep 23, 2008·4 cites·23 claims
- 3462US7090727B2Heated gas line body feedthrough for vapor and gas delivery systems and methods for employing sameMICRON TECHNOLOGY INC·Filed 2001·Granted Aug 15, 2006·5 cites·12 claims
- 3560US7378127B2Chemical vapor deposition methodsMICRON TECHNOLOGY INC·Filed 2001·Granted May 27, 2008·3 cites·10 claims
- 3660US2007020394A1Methods and apparatus for vapor processing of micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 3760US2006249253A1Manifold assembly for feeding reactive precursors to substrate processing chambersMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 3859US7105208B2Methods and processes utilizing microwave excitationMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 12, 2006·2 cites·43 claims
- 3957US6849133B2CVD apparatuses and methods of forming a layer over a semiconductor substrateMICRON TECHNOLOGY INC·Filed 2003·Granted Feb 1, 2005·4 cites·12 claims
- 4057US2006065635A1Deposition chamber surface enhancement and resulting deposition chambersDERDERIAN GARO J·Filed 2005·Application pending·0 cites
- 4156US2005142291A1Chemical vapor deposition methodsFiled 2005·Application pending·0 cites
- 4254US5902491AMethod of removing surface protrusions from thin filmsMICRON TECHNOLOGY INC·Filed 1996·Granted May 11, 1999·12 cites·64 claims
- 4353US7192487B2Semiconductor substrate processing chamber and accessory attachment interfacial structureMICRON TECHNOLOGY INC·Filed 2003·Granted Mar 20, 2007·3 cites·40 claims
- 4452US2006289969A1Laser assisted material depositionMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 4552US2006288937A1Laser assisted material depositionMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 4650US2004255859A1Method and apparatus for delivering precursorsFiled 2004·Application pending·0 cites
- 4750US2006207506A1Heated gas line body feedthrough for vapor and gas delivery systems and methods of employing sameCARPENTER CRAIG M·Filed 2006·Application pending·0 cites
- 4849US2006027326A1Semiconductor substrate processing chamber and substrate transfer chamber interfacial structureMICRON TECHNOLOGY INC·Filed 2005·Application pending·0 cites
- 4949US2004237895A1Magnetically-actuatable throttle valveMICRON TECHNOLOGY INC·Filed 2004·Application pending·0 cites
- 5047US6620496B2Method of removing surface protrusions from thin filmsMICRON TECHNOLOGY INC·Filed 2001·Granted Sep 16, 2003·0 cites·8 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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