Inventor · disambiguated record
Michael T. Brigham
Also filed as: BRIGHAM MICHAEL · BRIGHAM MICHAEL T · BRIGHAM MICHAEL TODD
13 granted patents·54 citations·filing 2002–2022
87Inventor score
Top patents by PatentIndex Score
13 records- 0189US6812193B2Slurry for mechanical polishing (CMP) of metals and use thereofIBM·Filed 2002·Granted Nov 2, 2004·53 cites·29 claims
- 0272US10589992B2Micro-electro-mechanical system (MEMS) structures and design structuresIBM·Filed 2018·Granted Mar 17, 2020·0 cites·11 claims
- 0372US10549987B2Micro-electro-mechanical system (MEMS) structures and design structuresIBM·Filed 2018·Granted Feb 4, 2020·0 cites·16 claims
- 0471US10589991B2Micro-electro-mechanical system (MEMS) structures and design structuresIBM·Filed 2018·Granted Mar 17, 2020·0 cites·20 claims
- 0566US9981842B2Micro-Electro-Mechanical System (MEMS) structures and design structuresIBM·Filed 2016·Granted May 29, 2018·0 cites·20 claims
- 0666US9938137B2Micro-electro-mechanical system (MEMS) structures and design structuresIBM·Filed 2016·Granted Apr 10, 2018·0 cites·18 claims
- 0764US11167980B2Micro-electro-mechanical system (MEMS) structures and design structuresIBM·Filed 2015·Granted Nov 9, 2021·0 cites·13 claims
- 0864US9969613B2Method for forming micro-electro-mechanical system (MEMS) beam structureIBM·Filed 2013·Granted May 15, 2018·0 cites·19 claims
- 0962US9932222B2Micro-electro-mechanical system (MEMS) structures and design structuresIBM·Filed 2016·Granted Apr 3, 2018·0 cites·18 claims
- 1059US8734665B2Slurry for chemical-mechanical polishing of copper and use thereofBATES GRAHAM M·Filed 2011·Granted May 27, 2014·1 cites·19 claims
- 1156US12381129B2Liner-free through-silicon-vias formed by selective metal depositionGLOBALFOUNDRIES US INC·Filed 2022·Granted Aug 5, 2025·0 cites·20 claims
- 1250US9708508B2Slurry for chemical-mechanical polishing of metals and use thereofGLOBALFOUNDRIES INC·Filed 2015·Granted Jul 18, 2017·0 cites·16 claims
- 1347US9057004B2Slurry for chemical-mechanical polishing of metals and use thereofBATES GRAHAM M·Filed 2011·Granted Jun 16, 2015·0 cites·18 claims
Join the waitlist — get patent alerts
Get an alert when Michael T. Brigham files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →