Inventor · disambiguated record
Keith Kuang-Kuo Koai
Also filed as: KOAI KEITH · KOAI KEITH K · KOAI KEITH KUANG-KUO
33 granted patents·6 pending applications·2,158 citations·filing 1997–2025
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD21APPLIED MATERIALS INC13TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD2TAIWAN SEMICONDUCTOR MFG2MKS INSTR INC1
Top patents by PatentIndex Score
39 records- 0198US6364949B1300 mm CVD chamber design for metal-organic thin film depositionAPPLIED MATERIALS INC·Filed 1999·Granted Apr 2, 2002·424 cites·33 claims
- 0298US6106625AReactor useful for chemical vapor deposition of titanium nitrideAPPLIED MATERIALS INC·Filed 1998·Granted Aug 22, 2000·627 cites·28 claims
- 0398US6050506APattern of apertures in a showerhead for chemical vapor depositionAPPLIED MATERIALS INC·Filed 1998·Granted Apr 18, 2000·708 cites·14 claims
- 0493US6887317B2Reduced friction lift pinAPPLIED MATERIALS INC·Filed 2002·Granted May 3, 2005·68 cites·12 claims
- 0593US6159299AWafer pedestal with a purge ringAPPLIED MATERIALS INC·Filed 1999·Granted Dec 12, 2000·134 cites·23 claims
- 0692US10876208B2Apparatus and method for fabricating a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·7 cites·20 claims
- 0791US7871470B2Substrate support lift mechanismAPPLIED MATERIALS INC·Filed 2006·Granted Jan 18, 2011·20 cites·6 claims
- 0885US6410089B1Chemical vapor deposition of copper using profiled distribution of showerhead aperturesAPPLIED MATERIALS INC·Filed 2000·Granted Jun 25, 2002·23 cites·21 claims
- 0985US6176930B1Apparatus and method for controlling a flow of process material to a deposition chamberAPPLIED MATERIALS INC·Filed 1999·Granted Jan 23, 2001·62 cites·18 claims
- 1085US2025053076A1Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1184US11859284B2Shower head structure and plasma processing apparatus using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 2, 2024·2 cites·20 claims
- 1283US12164221B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 1383US2025360544A1Apparatus for cleaning semiconductor equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1480US9318364B2Semiconductor device metallization systems and methodsTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Apr 19, 2016·3 cites·20 claims
- 1579US10626499B2Deposition device structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 21, 2020·1 cites·20 claims
- 1678US10784087B2Aluminum apparatus with aluminum oxide layer and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 22, 2020·0 cites·20 claims
- 1778US2025122623A1Shower head structure and plasma processing apparatus using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1877US12215422B2Shower head structure and plasma processing apparatus using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 4, 2025·0 cites·20 claims
- 1976US6063441AProcessing chamber and method for confining plasmaAPPLIED MATERIALS INC·Filed 1997·Granted May 16, 2000·42 cites·7 claims
- 2075US11454877B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 27, 2022·1 cites·20 claims
- 2174US11443923B2Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 13, 2022·1 cites·20 claims
- 2273US11762280B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2022·Granted Sep 19, 2023·0 cites·20 claims
- 2372USD568914SSubstrate support lift pinAPPLIED MATERIALS INC·Filed 2006·Granted May 13, 2008·19 cites·1 claims
- 2470US12472538B2Apparatus for cleaning semiconductor equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 18, 2025·0 cites·20 claims
- 2570US12463019B2Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 2670US11699574B2Aluminum apparatus with aluminum oxide layer and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 11, 2023·0 cites·20 claims
- 2770US10269573B2Device and method for manufacturing a semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Apr 23, 2019·2 cites·20 claims
- 2867US10262839B2Aluminum apparatus with aluminum oxide layer and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 16, 2019·0 cites·20 claims
- 2960US11517995B2Wet chemical heating system and a method of chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 6, 2022·0 cites·20 claims
- 3060US9281221B2Ultra-high vacuum (UHV) wafer processingTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Mar 8, 2016·1 cites·20 claims
- 3159US11214868B2Chemical vapor deposition apparatus and blocker plateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 4, 2022·0 cites·20 claims
- 3258US11318506B2Apparatus for cleaning semiconductor equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 3, 2022·0 cites·20 claims
- 3357US9548241B2Semiconductor device metallization systems and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 17, 2017·0 cites·20 claims
- 3455US2023369033A1Methods and Systems for Feedback Control in Plasma Processing Using Radical SensingMKS INSTR INC·Filed 2022·Application pending·0 cites
- 3553US6365495B2Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperatureAPPLIED MATERIALS INC·Filed 1999·Granted Apr 2, 2002·13 cites·23 claims
- 3647US2005194100A1Reduced friction lift pinAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 3745US10868241B2Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 3839US11067515B2Apparatus and method for inspecting a wafer process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 20, 2021·0 cites·15 claims
- 3939US2004177813A1Substrate support lift mechanismAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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