Substrate support lift mechanism

Abstract

An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a gimbal mechanism having radially aligned clamping that substantially prevents movement from a pre-defined plane of a substrate support coupled to the gimbal mechanism during clamping. In another embodiment, an apparatus for positioning a substrate support includes substrate support disposed in a processing chamber. A stem, coupled to the substrate support, extends through the processing chamber and is coupled to a gimbal assembly. The gimbal assembly has a radial clamping mechanism is adapted to adjust a planar orientation of the substrate support about a plurality of axes without exerting rotational moments on the substrate support during clamping. A bearing assembly, having a first carriage block and a second carriage block, is coupled to the gimbal assembly. An actuator is coupled to at least one of the carriage blocks and is adapted to control the elevation of the substrate support within the processing chamber.

What is claimed is:  
     
         1 . An apparatus for positioning a substrate support, comprising: 
 a yoke having at least a first slot formed therethrough;    a gimbal base having a first surface adapted to support the substrate support and an opposing second surface; and    a first threaded member disposed through the first slot and axially urging the yoke and gimbal base against each other.    
     
     
         2 . The apparatus of  claim 1 , wherein the yoke and gimbal base further comprise mating accurate surfaces.  
     
     
         3 . The apparatus of  claim 2 , wherein the first threaded member is radially aligned with the mating curved surfaces.  
     
     
         4 . The apparatus of  claim 3 , wherein the mating curved surface of the gimbal base further comprises a stepped recess.  
     
     
         5 . The apparatus of  claim 1 , wherein the yoke further comprise: 
 a post; and    a connecting member coupled to the post;    a first flange coupled to a first end of the connecting member, the first slot defined between a first side supporting the gimbal base and an opposing second side of the first flange;    a second flange coupled to a first end of the connecting member;    a second slot defined between a first side of the second flange that supports the gimbal base and an opposing second side; and    a second threaded member disposed through second slot and axially urging the yoke and gimbal base against each other.    
     
     
         6 . The apparatus of  claim 5 , wherein the first side of the first flange is curved.  
     
     
         7 . The apparatus of  claim 5 , wherein the first side of the first flange has a radius of curvature between about 305 to about 304 mm.  
     
     
         8 . The apparatus of  claim 7 , wherein the second side of the first flange is curved concentrically to the first side.  
     
     
         9 . The apparatus of  claim 1  further comprising: 
 a clamp block having a clamping aperture receiving a post extending from the yoke.  
 
     
     
         10 . The apparatus of  claim 9 , wherein the clamp block further comprises: 
 a slot formed at least partially through the clamp block and communicating with the clamping aperture; and    a plunger disposed in the slot and movable in a direction radially aligned with a center of the clamping aperture.    
     
     
         11 . The apparatus of  claim 10 , wherein the plunger includes a contact surface that, when urged against the post, does not exert a rotational moment force upon the post.  
     
     
         12 . The apparatus of  claim 10 , wherein the clamp block further comprises: 
 a web disposed over the slot opposite the clamping aperture; and    member disposed through the web and radially aligned with the center of the clamping aperture, the member adapted to urge the plunger against the post.    
     
     
         14 . The apparatus of  claim 1  further comprising: 
 a bearing assembly having a first carriage block and a second carriage block, and coupled to the clamp block; and  
 an actuator coupled to at least one of the carriage blocks and adapted to control the linear position of the carriage blocks along the bearing assembly.  
 
     
     
         15 . An apparatus for positioning a substrate support, comprising: 
 a gimbal assembly comprising: 
 a clamp block;  
 a yoke coupled to the clamp block, the yoke positional along and rotational about a first axis relative to the clamp block; and  
 a gimbal base coupled to the yoke and adapted to support the substrate support, the gimbal base movable about a second axis orthogonal to the first axis; and  
   a bearing assembly having a first carriage block and a second carriage block, the bearing assembly coupled to the clamp block; and    an actuator coupled to at least one of the carriage blocks and adapted to control the linear position of the carriage blocks along the bearing assembly.    
     
     
         16 . The apparatus of  claim 15 , wherein the clamp block further comprises: 
 a clamping aperture form therein for receiving a post extending from the yoke.    
     
     
         17 . The apparatus of  claim 16 , wherein the clamp block further comprises: 
 a slot formed at least partially through the clamp block and communicating with the clamping aperture; and    a plunger disposed in the slot and movable in a direction radially aligned with a center of the clamping aperture.    
     
     
         18 . The apparatus of  claim 17 , wherein the plunger includes a contact surface that, when urged against the post, does not exert a rotational moment force upon the post.  
     
     
         19 . The apparatus of  claim 17 , wherein the clamp block further comprises: 
 a web disposed over the slot opposite the clamping aperture; and    member disposed through the web and radially aligned with the center of the clamping aperture, the member adapted to urge the plunger against the post.    
     
     
         20 . The apparatus of  claim 17 , wherein the yoke further comprises: 
 at least one flange;    a slot formed through the flange;    a gimbal base having a first surface adapted to support the substrate support and an opposing second surface disposed against the flange; and    a member disposed through first slot and urging the yoke and gimbal base against each other along axis of the member.    
     
     
         21 . The apparatus of  claim 1 , wherein the second surface of the yoke and gimbal base contact along a curved surface.  
     
     
         22 . The apparatus of  claim 21 , wherein the member is radially aligned relative to the curved surface.  
     
     
         23 . The apparatus of  claim 22 , wherein the second surface of the gimbal base has a stepped recess formed therein.  
     
     
         24 . The apparatus of  claim 15 , wherein the yoke further comprise: 
 a post; and    a connecting member coupled to the post;    a first flange coupled to a first end of the connecting member, the first slot defined between a first side supporting the gimbal base and an opposing second side of the first flange;    a second flange coupled to a first end of the connecting member;    a second slot defined between a first side of the second flange that supports the gimbal base and an opposing second side; and    a second threaded member disposed through second slot and axially urging the yoke and gimbal base against each other.    
     
     
         25 . The apparatus of  claim 24 , wherein the first side and the second side of the first flange are curved concentrically.  
     
     
         26 . The apparatus of  claim 25  further comprising: 
 a spacer disposed on the stud and having a first curved surface; and  
 a nut threaded on the stud and adapted to urge the first curved surface of the spacer disposed against the second side of the first flange.  
 
     
     
         27 . An apparatus for positioning a substrate support, comprising: 
 a processing chamber;    a substrate support disposed in the chamber body;    a stem coupled to the substrate support and extending through a first hole formed in the chamber body;    a gimbal assembly coupled to the stem and adapted to adjust a planar orientation of the substrate support, the gimbal assembly comprising:    a) a yoke having at least first slot formed therethrough;    b) a gimbal base having a first surface adapted to support the substrate support and an opposing second surface; and    c) a first threaded member disposed through first slot and axially urging the yoke and gimbal base against each other;    a bearing assembly having a first carriage block and a second carriage block, the bearing assembly coupled to the gimbal assembly; and    an actuator coupled to at least one of the carriage blocks and adapted to control the elevation of the substrate support within the processing chamber.    
     
     
         28 . The apparatus of  claim 27 , wherein the yoke and gimbal base contact along a curved surface.  
     
     
         29 . The apparatus of  claim 28 , wherein the first threaded member is radially aligned with the curved surface.  
     
     
         30 . The apparatus of  claim 28 , wherein the second surface of the gimbal base has a stepped recess formed therein.  
     
     
         31 . The apparatus of  claim 27 , wherein the yoke further comprise: 
 a post; and    a connecting member coupled to the post;    a first flange coupled to a first end of the connecting member, the first slot defined between a first side supporting the gimbal base and an opposing second side of the first flange;    a second flange coupled to a first end of the connecting member;    a second slot defined between a first side of the second flange that supports the gimbal base and an opposing second side; and    a second threaded member disposed through second slot and axially urging the yoke and gimbal base against each other.    
     
     
         32 . The apparatus of  claim 31 , wherein the first side and the second side of the first flange are curved concentrically.  
     
     
         33 . The apparatus of  claim 32  further comprising: 
 a spacer disposed on the first threaded member and having a first curved surface; and  
 a nut threaded on the first threaded member and adapted to urge the first curved surface of the spacer disposed against the second side of the first flange.  
 
     
     
         34 . The apparatus of  claim 27 , wherein the gimbal assembly further comprises: 
 a clamp block coupled to the yoke, the yoke positional along and rotational about an axis relative to the clamp block.    
     
     
         35 . An apparatus for positioning a substrate support, comprising: 
 a processing chamber;    a substrate support disposed in the chamber body;    a plurality of lift pin disposed through the substrate support and having an end extending below the substrate support;    a stem coupled to the substrate support and extending through a first hole formed in the processing chamber;    a gimbal assembly coupled to the stem and adapted to adjust a planar orientation of the substrate support;    a bearing assembly having a first carriage block and a second carriage block, the bearing assembly coupled to the gimbal assembly;    an actuator coupled to at least one of the carriage blocks and adapted to control the elevation of the substrate support within the processing chamber;    an annular plate circumscribing the stem;    a rod coupled to the lift plate and extending through a second hole formed in the processing chamber;    a lift pin actuator assembly adapted to urge the plate against and displace the lift pins; and    a spar coupling the rod to the lift pin actuator assembly, the spar comprising: 
 a mounting surface coupled to the rod;  
 a lower surface disposed opposite the mounting surface; and  
 a first lateral side and a second lateral side extending between the mounting surface and the lower surface, the second lateral side coupled to the lift pin actuator assembly, the lateral sides having a length greater than mounting surface.  
   
     
     
         36 . The apparatus of  claim 35 , wherein the lower surface of the spar extends from the second lateral side to a position beyond the center line of the rod.  
     
     
         37 . The apparatus of  claim 35 , wherein the rod further comprises wedges interleaved with mating wedges of the plate.  
     
     
         38 . The apparatus of  claim 35 , wherein the gimbal assembly further comprises: 
 a clamp block;    a yoke coupled to the clamp block, the yoke positional along and rotational about a first axis relative to the clamp block; and    a gimbal base coupled to the yoke and adapted to support the substrate support, the gimbal base movable about a second axis orthogonal to the first axis; and    a first threaded member disposed through a slot formed in the yoke and axially urging the yoke and gimbal base against each other.    
     
     
         39 . The apparatus of  claim 38 , wherein the yoke and gimbal base contact along a curved surface.  
     
     
         40 . The apparatus of  claim 39 , wherein the first threaded member is radially aligned with the curved surface.  
     
     
         41 . The apparatus of  claim 39 , wherein the gimbal base further comprises a stepped recess formed in a surface contacting the yoke.  
     
     
         42 . The apparatus of  claim 38 , wherein the yoke further comprise: 
 a post;    a connecting member coupled to the post;    a first flange coupled to a first end of the connecting member, the first slot defined between a first side supporting the gimbal base and an opposing second side of the first flange;    a second flange coupled to a first end of the connecting member;    a second slot defined between a first side of the second flange that supports the gimbal base and an opposing second side; and    a second threaded member disposed through second slot and axially urging the yoke and gimbal base against each other.    
     
     
         43 . The apparatus of  claim 42 , wherein the first side of the first flange is curved.  
     
     
         44 . The apparatus of  claim 39 , wherein the first curved surface has a radius of curvature between about 305 to about 304 mm.  
     
     
         45 . The apparatus of  claim 44 , wherein the second side of the first flange is curved concentrically to the first side.  
     
     
         46 . The apparatus of  claim 38 , wherein the clamp block further comprises: 
 a clamping aperture formed therein for receiving a post extending from the yoke.    
     
     
         47 . The apparatus of  claim 46 , wherein the clamp block further comprises: 
 a slot formed at least partially through the clamp block and communicating with the clamping aperture; and    a plunger disposed in the slot and movable in a direction radially aligned with a center of the clamping aperture, wherein the plunger includes a contact surface that, when urged against the post, does not a moment force upon the post.    
     
     
         48 . The apparatus of  claim 47 , wherein the clamp block further comprises: 
 a web disposed over the slot opposite the clamping aperture; and    member disposed through the web and radially aligned with the center of the clamping aperture, the member adapted to urge the plunger against the post.    
     
     
         49 . An apparatus for positioning a substrate support, comprising: 
 a processing chamber;    a substrate support disposed in the chamber body;    a stem coupled to the substrate support and extending through a first hole formed in the chamber body;    a gimbal assembly coupled to the stem and adapted to adjust a planar orientation of the substrate support about 5 axes;    a bearing assembly having a first carriage block and a second carriage block, the bearing assembly coupled to the gimbal assembly; and    an actuator coupled to at least one of the carriage blocks and adapted to control the elevation of the substrate support within the processing chamber.    
     
     
         50 . The apparatus of  claim 49 , wherein the gimbal assembly further comprises: 
 a yoke having at least first slot formed therethrough;    a gimbal base having a first surface adapted to support the substrate support and an opposing second surface; and    a first threaded member disposed through first slot and axially urging the yoke and gimbal base against each other.    
     
     
         51 . The apparatus of  claim 50 , wherein the yoke and gimbal base contact along a curved surface.  
     
     
         52 . The apparatus of  claim 51 , wherein the first threaded member is radially aligned with the curved surface.  
     
     
         53 . The apparatus of  claim 51 , wherein the second surface of the gimbal base has a stepped recess formed therein.  
     
     
         54 . The apparatus of  claim 49 , wherein the yoke further comprise: 
 a post; and    a connecting member coupled to the post;    a first flange coupled to a first end of the connecting member, the first slot defined between a first side supporting the gimbal base and an opposing second side of the first flange;    a second flange coupled to a first end of the connecting member;    a second slot defined between a first side of the second flange that supports the gimbal base and an opposing second side; and    a second threaded member disposed through second slot and axially urging the yoke and gimbal base against each other.    
     
     
         55 . The apparatus of  claim 54 , wherein the first side and the second side of the first flange are curved concentrically.  
     
     
         56 . The apparatus of  claim 55  further comprising: 
 a spacer disposed on the first threaded member and having a first curved surface; and  
 a nut threaded on the first threaded member and adapted to urge the first curved surface of the spacer disposed against the second side of the first flange.  
 
     
     
         57 . The apparatus of  claim 49 , wherein the gimbal assembly further comprises: 
 a clamp block;    a yoke coupled to the clamp block, the yoke positional along and rotational about a first axis relative to the clamp block; and    a gimbal base coupled to the yoke and adapted to support the substrate support, the gimbal base movable about a second axis orthogonal to the first axis.    
     
     
         58 . The apparatus of  claim 57 , wherein the gimbal base further comprises: 
 a plurality of holes formed therein having a counter bore that substantially aligns with a passage formed through the yoke.    
     
     
         59 . Apparatus for positioning a substrate support, comprising: 
 a gimbal assembly providing freedom of movement about perpendicular axes, the gimbal assembly including two clamps, each adjustable to prevent movement about one axis by a clamping forced applied through that axis.    
     
     
         60 . The apparatus of  claim 59 , wherein the gimbal assembly further comprises: 
 a clamp block;    a yoke coupled to the clamp block, the yoke being positioned along and rotational about one of the axes relative to the clamp block;    a gimbal base connected to support the substrate support and movably mounted in the yoke for rotation about the other of the axes relative to the yoke.    
     
     
         61 . The apparatus of  claim 60 , wherein movement about each axis is prevented by the force of clamp held by a fastener applied through the axis.  
     
     
         62 . The apparatus of  claim 50 , wherein the gimbal base further comprises: 
 a plurality of holes formed therein having a counter bore that substantially aligns with a passage formed through the yoke.