Inventor · disambiguated record
Heath A. Pois
Also filed as: POIS HEATH · POIS HEATH A
23 granted patents·8 pending applications·503 citations·filing 2005–2025
95Inventor score
Top patents by PatentIndex Score
31 records- 0198US7933026B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2009·Granted Apr 26, 2011·178 cites·7 claims
- 0298US7478019B2Multiple tool and structure analysisKLA TENCOR CORP·Filed 2005·Granted Jan 13, 2009·225 cites·30 claims
- 0397US9588066B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)POIS HEATH A·Filed 2014·Granted Mar 7, 2017·44 cites·10 claims
- 0495US10119925B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2017·Granted Nov 6, 2018·7 cites·25 claims
- 0592US10481112B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2018·Granted Nov 19, 2019·4 cites·20 claims
- 0692US7567351B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2007·Granted Jul 28, 2009·22 cites·22 claims
- 0791US11029148B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesNOVA MEASURING INSTR INC·Filed 2020·Granted Jun 8, 2021·2 cites·20 claims
- 0891US10859519B2Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2019·Granted Dec 8, 2020·3 cites·25 claims
- 0991US10533961B2Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2016·Granted Jan 14, 2020·5 cites·18 claims
- 1089US10648802B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesNOVA MEASURING INSTR INC·Filed 2019·Granted May 12, 2020·2 cites·20 claims
- 1188US12360063B2System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2024·Granted Jul 15, 2025·0 cites·20 claims
- 1288US9952166B2Silicon germanium thickness and composition determination using combined XPS and XRF technologiesPOIS HEATH A·Filed 2017·Granted Apr 24, 2018·3 cites·20 claims
- 1388US2025052704A1Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2024·Application pending·0 cites
- 1487US9594035B2Silicon germanium thickness and composition determination using combined XPS and XRF technologiesPOIS HEATH A·Filed 2015·Granted Mar 14, 2017·3 cites·10 claims
- 1585US12066391B2Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2023·Granted Aug 20, 2024·0 cites·20 claims
- 1681US10082390B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesREVERA INCORPORATED·Filed 2015·Granted Sep 25, 2018·2 cites·20 claims
- 1781US2024085174A1Feed-forward of multi-layer and multi-process information using xps and xrf technologiesNOVA MEASURING INSTR INC·Filed 2023·Application pending·0 cites
- 1877US12281893B2Characterizing and measuring in small boxes using XPS with multiple measurementsNOVA MEASURING INSTR INC·Filed 2024·Granted Apr 22, 2025·0 cites·20 claims
- 1977US11906451B2Method and system for non-destructive metrology of thin layersNOVA LTD·Filed 2021·Granted Feb 20, 2024·0 cites·20 claims
- 2076US8049903B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2011·Granted Nov 1, 2011·3 cites·16 claims
- 2173US11733035B2Feed-forward of multi-layer and multi-process information using XPS and XRF technologiesNOVA MEASURING INSTR INC·Filed 2021·Granted Aug 22, 2023·0 cites·7 claims
- 2272US11874237B2System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2020·Granted Jan 16, 2024·0 cites·19 claims
- 2372US11668663B2Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR INC·Filed 2020·Granted Jun 6, 2023·0 cites·10 claims
- 2471US11988502B2Characterizing and measuring in small boxes using XPS with multiple measurementsNOVA MEASURING INSTR INC·Filed 2022·Granted May 21, 2024·0 cites·17 claims
- 2571US2025314487A1Characterizing and measuring in small boxes using xps with multiple measurementsNOVA MEASURING INSTR INC·Filed 2025·Application pending·0 cites
- 2669US2019033069A1Feed-forward of multi-layer and multi-process information using xps and xrf technologiesNOVA MEASURING INSTR INC·Filed 2018·Application pending·0 cites
- 2767US2024167814A1Method and system for monitoring deposition processNOVA MEASURING INSTR INC·Filed 2023·Application pending·0 cites
- 2861US2018172609A1Method and system for non-destructive metrology of thin layersNOVA MEASURING INSTR LTD·Filed 2017·Application pending·0 cites
- 2959US2025067691A1Production solutions for high-throughput/precision xps metrology using unsupervised machine learningNOVA MEASURING INSTR INC·Filed 2022·Application pending·0 cites
- 3053US11852467B2Method and system for monitoring deposition processNOVA MEASURING INSTR INC·Filed 2020·Granted Dec 26, 2023·0 cites·18 claims
- 3147US2024068964A1Evaluating x-ray signals from a perturbed objectNOVA LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →