Inventor · disambiguated record
Arun Ramaswamy Srivatsa
Also filed as: SRIVATSA ARUN · SRIVATSA ARUN RAMASWAMY
3 granted patents·4 pending applications·23 citations·filing 2001–2025
60Inventor score
Top patents by PatentIndex Score
7 records- 0176US6759255B2Method and system for detecting metal contamination on a semiconductor waferKLA TENCOR TECH CORP·Filed 2001·Granted Jul 6, 2004·23 cites·49 claims
- 0266US12429418B2Phase-resolved optical metrology for substratesAPPLIED MATERIALS INC·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
- 0361US12452988B2Multiple plasma ion source for inline secondary ion mass spectrometryAPPLIED MATERIALS INC·Filed 2022·Granted Oct 21, 2025·0 cites·20 claims
- 0455US2025284274A1Real time in-situ metrology and process performance improvementAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0555US2025316504A1Cleaning device for semiconductor and flat panel display processing toolsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0653US2025357098A1Automated calibration of secondary ion mass spectrometry systemsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0745US2025117915A1Optical inspection-based automatic defect classificationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →