Inventor · disambiguated record
Shinichi Tachi
Also filed as: TACHI SHINICHI
46 granted patents·6 pending applications·3,512 citations·filing 1982–2006
99Inventor score
Top patents by PatentIndex Score
52 records- 0199US6197151B1Plasma processing apparatus and plasma processing methodHITACHI LTD·Filed 2000·Granted Mar 6, 2001·223 cites·5 claims
- 0299US4985114ADry etching by alternately etching and depositingHITACHI LTD·Filed 1989·Granted Jan 15, 1991·601 cites·8 claims
- 0399US4857137AProcess for surface treatmentHITACHI LTD·Filed 1987·Granted Aug 15, 1989·520 cites·17 claims
- 0498US5242539APlasma treatment method and apparatusHITACHI LTD·Filed 1992·Granted Sep 7, 1993·602 cites·76 claims
- 0597US4992136ADry etching methodHITACHI LTD·Filed 1988·Granted Feb 12, 1991·259 cites·9 claims
- 0695US6129806APlasma processing apparatus and plasma processing methodHITACHI LTD·Filed 1997·Granted Oct 10, 2000·92 cites·12 claims
- 0793US5499207ASemiconductor memory device having improved isolation between electrodes, and process for fabricating the sameHITACHI LTD·Filed 1994·Granted Mar 12, 1996·86 cites·32 claims
- 0892US5368685ADry etching apparatus and methodHITACHI LTD·Filed 1993·Granted Nov 29, 1994·148 cites·21 claims
- 0991US5891252APlasma processing apparatusHITACHI LTD·Filed 1996·Granted Apr 6, 1999·60 cites·30 claims
- 1091US4529476AGas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gasSHOWA DENKO KK·Filed 1984·Granted Jul 16, 1985·89 cites·13 claims
- 1189US6551445B1Plasma processing system and method for manufacturing a semiconductor device by using the sameHITACHI LTD·Filed 2000·Granted Apr 22, 2003·50 cites·32 claims
- 1288US6902683B1Plasma processing apparatus and plasma processing methodHITACHI LTD·Filed 2000·Granted Jun 7, 2005·29 cites·2 claims
- 1387US6842658B2Method of manufacturing a semiconductor device and manufacturing systemHITACHI LTD·Filed 2001·Granted Jan 11, 2005·40 cites·6 claims
- 1486US6033481APlasma processing apparatusHITACHI LTD·Filed 1999·Granted Mar 7, 2000·41 cites·23 claims
- 1584US6927173B2Plasma processing methodRENESAS TECH CORP·Filed 2002·Granted Aug 9, 2005·23 cites·25 claims
- 1684US6136214APlasma processing method and apparatusHITACHI LTD·Filed 1997·Granted Oct 24, 2000·54 cites·30 claims
- 1780US6475918B1Plasma treatment apparatus and plasma treatment methodHITACHI LTD·Filed 2000·Granted Nov 5, 2002·24 cites·21 claims
- 1875US6562722B2Method and apparatus for dry etchingHITACHI LTD·Filed 2001·Granted May 13, 2003·11 cites·9 claims
- 1975US5354416ADry etching methodOKUDAIRA SADAYUKI·Filed 1990·Granted Oct 11, 1994·67 cites·26 claims
- 2075US4911812APlasma treating method and apparatus thereforHITACHI LTD·Filed 1988·Granted Mar 27, 1990·47 cites·16 claims
- 2174US5474650AMethod and apparatus for dry etchingHITACHI LTD·Filed 1994·Granted Dec 12, 1995·39 cites·14 claims
- 2274US4956043ADry etching apparatusHITACHI LTD·Filed 1988·Granted Sep 11, 1990·46 cites·22 claims
- 2374US4943344AEtching methodHITACHI LTD·Filed 1989·Granted Jul 24, 1990·41 cites·7 claims
- 2472US4986877AMethod of dry etchingHITACHI LTD·Filed 1988·Granted Jan 22, 1991·37 cites·16 claims
- 2571US6629538B2Method for cleaning semiconductor wafers in a vacuum environmentHITACHI LTD·Filed 2001·Granted Oct 7, 2003·14 cites·18 claims
- 2669US6713401B2Method for manufacturing semiconductor deviceHITACHI LTD·Filed 2001·Granted Mar 30, 2004·12 cites·14 claims
- 2767US6511608B1Plasma processing methodHITACHI LTD·Filed 2000·Granted Jan 28, 2003·8 cites·21 claims
- 2867US6136721AMethod and apparatus for dry etchingHITACHI LTD·Filed 2000·Granted Oct 24, 2000·7 cites·18 claims
- 2966US6643893B2Apparatus for cleaning semiconductor wafers in a vacuum environmentHITACHI LTD·Filed 2001·Granted Nov 11, 2003·10 cites·25 claims
- 3065US6333273B1Method and apparatus for dry etchingHITACHI LTD·Filed 2000·Granted Dec 25, 2001·6 cites·18 claims
- 3160US5736449ASemiconductor memory device having improved isolation between electrodes, and process for fabricating the sameHITACHI LTD·Filed 1996·Granted Apr 7, 1998·17 cites·8 claims
- 3260US5147500ADry etching methodHITACHI LTD·Filed 1990·Granted Sep 15, 1992·32 cites·16 claims
- 3360US4406733ADry etching methodHITACHI LTD·Filed 1982·Granted Sep 27, 1983·20 cites·5 claims
- 3457US5343353ASemiconductor device and process of producing the sameHITACHI LTD·Filed 1992·Granted Aug 30, 1994·27 cites·51 claims
- 3556US6573190B1Dry etching device and dry etching methodHITACHI LTD·Filed 1999·Granted Jun 3, 2003·19 cites·12 claims
- 3656US5643473ADry etching methodHITACHI LTD·Filed 1995·Granted Jul 1, 1997·21 cites·11 claims
- 3755US6506687B1Dry etching device and method of producing semiconductor devicesHITACHI LTD·Filed 1998·Granted Jan 14, 2003·18 cites·44 claims
- 3853US5318667AMethod and apparatus for dry etchingHITACHI LTD·Filed 1993·Granted Jun 7, 1994·18 cites·4 claims
- 3953US2006144518A1Plasma processing apparatus and plasma processing methodKAJI TETSUNORI·Filed 2006·Application pending·0 cites
- 4052US6579154B2Dry chemical-mechanical polishing methodHITACHI LTD·Filed 2001·Granted Jun 17, 2003·3 cites·9 claims
- 4146US5705029ADry etching methodHITACHI LTD·Filed 1995·Granted Jan 6, 1998·13 cites·8 claims
- 4246US2005082006A1Plasma processing apparatusFiled 2004·Application pending·0 cites
- 4345US2004178180A1Plasma processing apparatusFiled 2004·Application pending·0 cites
- 4444US7071114B2Method and apparatus for dry etchingHITACHI LTD·Filed 2003·Granted Jul 4, 2006·0 cites·4 claims
- 4543US6008133AMethod and apparatus for dry etchingHITACHI LTD·Filed 1998·Granted Dec 28, 1999·6 cites·8 claims
- 4643US5409562ADry-etching method and apparatusHITACHI LTD·Filed 1992·Granted Apr 25, 1995·13 cites·30 claims
- 4742US2002069971A1Plasma processing apparatus and plasma processing methodFiled 2002·Application pending·0 cites
- 4841US5650038AMethod for dry etchingHITACHI LTD·Filed 1995·Granted Jul 22, 1997·6 cites·4 claims
- 4939US5795832AMethod and apparatus for dry etchingHITACHI LTD·Filed 1997·Granted Aug 18, 1998·5 cites·5 claims
- 5039US5354418AMethod for dry etchingHITACHI LTD·Filed 1994·Granted Oct 11, 1994·8 cites·12 claims
Showing the top 50 of 52 patent records by PatentIndex Score.
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