Inventor · disambiguated record
Keith Edward Buchanan
Also filed as: BUCHANAN KEITH E · BUCHANAN KEITH EDWARD
6 granted patents·1 pending application·48 citations·filing 1997–2016
81Inventor score
Files withTRIKON HOLDINGS LTD2AVIZA EUROP LTD1BUCHANAN KEITH E1SPTS TECHNOLOGIES LTD1TRIKON EQUIP LTD1
Top patents by PatentIndex Score
7 records- 0167US6660140B2Sputtering apparatusTRIKON HOLDINGS LTD·Filed 2000·Granted Dec 9, 2003·8 cites·2 claims
- 0261US6933246B2Dielectric filmTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Aug 23, 2005·10 cites·19 claims
- 0354US6174823B1Methods of forming a barrier layerTRIKON EQUIP LTD·Filed 1997·Granted Jan 16, 2001·16 cites·19 claims
- 0452US7199474B2Damascene structure with integral etch stop layerAVIZA EUROP LTD·Filed 2002·Granted Apr 3, 2007·7 cites·4 claims
- 0540US9783886B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2016·Granted Oct 10, 2017·0 cites·13 claims
- 0640US2007145007A1Semiconductor structureBUCHANAN KEITH E·Filed 2007·Application pending·0 cites
- 0737US6179974B1Apparatus and methods for sputteringTRIKON HOLDINGS LTD·Filed 1999·Granted Jan 30, 2001·7 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →