Inventor · disambiguated record
Ellis Harvey
Also filed as: HARVEY ELLIS · HARVEY ELLIS G
3 granted patents·2 pending applications·15 citations·filing 2000–2006
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0163US6678911B2Multiple vertical wafer cleanerSPEEDFAM IPEC CORP·Filed 2000·Granted Jan 20, 2004·12 cites·8 claims
- 0246US6461441B1Method of removing debris from cleaning pads in work piece cleaning equipmentSPEEDFAM IPEC CORP·Filed 2001·Granted Oct 8, 2002·3 cites·39 claims
- 0345US7597574B2Lamp fasteners for semiconductor processing reactorsASM INC·Filed 2006·Granted Oct 6, 2009·0 cites·17 claims
- 0436US2008129064A1Bernoulli wandASM INC·Filed 2006·Application pending·0 cites
- 0530US2002166569A1Method and apparatus for semiconductor wafer cleaningSPEEDFAM IPEC CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →