Inventor · disambiguated record
Guray Tas
Also filed as: TAS GURAY
9 granted patents·1 pending application·39 citations·filing 2004–2023
85Inventor score
Files withTAS GURAY3BOGUSLAVSKIY VADIM2RUDOLPH TECHNOLOGIES INC2VEECO INSTR INC2ONTO INNOVATION INC1
Top patents by PatentIndex Score
10 records- 0190US9677944B2Temperature control for GaN based materialsVEECO INSTR INC·Filed 2015·Granted Jun 13, 2017·6 cites·8 claims
- 0283US9653340B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted May 16, 2017·6 cites·16 claims
- 0377US8312772B2Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosionTAS GURAY·Filed 2008·Granted Nov 20, 2012·11 cites·20 claims
- 0475US9085824B2Control of stray radiation in a CVD chamberTAS GURAY·Filed 2012·Granted Jul 21, 2015·1 cites·12 claims
- 0572US9200965B2Temperature control for GaN based materialsVEECO INSTR INC·Filed 2013·Granted Dec 1, 2015·2 cites·20 claims
- 0669US8958061B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted Feb 17, 2015·2 cites·33 claims
- 0768US7019845B1Measuring elastic moduli of dielectric thin films using an optical metrology systemRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 28, 2006·10 cites·36 claims
- 0858US2024319615A1Substrate edge patterning techniquesONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 0956US9448119B2Radiation thermometer using off-focus telecentric opticsTAS GURAY·Filed 2012·Granted Sep 20, 2016·1 cites·18 claims
- 1041US7903238B2Combination of ellipsometry and optical stress generation and detectionRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Mar 8, 2011·0 cites·24 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →