Assignee
ONTO INNOVATION INC
US·52 granted patents·50 pending applications·65 citations·filing 2018–2025
Top patents by PatentIndex Score
102 records- 0196US11162897B2Optical metrology device using numerical aperture reductionONTO INNOVATION INC·Filed 2020·Granted Nov 2, 2021·9 cites·17 claims
- 0294US11346768B1Vortex polarimeterONTO INNOVATION INC·Filed 2020·Granted May 31, 2022·15 cites·20 claims
- 0394US10901241B1Optical metrology system using infrared wavelengthsONTO INNOVATION INC·Filed 2019·Granted Jan 26, 2021·10 cites·45 claims
- 0493US10775149B1Light source failure identification in an optical metrology deviceONTO INNOVATION INC·Filed 2019·Granted Sep 15, 2020·7 cites·21 claims
- 0590US11808715B2Target for optical measurement of trenchesONTO INNOVATION INC·Filed 2021·Granted Nov 7, 2023·2 cites·30 claims
- 0689US11687010B2System and method for correcting overlay errors in a lithographic processONTO INNOVATION INC·Filed 2021·Granted Jun 27, 2023·2 cites·17 claims
- 0789US11262191B1On-axis dynamic interferometer and optical imaging systems employing the sameONTO INNOVATION INC·Filed 2019·Granted Mar 1, 2022·5 cites·24 claims
- 0889US10830709B2Interferometer with pixelated phase shift maskONTO INNOVATION INC·Filed 2018·Granted Nov 10, 2020·5 cites·19 claims
- 0989US2026072423A1Fabrication fingerprint for proactive yield managementONTO INNOVATION INC·Filed 2025·Application pending·0 cites
- 1087US10935501B2Sub-resolution defect detectionONTO INNOVATION INC·Filed 2018·Granted Mar 2, 2021·4 cites·51 claims
- 1185US10621264B2Correction of angular error of plane-of-incidence azimuth of optical metrology deviceONTO INNOVATION INC·Filed 2019·Granted Apr 14, 2020·2 cites·24 claims
- 1285US2025327737A1Opto-acoustic microscopy using an instantaneous signal difference between signals from two discrete delay times acquired with a single probe beamONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 1383US11079220B1Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonanceONTO INNOVATION INC·Filed 2020·Granted Aug 3, 2021·2 cites·20 claims
- 1481US12386271B2Multi-layer calibration for empirical overlay measurementONTO INNOVATION INC·Filed 2022·Granted Aug 12, 2025·1 cites·20 claims
- 1581US2025327924A1On-the-fly opto-acoustic microscopyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 1679US2025327758A1Metrology based on time resolved non-acoustic signalsONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 1775US11126096B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2018·Granted Sep 21, 2021·1 cites·36 claims
- 1874US2022334567A1Fabrication fingerprint for proactive yield managementONTO INNOVATION INC·Filed 2022·Application pending·0 cites
- 1974US2024402074A1Non-destructive inspection and manufacturing metrology systems and methodsONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 2072US12585182B2Overlay correction for advanced integrated-circuit devicesONTO INNOVATION INC·Filed 2023·Granted Mar 24, 2026·0 cites·20 claims
- 2171US12519382B2Two-axis-motion from a linear actuatorONTO INNOVATION INC·Filed 2023·Granted Jan 6, 2026·0 cites·20 claims
- 2271US2023266117A1Wafer inspection system including a laser triangulation sensorONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 2370US11531279B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2021·Granted Dec 20, 2022·0 cites·15 claims
- 2469US2026029354A1Compensating for deformation of a sample during measurementONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 2569US2023417682A1Metrology solutions for complex structures of interestONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 2668US2026092873A1Top plate for inspection systemONTO INNOVATION INC·Filed 2025·Application pending·0 cites
- 2767US12174128B2High resolution multispectral multi-field-of-view imaging system for wafer inspectionONTO INNOVATION INC·Filed 2022·Granted Dec 24, 2024·0 cites·20 claims
- 2867US2025014165A1Substrate mapping using deep neural-networksONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 2966US2023418995A1Multiple sources of signals for hybrid metrology using physical modeling and machine learningONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 3066US2025021897A1Generating predictions and/or other analyses using artificial intelligenceONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3166US2024354485A1Tracking and/or predicting substrate yield during fabricationONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3266US2025355368A1Metrology to reduce overlay errorONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3366US2025290871A1Surface inspection systemONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3466US2024159656A1Combined modeling and machine learning in optical metrologyONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 3565US2025314974A1Front-to-back overlay (ftbo) standardONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3665US2024329005A1Multi pump-probe encoding-decoding for opto-acoustic metrologyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3764US2025036113A1Log file aggregator and data visualization for semiconductor control systemsONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 3863US12092962B1Measurements of structures in presence of signal contaminationsONTO INNOVATION INC·Filed 2023·Granted Sep 17, 2024·0 cites·29 claims
- 3963US11874229B2Apparatus and method for multiple source excitation Raman spectroscopyONTO INNOVATION INC·Filed 2022·Granted Jan 16, 2024·0 cites·20 claims
- 4063US2025258445A1Fiducial pattern alignment techniquesONTO INNOVATION INC·Filed 2025·Application pending·0 cites
- 4162US12585205B2Low numerical aperture alignmentONTO INNOVATION INC·Filed 2022·Granted Mar 24, 2026·0 cites·21 claims
- 4262US12216051B2Dynamic phase-shift interferometer utilizing a synchronous optical frequency-shiftONTO INNOVATION INC·Filed 2022·Granted Feb 4, 2025·0 cites·22 claims
- 4362US2026029330A1Transient ellipsometry with asynchronous optical samplingONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 4462US2024337627A1System and method for fast microscopyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 4561US12092565B2Non-destructive inspection and manufacturing metrology systems and methodsONTO INNOVATION INC·Filed 2020·Granted Sep 17, 2024·0 cites·18 claims
- 4661US2025336053A1Automated substrate defect identification using multiple classification engine modelsONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 4760US12579633B2Periodic-pattern background removalONTO INNOVATION INC·Filed 2023·Granted Mar 17, 2026·0 cites·18 claims
- 4860US12474643B2System and method for performing alignment and overlay measurement through an opaque layerONTO INNOVATION INC·Filed 2021·Granted Nov 18, 2025·0 cites·23 claims
- 4960US12131454B2Substrate mapping using deep neural-networksONTO INNOVATION INC·Filed 2021·Granted Oct 29, 2024·0 cites·20 claims
- 5060US2024062361A1Substrate defect-detection and comparisonONTO INNOVATION INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 102 patent records by PatentIndex Score.
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