Assignee
RUDOLPH TECHNOLOGIES INC
US·63 granted patents·14 pending applications·717 citations·filing 1999–2014
Top patents by PatentIndex Score
77 records- 0195US6256097B1Ellipsometer and ellipsometry methodRUDOLPH TECHNOLOGIES INC·Filed 2000·Granted Jul 3, 2001·86 cites·41 claims
- 0293US7616804B2Wafer edge inspection and metrologyRUDOLPH TECHNOLOGIES INC·Filed 2006·Granted Nov 10, 2009·19 cites·11 claims
- 0392US7729528B2Automated wafer defect inspection system and a process of performing such inspectionRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Jun 1, 2010·43 cites·53 claims
- 0491US7634128B2Stereoscopic three-dimensional metrology system and methodRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Dec 15, 2009·27 cites·33 claims
- 0590US7586607B2Polarization imagingRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Sep 8, 2009·11 cites·11 claims
- 0689US7461961B2Fiber optic darkfield ring lightRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Dec 9, 2008·25 cites·17 claims
- 0786US7385409B2System and method of mitigating effects of component deflection in a probe card analyzerRUDOLPH TECHNOLOGIES INC·Filed 2006·Granted Jun 10, 2008·7 cites·7 claims
- 0885US7960981B2Apparatus for obtaining planarity measurements with respect to a probe card analysis systemRUDOLPH TECHNOLOGIES INC·Filed 2009·Granted Jun 14, 2011·8 cites·14 claims
- 0985US7006221B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Feb 28, 2006·21 cites·22 claims
- 1084US7579853B2Apparatus for obtaining planarity measurements with respect to a probe card analysis systemRUDOLPH TECHNOLOGIES INC·Filed 2008·Granted Aug 25, 2009·6 cites·5 claims
- 1184US7539583B2Method and system for defect detectionRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted May 26, 2009·15 cites·19 claims
- 1284US6504618B2Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement systemRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Jan 7, 2003·29 cites·25 claims
- 1383US7366344B2Edge normal processRUDOLPH TECHNOLOGIES INC·Filed 2006·Granted Apr 29, 2008·13 cites·31 claims
- 1483US6847443B1System and method for multi-wavelength, narrow-bandwidth detection of surface defectsRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Jan 25, 2005·30 cites·6 claims
- 1582US7593565B2All surface data for use in substrate inspectionRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted Sep 22, 2009·11 cites·16 claims
- 1682US7196300B2Dynamic focusing method and apparatusRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted Mar 27, 2007·9 cites·26 claims
- 1782US6519045B2Method and apparatus for measuring very thin dielectric film thickness and creating a stable measurement environmentRUDOLPH TECHNOLOGIES INC·Filed 2001·Granted Feb 11, 2003·36 cites·16 claims
- 1879US7865010B2Wafer edge inspection and metrologyRUDOLPH TECHNOLOGIES INC·Filed 2009·Granted Jan 4, 2011·4 cites·7 claims
- 1979US7706599B2Edge normal processRUDOLPH TECHNOLOGIES INC·Filed 2008·Granted Apr 27, 2010·9 cites·9 claims
- 2077US8380472B2Semiconductor yield management system and methodRUDOLPH TECHNOLOGIES INC·Filed 2008·Granted Feb 19, 2013·5 cites·20 claims
- 2177US7822260B2Edge inspectionRUDOLPH TECHNOLOGIES INC·Filed 2008·Granted Oct 26, 2010·5 cites·3 claims
- 2277US7522272B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Apr 21, 2009·7 cites·4 claims
- 2377US7340087B2Edge inspectionRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 4, 2008·14 cites·36 claims
- 2477US7197178B2Photoresist edge bead removal measurementRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 27, 2007·24 cites·11 claims
- 2577US7192173B2Optical throughput condenserRUDOLPH TECHNOLOGIES INC·Filed 2003·Granted Mar 20, 2007·21 cites·22 claims
- 2676US7206442B1Optical inspection method utilizing ultraviolet lightRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Apr 17, 2007·17 cites·16 claims
- 2775US7703823B2Wafer holding mechanismRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted Apr 27, 2010·5 cites·27 claims
- 2875US7684611B2Photoresist edge bead removal measurementRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Mar 23, 2010·8 cites·22 claims
- 2974US7835566B2All surface data for use in substrate inspectionRUDOLPH TECHNOLOGIES INC·Filed 2009·Granted Nov 16, 2010·5 cites·18 claims
- 3074US7750622B2Method of applying the analysis of scrub mark morphology and location to the evaluation and correction of semiconductor testing, analysis and manufactureRUDOLPH TECHNOLOGIES INC·Filed 2006·Granted Jul 6, 2010·5 cites·28 claims
- 3174US7663382B2High-speed capacitor leakage measurement systems and methodsRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Feb 16, 2010·9 cites·9 claims
- 3273US7616328B2Method and system for providing a high definition triangulation systemRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Nov 10, 2009·8 cites·33 claims
- 3373US7050178B2Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement systemRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted May 23, 2006·18 cites·18 claims
- 3472US7634129B2Dual-axis scanning system and methodRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Dec 15, 2009·18 cites·23 claims
- 3571US7253887B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2006·Granted Aug 7, 2007·2 cites·38 claims
- 3669US7724358B2Illuminator for darkfield inspectionRUDOLPH TECHNOLOGIES INC·Filed 2008·Granted May 25, 2010·2 cites·13 claims
- 3768US9062859B2Wafer edge inspection illumination systemRUDOLPH TECHNOLOGIES INC·Filed 2013·Granted Jun 23, 2015·1 cites·4 claims
- 3868US7019845B1Measuring elastic moduli of dielectric thin films using an optical metrology systemRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 28, 2006·10 cites·36 claims
- 3967US7369234B2Method of performing optical measurement on a sampleRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted May 6, 2008·17 cites·35 claims
- 4064US7589783B2Camera and illumination matching for inspection systemRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Sep 15, 2009·6 cites·13 claims
- 4163US7813638B2System for generating camera triggersRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted Oct 12, 2010·2 cites·21 claims
- 4261US8358831B2Probe mark inspectionRUDOLPH TECHNOLOGIES INC·Filed 2009·Granted Jan 22, 2013·3 cites·17 claims
- 4361US2009324056A1Polarization imagingRUDOLPH TECHNOLOGIES INC·Filed 2009·Application pending·0 cites
- 4460US7705974B2Metrology system with spectroscopic ellipsometer and photoacoustic measurementsRUDOLPH TECHNOLOGIES INC·Filed 2009·Granted Apr 27, 2010·0 cites·16 claims
- 4560US6934031B2Methods and apparatus for determining optical constants of semiconductors and dielectrics with interband statesRUDOLPH TECHNOLOGIES INC·Filed 2001·Granted Aug 23, 2005·4 cites·20 claims
- 4658US7954018B2Analysis techniques for multi-level memoryRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted May 31, 2011·4 cites·29 claims
- 4758US2014375983A1Multiple measurement techniques including focused beam scatterometry for characterization of samplesRUDOLPH TECHNOLOGIES INC·Filed 2014·Application pending·0 cites
- 4856US7782071B2Probe card analysis system and methodRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Aug 24, 2010·2 cites·5 claims
- 4955US6813376B1System and method for detecting defects on a structure-bearing surface using optical inspectionRUDOLPH TECHNOLOGIES INC·Filed 2000·Granted Nov 2, 2004·8 cites·3 claims
- 5054US7629993B2Automated wafer defect inspection system using backside illuminationRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Dec 8, 2009·3 cites·16 claims
Showing the top 50 of 77 patent records by PatentIndex Score.
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