Inventor · disambiguated record
Kunichirou Gotoh
Also filed as: GOTOH KUNICHIROU
1 granted patent·1 pending application·18 citations·filing 2007–2009
43Inventor score
Technology areasB24B
Files withFUJITSU MICROELECTRONICS LTD2
Top patents by PatentIndex Score
2 records- 0186US7572172B2Polishing machine, workpiece supporting table pad, polishing method and manufacturing method of semiconductor deviceFUJITSU MICROELECTRONICS LTD·Filed 2007·Granted Aug 11, 2009·18 cites·4 claims
- 0248US2009264054A1Polishing machine, workpiece supporting table pad, polishing method and manufacturing method of semiconductor deviceFUJITSU MICROELECTRONICS LTD·Filed 2009·Application pending·0 cites
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