Inventor · disambiguated record
Mitsuo Tada
Also filed as: TADA MITSUO
20 granted patents·3 pending applications·255 citations·filing 1979–2017
95Inventor score
Top patents by PatentIndex Score
23 records- 0191US7854646B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2010·Granted Dec 21, 2010·12 cites·7 claims
- 0289US7714572B2Method of detecting characteristics of films using eddy currentEBARA CORP·Filed 2006·Granted May 11, 2010·14 cites·19 claims
- 0387US7046001B2Frequency measuring device, polishing device using the same and eddy current sensorEBARA CORP·Filed 2001·Granted May 16, 2006·36 cites·8 claims
- 0485US9632061B2Eddy current sensor and polishing methodEBARA CORP·Filed 2013·Granted Apr 25, 2017·6 cites·20 claims
- 0584US7670206B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2004·Granted Mar 2, 2010·27 cites·10 claims
- 0684US6517689B1Plating deviceEBARA CORP·Filed 1999·Granted Feb 11, 2003·57 cites·29 claims
- 0783US6746319B2Measuring apparatusEBARA CORP·Filed 2002·Granted Jun 8, 2004·21 cites·18 claims
- 0880US9437507B2Method of correcting film thickness measurement value, film thickness corrector and eddy current sensorEBARA CORP·Filed 2015·Granted Sep 6, 2016·3 cites·17 claims
- 0978US7508201B2Eddy current sensorEBARA CORP·Filed 2004·Granted Mar 24, 2009·22 cites·26 claims
- 1077US7078894B2Polishing device using eddy current sensorEBARA CORP·Filed 2003·Granted Jul 18, 2006·17 cites·6 claims
- 1175US10933507B2Polishing apparatusEBARA CORP·Filed 2017·Granted Mar 2, 2021·2 cites·10 claims
- 1270US10739488B2Metal detection sensor and metal detection method using sameEBARA CORP·Filed 2016·Granted Aug 11, 2020·1 cites·24 claims
- 1370US10134614B2Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatusEBARA CORP·Filed 2014·Granted Nov 20, 2018·2 cites·19 claims
- 1470US7960188B2Polishing methodEBARA CORP·Filed 2009·Granted Jun 14, 2011·3 cites·4 claims
- 1569US8657644B2Eddy current sensor and polishing method and apparatusTADA MITSUO·Filed 2011·Granted Feb 25, 2014·2 cites·32 claims
- 1666US8696924B2Polishing apparatus and polishing methodTADA MITSUO·Filed 2007·Granted Apr 15, 2014·4 cites·7 claims
- 1761US7258595B2Polishing apparatusEBARA CORP·Filed 2003·Granted Aug 21, 2007·8 cites·9 claims
- 1853US4375917ASingle-chip, MOS-LSI microprocessor controlled electrophotographic copying machineSHARP KK·Filed 1979·Granted Mar 8, 1983·8 cites·6 claims
- 1946US6935935B2Measuring apparatusEBARA CORP·Filed 2004·Granted Aug 30, 2005·2 cites·22 claims
- 2044US2008274670A1Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing ApparatusEBARA CORP·Filed 2005·Application pending·0 cites
- 2140US2011124269A1Eddy current sensor and polishing method and apparatusTADA MITSUO·Filed 2011·Application pending·0 cites
- 2238US6500317B1Plating apparatus for detecting the conductivity between plating contacts on a substrateEBARA CORP·Filed 1998·Granted Dec 31, 2002·8 cites·5 claims
- 2336US2006164104A1Measuring apparatusTADA MITSUO·Filed 2004·Application pending·0 cites
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