Inventor · disambiguated record
Cho H. Teh
Also filed as: TEH CHO · TEH CHO H · TEH CHO HUAK
7 granted patents·3 pending applications·41 citations·filing 2003–2023
82Inventor score
Top patents by PatentIndex Score
10 records- 0189US8502146B2Methods and apparatus for classification of defects using surface height attributesCHEN CHIEN-HUEI·Filed 2011·Granted Aug 6, 2013·13 cites·20 claims
- 0282US7394534B1Process excursion detectionKLA TENCOR CORP·Filed 2003·Granted Jul 1, 2008·15 cites·1 claims
- 0374US11650576B2Knowledge recommendation for defect reviewASML NETHERLANDS BV·Filed 2018·Granted May 16, 2023·2 cites·12 claims
- 0473US8532949B2Computer-implemented methods and systems for classifying defects on a specimenTEH CHO HUAK·Filed 2005·Granted Sep 10, 2013·9 cites·24 claims
- 0572US7646476B2Process excursion detectionKLA TENCOR CORP·Filed 2008·Granted Jan 12, 2010·2 cites·4 claims
- 0652US2010067781A1Process Excursion DetectionKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 0751US2025166161A1Methods and systems for improving wafer defect classification nuisance rateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0850US8289510B2Process excursion detectionHUET PATRICK Y·Filed 2011·Granted Oct 16, 2012·0 cites·5 claims
- 0941US11416979B2Defect displaying methodASML NETHERLANDS BV·Filed 2018·Granted Aug 16, 2022·0 cites·15 claims
- 1038US2012223227A1Apparatus and methods for real-time three-dimensional sem imaging and viewing of semiconductor wafersCHEN CHIEN-HUEI·Filed 2011·Application pending·0 cites
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