Inventor · disambiguated record
Klaus Freischlad
Also filed as: FREISCHLAD KLAUS · FREISCHLAD KLAUS R · FREISCHLAD KLAUS REINHARD
19 granted patents·304 citations·filing 1990–2016
95Inventor score
Files withKLA TENCOR CORP5ZEISS STIFTUNG4KLA TENCOR TECH CORP2PHASE SHIFT TECHNOLOGY2PHASE SHIFT TECHNOLOGY INC2
Top patents by PatentIndex Score
19 records- 0194US6847458B2Method and apparatus for measuring the shape and thickness variation of polished opaque platesPHASE SHIFT TECHNOLOGY INC·Filed 2003·Granted Jan 25, 2005·81 cites·10 claims
- 0291US10018572B2Front quartersphere scattered light analysisKLA TENCOR CORP·Filed 2016·Granted Jul 10, 2018·2 cites·9 claims
- 0389US9488591B2Front quartersphere scattered light analysisKLA TENCOR CORP·Filed 2014·Granted Nov 8, 2016·3 cites·8 claims
- 0489US7605913B2System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpieceKLA TENCOR CORP·Filed 2005·Granted Oct 20, 2009·7 cites·33 claims
- 0584US7408649B2Method and apparatus for optically analyzing a surfaceKLA TENCOR TECH CORP·Filed 2005·Granted Aug 5, 2008·11 cites·43 claims
- 0682US9528942B2Front quartersphere scattered light analysisKLA TENCOR CORP·Filed 2014·Granted Dec 27, 2016·1 cites·18 claims
- 0778US6184994B1Method and apparatus for absolutely measuring flat and sperical surfaces with high spatal resolutionADE PHASE SHIFT TECHNOLOGY·Filed 1999·Granted Feb 6, 2001·53 cites·27 claims
- 0877US9110033B2Front quartersphere scattered light analysisBILLS RICHARD E·Filed 2009·Granted Aug 18, 2015·2 cites·17 claims
- 0977US8330947B2Back quartersphere scattered light analysisBILLS RICHARD EARL·Filed 2009·Granted Dec 11, 2012·2 cites·24 claims
- 1074US6061133AInterferometer light sourcePHASE SHIFT TECHNOLOGY·Filed 1999·Granted May 9, 2000·39 cites·35 claims
- 1173US7428056B2Method and apparatus for optically analyzing a surfaceKLA TENCOR TECH CORP·Filed 2006·Granted Sep 23, 2008·6 cites·17 claims
- 1271US7583386B2Method and apparatus for optically analyzing a surfaceKLA TENCOR CORP·Filed 2008·Granted Sep 1, 2009·5 cites·30 claims
- 1369US5357341AMethod for evaluating interferograms and interferometer thereforZEISS STIFTUNG·Filed 1992·Granted Oct 18, 1994·29 cites·26 claims
- 1460US8797537B2Interferometer with a virtual reference surfaceFREISCHLAD KLAUS·Filed 2011·Granted Aug 5, 2014·2 cites·21 claims
- 1556US6844929B2Apparatus and method for holding and transporting thin opaque platesPHASE SHIFT TECHNOLOGY·Filed 2003·Granted Jan 18, 2005·9 cites·33 claims
- 1655US5185810AMethod for optical testing of samplesZEISS STIFTUNG·Filed 1991·Granted Feb 9, 1993·23 cites·7 claims
- 1754US5737081AExtended-source low coherence interferometer for flatness testingPHASE SHIFT TECHNOLOGY INC·Filed 1996·Granted Apr 7, 1998·18 cites·16 claims
- 1838US5311599AMethod and apparatus for optical testing of samplesZEISS STIFTUNG·Filed 1991·Granted May 10, 1994·10 cites·10 claims
- 1929US5042041ARadiation source for partially coherent radiationZEISS STIFTUNG·Filed 1990·Granted Aug 20, 1991·1 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when Klaus Freischlad files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →