Inventor · disambiguated record
Christopher R. Hatem
Also filed as: HATEM CHRISTOPHER · HATEM CHRISTOPHER R
35 granted patents·18 pending applications·121 citations·filing 2006–2023
96Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT16VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12APPLIED MATERIALS INC6GODET LUDOVIC5HATEM CHRISTOPHER R5
Top patents by PatentIndex Score
53 records- 0197US9589802B1Damage free enhancement of dopant diffusion into a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Mar 7, 2017·28 cites·17 claims
- 0295US9337040B1Angled ion beam processing of heterogeneous structureVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2015·Granted May 10, 2016·12 cites·17 claims
- 0394US10879055B2Techniques, system and apparatus for selective deposition of a layer using angled ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Dec 29, 2020·12 cites·18 claims
- 0494US8460569B2Method and system for post-etch treatment of patterned substrate featuresGODET LUDOVIC·Filed 2011·Granted Jun 11, 2013·18 cites·7 claims
- 0589US11069511B2System and methods using an inline surface engineering sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 20, 2021·4 cites·6 claims
- 0686US9985101B2Encapsulated nanostructures and method for fabricatingUNIV FLORIDA·Filed 2016·Granted May 29, 2018·5 cites·20 claims
- 0785US7655932B2Techniques for providing ion source feed materialsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 2, 2010·10 cites·27 claims
- 0884US7642150B2Techniques for forming shallow junctionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 5, 2010·9 cites·29 claims
- 0981US9953835B2Damage free enhancement of dopant diffusion into a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 24, 2018·2 cites·18 claims
- 1076US2024096602A1System And Methods Using An Inline Surface Engineering SourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2023·Application pending·0 cites
- 1174US7807961B2Techniques for ion implantation of molecular ionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Oct 5, 2010·4 cites·17 claims
- 1273US11862433B2System and methods using an inline surface engineering sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2021·Granted Jan 2, 2024·0 cites·7 claims
- 1371US8461032B2Use of dopants with different diffusivities for solar cell manufactureBATEMAN NICHOLAS·Filed 2009·Granted Jun 11, 2013·3 cites·9 claims
- 1470US10411096B2Encapsulated nanostructures and devices containing encapsulated nanostructuresUNIV FLORIDA·Filed 2018·Granted Sep 10, 2019·1 cites·17 claims
- 1570US9520360B2Angled ion beam processing of heterogeneous structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Dec 13, 2016·1 cites·18 claims
- 1669US8465909B2Self-aligned masking for solar cell manufactureBATEMAN NICHOLAS P T·Filed 2010·Granted Jun 18, 2013·2 cites·14 claims
- 1768US7622722B2Ion implantation device with a dual pumping mode and method thereofVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 24, 2009·2 cites·17 claims
- 1867US8012843B2Optimized halo or pocket cold implantsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Sep 6, 2011·2 cites·19 claims
- 1965US8124506B2USJ techniques with helium-treated substratesHATEM CHRISTOPHER R·Filed 2009·Granted Feb 28, 2012·2 cites·13 claims
- 2063US9240350B2Techniques for forming 3D structuresGODET LUDOVIC·Filed 2012·Granted Jan 19, 2016·1 cites·11 claims
- 2163US8372735B2USJ techniques with helium-treated substratesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Feb 12, 2013·1 cites·9 claims
- 2263US8003957B2Ethane implantation with a dilution gasVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·2 cites·20 claims
- 2362US2016326636A1Methods Of Affecting Material Properties And Applications ThereforVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Application pending·0 cites
- 2461US11721530B2System for controlling radicals using a radical filterAPPLIED MATERIALS INC·Filed 2020·Granted Aug 8, 2023·0 cites·16 claims
- 2561US11631588B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Apr 18, 2023·0 cites·20 claims
- 2657US10541137B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jan 21, 2020·0 cites·14 claims
- 2755US9425027B2Methods of affecting material properties and applications thereforGODET LUDOVIC·Filed 2012·Granted Aug 23, 2016·0 cites·7 claims
- 2855US2018240670A1Damage free enhancement of dopant diffusion into a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Application pending·0 cites
- 2954US2024153774A1Multiprocess substrate treatment for enhanced substrate dopingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3053US11315790B2Enhanced substrate amorphization using intermittent ion exposureAPPLIED MATERIALS INC·Filed 2019·Granted Apr 26, 2022·0 cites·15 claims
- 3153US2024153775A1Plasma assisted damage engineering during ion implantationAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3252US8697549B2Deposition of porous films for thermoelectric applicationsLU XIANFENG·Filed 2012·Granted Apr 15, 2014·0 cites·18 claims
- 3352US2014037858A1Anisotropic surface energy modulation by ion implantationMA TRISTAN·Filed 2012·Application pending·0 cites
- 3452US2009227061A1Establishing a high phosphorus concentration in solar cellsBATEMAN NICHOLAS·Filed 2009·Application pending·0 cites
- 3551US2014154834A1Use of dopants with different diffusivities for solar cell manufactureVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Application pending·0 cites
- 3650US8969181B2Method for epitaxial layer overgrowthGODET LUDOVIC·Filed 2012·Granted Mar 3, 2015·0 cites·20 claims
- 3750US2010084583A1Reduced implant voltage during ion implantationHATEM CHRISTOPHER R·Filed 2008·Application pending·0 cites
- 3849US2008105828A1Techniques for removing molecular fragments from an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 3949US2010279479A1Formation Of Raised Source/Drain On A Strained Thin Film Implanted With Cold And/Or Molecular CarbonVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Application pending·0 cites
- 4046US9024273B2Method to generate molecular ions from ions with a smaller atomic massGODET LUDOVIC·Filed 2010·Granted May 5, 2015·0 cites·5 claims
- 4146US2009200494A1Techniques for cold implantation of carbon-containing speciesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
- 4245US2011039034A1Pulsed deposition and recrystallization and tandem solar cell design utilizing crystallized/amorphous materialMAYNARD HELEN·Filed 2009·Application pending·0 cites
- 4344US9236257B2Techniques to mitigate straggle damage to sensitive structuresVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 12, 2016·0 cites·12 claims
- 4444US9062367B2Plasma processing of workpieces to form a coatingHATEM CHRISTOPHER R·Filed 2012·Granted Jun 23, 2015·0 cites·6 claims
- 4544US2007178679A1Methods of implanting ions and ion sources used for sameVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 4643US8101528B2Low temperature ion implantationHATEM CHRISTOPHER R·Filed 2010·Granted Jan 24, 2012·0 cites·12 claims
- 4743US2020411342A1Beamline architecture with integrated plasma processingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4842US9553174B2Conversion process utilized for manufacturing advanced 3D features for semiconductor device applicationsAPPLIED MATERIALS INC·Filed 2015·Granted Jan 24, 2017·0 cites·20 claims
- 4942US2007178678A1Methods of implanting ions and ion sources used for sameVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 5041US8742373B2Method of ionizationRADOVANOV SVETLANA·Filed 2010·Granted Jun 3, 2014·0 cites·16 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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