Inventor · disambiguated record
Allan Upham
Also filed as: UPHAM ALLAN · UPHAM ALLAN W · UPHAM ALLAN WARD
7 granted patents·4 pending applications·84 citations·filing 2001–2019
80Inventor score
Files withIBM10
Top patents by PatentIndex Score
11 records- 0192US7030031B2Method for forming damascene structure utilizing planarizing material coupled with diffusion barrier materialIBM·Filed 2003·Granted Apr 18, 2006·69 cites·94 claims
- 0271US9184042B1Wafer backside particle mitigationIBM·Filed 2014·Granted Nov 10, 2015·2 cites·17 claims
- 0366US7326651B2Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier materialIBM·Filed 2004·Granted Feb 5, 2008·12 cites·30 claims
- 0464US9378966B2Selective etching of silicon waferIBM·Filed 2014·Granted Jun 28, 2016·1 cites·18 claims
- 0555US9331073B2Epitaxially grown quantum well finFETs for enhanced pFET performanceIBM·Filed 2014·Granted May 3, 2016·0 cites·10 claims
- 0649US9318347B2Wafer backside particle mitigationIBM·Filed 2014·Granted Apr 19, 2016·0 cites·19 claims
- 0746US2016093697A1Epitaxially grown quantum well finfets for enhanced pfet performanceIBM·Filed 2015·Application pending·0 cites
- 0844US2005011445A1Apparatus and method for in-situ cleaning of a throttle valve in a CVD systemFiled 2004·Application pending·0 cites
- 0943US2015357207A1Selective etching of silicon waferIBM·Filed 2015·Application pending·0 cites
- 1042US11322361B2Selective etching of silicon waferIBM·Filed 2019·Granted May 3, 2022·0 cites·20 claims
- 1141US2002185067A1Apparatus and method for in-situ cleaning of a throttle valve in a CVD systemIBM·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →