Inventor · disambiguated record
Savitha Nanjangud
Also filed as: NANJANGUD SAVITHA
3 granted patents·63 citations·filing 2001–2009
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0187US6506097B1Optical monitoring in a two-step chemical mechanical polishing processAPPLIED MATERIALS INC·Filed 2001·Granted Jan 14, 2003·36 cites·20 claims
- 0280US9710903B2System and method for detecting design and process defects on a wafer using process monitoring featuresFOUQUET CHRISTOPHE·Filed 2009·Granted Jul 18, 2017·10 cites·50 claims
- 0376US6632124B2Optical monitoring in a two-step chemical mechanical polishing processAPPLIED MATERIALS INC·Filed 2003·Granted Oct 14, 2003·17 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →