Inventor · disambiguated record
Robert Brent Vopat
Also filed as: VOPAT ROBERT · VOPAT ROBERT B · VOPAT ROBERT BRENT
44 granted patents·10 pending applications·282 citations·filing 2010–2024
97Inventor score
Files withAPPLIED MATERIALS INC28VARIAN SEMICONDUCTOR EQUIPMENT10VARIAN SEMICONDUCTOR EQUIPMENT ASS INC10SCHALLER JASON4VOPAT ROBERT B1
Top patents by PatentIndex Score
54 records- 0197US8777284B2Venturi assisted gripperSCHALLER JASON·Filed 2012·Granted Jul 15, 2014·70 cites·18 claims
- 0296US10854483B2High pressure steam anneal processing apparatusAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·15 cites·20 claims
- 0396US10643867B2Annealing system and methodAPPLIED MATERIALS INC·Filed 2018·Granted May 5, 2020·17 cites·18 claims
- 0496US10586720B2Wafer processing systems including multi-position batch load lock apparatus with temperature control capabilityAPPLIED MATERIALS INC·Filed 2019·Granted Mar 10, 2020·12 cites·19 claims
- 0596US10256125B2Wafer processing systems including multi-position batch load lock apparatus with temperature control capabilityAPPLIED MATERIALS INC·Filed 2016·Granted Apr 9, 2019·14 cites·20 claims
- 0695US9378994B2Multi-position batch load lock apparatus and systems and methods including sameAPPLIED MATERIALS INC·Filed 2014·Granted Jun 28, 2016·19 cites·14 claims
- 0794US10427303B2Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturingAPPLIED MATERIALS INC·Filed 2014·Granted Oct 1, 2019·17 cites·10 claims
- 0894US10249525B2Dynamic leveling process heater liftAPPLIED MATERIALS INC·Filed 2017·Granted Apr 2, 2019·10 cites·21 claims
- 0994US9287148B1Dynamic heating method and system for wafer processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·17 cites·15 claims
- 1094US9281222B2Wafer handling systems and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Mar 8, 2016·23 cites·20 claims
- 1192US10103046B2Buffer chamber wafer heating mechanism and supporting robotAPPLIED MATERIALS INC·Filed 2016·Granted Oct 16, 2018·6 cites·20 claims
- 1291US8920103B2Multi-cell rotary end effector mechanism with slip ringSCHALLER JASON·Filed 2012·Granted Dec 30, 2014·12 cites·14 claims
- 1388US11094504B2Resonator coil having an asymmetrical profileAPPLIED MATERIALS INC·Filed 2020·Granted Aug 17, 2021·2 cites·19 claims
- 1488US9696097B2Multi-substrate thermal management apparatusAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·8 cites·18 claims
- 1584US9214369B2Dynamic pitch substrate liftVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Dec 15, 2015·6 cites·18 claims
- 1682US11315806B2Batch heating and cooling chamber or loadlockAPPLIED MATERIALS INC·Filed 2019·Granted Apr 26, 2022·2 cites·7 claims
- 1782US8698104B2System and method for handling multiple workpieces for matrix configuration processingWEAVER WILLIAM T·Filed 2010·Granted Apr 15, 2014·7 cites·11 claims
- 1881US9064920B2Electrostatic charge removal for solar cell grippersSCHALLER JASON·Filed 2012·Granted Jun 23, 2015·4 cites·4 claims
- 1980US12279359B2Linear accelerator assembly including flexible high-voltage connectionAPPLIED MATERIALS INC·Filed 2024·Granted Apr 15, 2025·0 cites·17 claims
- 2077US9496117B2Two-dimensional mass resolving slit mechanism for semiconductor processing systemsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Nov 15, 2016·3 cites·20 claims
- 2176US9899242B2Device and method for substrate heating during transportVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Feb 20, 2018·2 cites·19 claims
- 2275US12249522B2Processing chamber with annealing mini-environmentAPPLIED MATERIALS INC·Filed 2023·Granted Mar 11, 2025·0 cites·11 claims
- 2375US12185451B2Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamberAPPLIED MATERIALS INC·Filed 2022·Granted Dec 31, 2024·0 cites·20 claims
- 2474US11710617B2Resonator coil having an asymmetrical profileAPPLIED MATERIALS INC·Filed 2021·Granted Jul 25, 2023·0 cites·19 claims
- 2574US10854491B2Dynamic leveling process heater liftAPPLIED MATERIALS INC·Filed 2019·Granted Dec 1, 2020·1 cites·11 claims
- 2674US8330128B2Implant mask with moveable hinged mask segmentsVOPAT ROBERT B·Filed 2010·Granted Dec 11, 2012·4 cites·19 claims
- 2772US9694989B2Workpiece handling system and methods of workpiece handlingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2012·Granted Jul 4, 2017·2 cites·11 claims
- 2871US11895766B2Linear accelerator assembly including flexible high-voltage connectionAPPLIED MATERIALS INC·Filed 2021·Granted Feb 6, 2024·0 cites·17 claims
- 2970US11264258B2Buffer chamber wafer heating mechanism and supporting robotsAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·0 cites·11 claims
- 3070US10283379B2Batch LED heating and cooling chamber or loadlockAPPLIED MATERIALS INC·Filed 2016·Granted May 7, 2019·1 cites·8 claims
- 3170US9669552B2System and method for quick-swap of multiple substratesVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Jun 6, 2017·2 cites·14 claims
- 3270US9016998B2High throughput, low volume clamshell load lockVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 28, 2015·2 cites·17 claims
- 3369US10597779B2Susceptor position and rational apparatus and methods of useAPPLIED MATERIALS INC·Filed 2016·Granted Mar 24, 2020·1 cites·16 claims
- 3467US9728430B2Electrostatic chuck with LED heatingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 8, 2017·1 cites·20 claims
- 3563US11985756B2Linear accelerator coil including multiple fluid channelsAPPLIED MATERIALS INC·Filed 2021·Granted May 14, 2024·0 cites·19 claims
- 3662US10699930B2Buffer chamber wafer heating mechanism and supporting robotsAPPLIED MATERIALS INC·Filed 2018·Granted Jun 30, 2020·0 cites·11 claims
- 3761US10831112B2Reticle processing systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Nov 10, 2020·0 cites·20 claims
- 3859US11791176B2Processing chamber with annealing mini-environmentAPPLIED MATERIALS INC·Filed 2019·Granted Oct 17, 2023·0 cites·19 claims
- 3957US9026249B2Robot calibration methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted May 5, 2015·2 cites·13 claims
- 4056US2019375105A1Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4154US2014252787A1Venturi Assisted GripperVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 4253US9202734B2Electrostatic charge removal for solar cell grippersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2015·Granted Dec 1, 2015·0 cites·5 claims
- 4353US2014225007A1System and method for handling multiple workpieces for matrix configuration processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 4452US10256132B2Reticle processing systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Apr 9, 2019·0 cites·14 claims
- 4548US9145271B2Optimization of conveyor belts used for workpiece processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Sep 29, 2015·0 cites·12 claims
- 4648US2013108406A1High-throughput workpiece handlingSCHALLER JASON·Filed 2012·Application pending·0 cites
- 4745US10446710B2Transfer chamber and method of using a transfer chamberVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Oct 15, 2019·0 cites·3 claims
- 4845US2020386392A1Heat exchange arrangement for light emitting diode lamp modulesAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4944US2020375027A1Single Layer PCB Circuit Layout For Uniform Radial LED ArrayAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 5044US2014271057A1Temperature control systems and methods for small batch substrate handling systemsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
Showing the top 50 of 54 patent records by PatentIndex Score.
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