US2014252787A1PendingUtilityA1

Venturi Assisted Gripper

Assignee: VARIAN SEMICONDUCTOR EQUIPMENTPriority: Apr 20, 2012Filed: May 19, 2014Published: Sep 11, 2014
Est. expiryApr 20, 2032(~5.7 yrs left)· nominal 20-yr term from priority
H10P 72/78H10P 72/30B25J 15/0616H01L 21/677
54
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Claims

Abstract

A gripper system which utilizes two different suction systems is disclosed. This gripper system utilizes one suction system to pick up an item, while using the second suction system to hold the item. In some embodiments, a Venturi device based suction system is used as the first suction system to pick up the item, as this type of system is proficient at picking up items without requiring initial contact to create a seal. In some embodiments, a vacuum based system is used as the second suction system, as this type of system is able to hold items cost effectively.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A gripper system for picking up, holding and placing items, comprising:
 a gripper, adapted to contact said item, comprising a bottom surface having a first cavity and a second cavity, said first cavity and said second cavity separated from each other;   a first suction system, used to pick up said item, in communication with said first cavity; and   a second suction system, used to hold said item after being picked up, in communication with said second cavity.   
     
     
         2 . The gripper system of  claim 1 , wherein said first suction system comprises a Venturi device, and a source of compressed dry air, having a flow rate. 
     
     
         3 . The gripper system of  claim 2 , wherein said second suction system comprises a second Venturi device, and a second source of compressed dry air, having a second flow rate, wherein said second flow rate is less than said flow rate of said first suction system. 
     
     
         4 . The gripper system of  claim 2 , wherein said second suction system comprises a vacuum system. 
     
     
         5 . The gripper system of  claim 1 , further comprising a controller, configured to enable said first suction system to pick up said item. 
     
     
         6 . The gripper system of  claim 5 , wherein said controller enables said second suction system after said item has been picked up by said gripper. 
     
     
         7 . The gripper system of  claim 6 , further comprising a proximity sensor in communication with said controller to determine if said item has been picked up. 
     
     
         8 . The gripper system of  claim 6 , wherein said controller disables said first suction system after said second suction system is enabled. 
     
     
         9 . A gripper system for picking up, holding and placing items, comprising:
 a plurality of grippers, each comprising a bottom surface having a first cavity and a second cavity, said first cavity and said second cavity separated from each other, wherein each gripper is adapted to contact a corresponding item, said plurality of grippers configured into a plurality of subsets;   a first suction system, used to pick up said items, selectively in communication with a first cavity of each gripper in said plurality of subsets via a first plurality of gating elements; and   a second suction system, used to hold said items after being picked up, selectively in communication with a second cavity of each gripper in said plurality of subsets via a second plurality of gating elements.   
     
     
         10 . The gripper system of  claim 9 , further comprising a controller configured to control said gating elements. 
     
     
         11 . The gripper system of  claim 10 , wherein said controller enables a first gating element of said first plurality of gating elements to allow said first suction system to be in communication with said first cavities of a first subset of said plurality of grippers. 
     
     
         12 . The gripper system of  claim 11 , wherein said controller enables a first gating element of said second plurality of gating elements to allow said second suction system to be in communication with said second cavities of said first subset of said plurality of grippers after items corresponding to said first subset of said plurality of grippers have been picked up. 
     
     
         13 . The gripper system of  claim 12 , wherein said controller disables said first gating element of said first plurality of gating elements after said first gating element of said second plurality of gating elements is enabled. 
     
     
         14 . The gripper system of  claim 9 , wherein said first suction system comprises a Venturi device, and a source of compressed dry air, having a flow rate. 
     
     
         15 . The gripper system of  claim 14 , wherein said second suction system comprises a second Venturi device, and a second source of compressed dry air, having a second flow rate, wherein said second flow rate is less than said flow rate of said first suction system. 
     
     
         16 . The gripper system of  claim 14 , wherein said second suction system comprises a vacuum system.

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