Inventor · disambiguated record
Yan Rozenzon
Also filed as: ROZENZON YAN
20 granted patents·3 pending applications·266 citations·filing 1994–2022
94Inventor score
Top patents by PatentIndex Score
23 records- 0194US11728141B2Gas hub for plasma reactorAPPLIED MATERIALS INC·Filed 2022·Granted Aug 15, 2023·2 cites·8 claims
- 0292US6916399B1Temperature controlled window with a fluid supply systemAPPLIED MATERIALS INC·Filed 1999·Granted Jul 12, 2005·168 cites·20 claims
- 0391US10163606B2Plasma reactor with highly symmetrical four-fold gas injectionAPPLIED MATERIALS INC·Filed 2014·Granted Dec 25, 2018·11 cites·20 claims
- 0490US10008368B2Multi-zone gas injection assembly with azimuthal and radial distribution controlAPPLIED MATERIALS INC·Filed 2014·Granted Jun 26, 2018·10 cites·27 claims
- 0589US8562745B2Stable wafer-carrier systemROZENZON YAN·Filed 2010·Granted Oct 22, 2013·7 cites·22 claims
- 0685US11244811B2Plasma reactor with highly symmetrical four-fold gas injectionAPPLIED MATERIALS INC·Filed 2018·Granted Feb 8, 2022·1 cites·7 claims
- 0781US11139150B2Nozzle for multi-zone gas injection assemblyAPPLIED MATERIALS INC·Filed 2019·Granted Oct 5, 2021·2 cites·3 claims
- 0878US8652259B2Scalable, high-throughput, multi-chamber epitaxial reactor for silicon depositionPOPPE STEVE·Filed 2009·Granted Feb 18, 2014·5 cites·18 claims
- 0975US11251067B2Pedestal lift for semiconductor processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·2 cites·21 claims
- 1074US10410841B2Side gas injection kit for multi-zone gas injection assemblyAPPLIED MATERIALS INC·Filed 2018·Granted Sep 10, 2019·0 cites·14 claims
- 1167US10861681B2Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluentAPPLIED MATERIALS INC·Filed 2018·Granted Dec 8, 2020·1 cites·22 claims
- 1266US5693179AContaminant reduction improvements for plasma etch chambersAPPLIED MATERIALS INC·Filed 1995·Granted Dec 2, 1997·18 cites·30 claims
- 1362US5484486AQuick release process kitAPPLIED MATERIALS INC·Filed 1994·Granted Jan 16, 1996·23 cites·27 claims
- 1460US9441295B2Multi-channel gas-delivery systemROZENZON YAN·Filed 2010·Granted Sep 13, 2016·2 cites·17 claims
- 1556US8968473B2Stackable multi-port gas nozzlesPOPPE STEVE·Filed 2010·Granted Mar 3, 2015·0 cites·14 claims
- 1656US2015176127A1Stackable multi-port gas nozzlesSILEVO INC·Filed 2015·Application pending·0 cites
- 1753US9240513B2Dynamic support system for quartz process chamberTRUJILLO ROBERT T·Filed 2011·Granted Jan 19, 2016·0 cites·11 claims
- 1853US2016133778A1Dynamic support system for quartz process chamberSOLARCITY CORP·Filed 2016·Application pending·0 cites
- 1949US8845809B2Scalable, high-throughput, multi-chamber epitaxial reactor for silicon depositionPOPPE STEVE·Filed 2009·Granted Sep 30, 2014·0 cites·7 claims
- 2043US2003019741A1Method and apparatus for sealing a substrate surface during an electrochemical deposition processAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 2140US11114285B2Apparatus for exhaust coolingAPPLIED MATERIALS INC·Filed 2017·Granted Sep 7, 2021·0 cites·20 claims
- 2239US5716484AContaminant reduction improvements for plasma etch chambersAPPLIED MATERIALS INC·Filed 1995·Granted Feb 10, 1998·8 cites·19 claims
- 2336US5714036AChlorine reduction moduleAPPLIED MATERIALS INC·Filed 1995·Granted Feb 3, 1998·6 cites·19 claims
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