Dynamic support system for quartz process chamber

Abstract

One embodiment of the present invention provides a support system for providing dynamic support to a deposition reactor. The system includes a coupling mechanism configured to provide coupling between the deposition reactor and the support system, an attachment mechanism configured to attach the support system to an external frame, and at least one gas bellows situated between the coupling mechanism and the attachment mechanism.

What is claimed is: 
     
         1 . A system for providing dynamic support to a reactor, wherein a first end of the reactor is attached to an external frame, the system comprising:
 a substantially horizontal platform coupled to a second end of the reactor;   an attachment mechanism attached to the external frame;   a dynamic coupling mechanism configured to dynamically couple the platform to the attachment mechanism, wherein the dynamic coupling mechanism comprises at least one gas bellows and a pressure regulating mechanism, and wherein the pressure regulating mechanism is configured to regulate gas pressure inside the gas bellows in response to the reactor expanding or contracting due to temperature changes.   
     
     
         2 . The system of  claim 1 , wherein the pressure regulating mechanism regulates the gas pressure inside the gas bellows by allowing pressurized gas to enter or exit the gas bellows, thereby facilitating a relative position change between the second end of the reactor and the external frame. 
     
     
         3 . The system of  claim 2 , wherein the pressure regulating mechanism includes a bidirectional valve. 
     
     
         4 . The system of  claim 2 , wherein the pressurized gas includes an inert gas. 
     
     
         5 . The system of  claim 1 , wherein the substantially horizontal platform is positioned above the reactor. 
     
     
         6 . The system of  claim 1 , wherein the substantially horizontal platform is positioned below the reactor. 
     
     
         7 . The system of  claim 1 , wherein the substantially horizontal platform comprise stainless steel. 
     
     
         8 . The support system of  claim 1 , wherein the attachment mechanism includes a mount bracket comprising a substantially vertical surface and a substantially horizontal surface, wherein the substantially vertical surface is mounted to the external frame, and wherein the substantially horizontal surface is coupled to the gas bellows. 
     
     
         9 . A deposition tool, comprising:
 an external supporting frame;   a reactor, wherein a first end of the reactor is attached to the external supporting frame; and   a dynamic coupling system configured to dynamically couple a second end of the reactor to the external frame, wherein the dynamic coupling system comprises:
 a substantially horizontal platform coupled to the second end of the reactor; 
 an attachment mechanism attached to the external frame; 
 at least one gas bellows positioned between the platform and the attachment mechanism; and 
 a pressure regulating mechanism configured to regulate gas pressure inside the gas bellows in response to the reactor expanding or contracting due to temperature changes. 
   
     
     
         10 . The deposition tool of  claim 9 , wherein the pressure regulating mechanism regulates the gas pressure inside the gas bellows by allowing pressurized gas to enter or exit the gas bellows, thereby facilitating a relative position change between the second end of the reactor and the external supporting frame. 
     
     
         11 . The deposition tool of  claim 10 , wherein the pressure regulating mechanism includes a bidirectional valve. 
     
     
         12 . The deposition tool of  claim 10 , wherein the pressurized gas includes an inert gas. 
     
     
         13 . The deposition tool of  claim 9 , wherein the dynamic coupling system is positioned below the reactor. 
     
     
         14 . The deposition tool of  claim 9 , wherein the dynamic coupling system is positioned above the reactor. 
     
     
         15 . The deposition tool of  claim 9 , wherein the substantially horizontal platform comprise stainless steel. 
     
     
         16 . The deposition tool of  claim 9 , wherein the attachment mechanism includes a mount bracket comprising a substantially vertical surface and a substantially horizontal surface, wherein the substantially vertical surface is mounted to the external frame, and wherein the substantially horizontal surface is coupled to the gas bellows. 
     
     
         17 . The deposition tool of  claim 9 , wherein the reactor comprises a quartz chamber, a first stainless steel gas-delivery system positioned on a first side of the quartz chamber, and a second stainless steel gas-delivery system positioned on a second side of the quartz chamber. 
     
     
         18 . The deposition tool of  claim 17 , wherein at least one stainless steel gas-deliver system is attached to the external supporting frame.