Inventor · disambiguated record
Michael S. Bakeman
Also filed as: BAKEMAN MICHAEL · BAKEMAN MICHAEL S
16 granted patents·274 citations·filing 2013–2019
94Inventor score
Top patents by PatentIndex Score
16 records- 0198US10324050B2Measurement system optimization for X-ray based metrologyKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·32 cites·20 claims
- 0297US10013518B2Model building and analysis engine for combined X-ray and optical metrologyKLA TENCOR CORP·Filed 2013·Granted Jul 3, 2018·29 cites·20 claims
- 0397US9885962B2Methods and apparatus for measuring semiconductor device overlay using X-ray metrologyKLA TENCOR CORP·Filed 2014·Granted Feb 6, 2018·35 cites·22 claims
- 0497US9826614B1Compac X-ray source for semiconductor metrologyKLA TENCOR CORP·Filed 2014·Granted Nov 21, 2017·22 cites·20 claims
- 0597US9778213B2Metrology tool with combined XRF and SAXS capabilitiesKLA TENCOR CORP·Filed 2014·Granted Oct 3, 2017·39 cites·20 claims
- 0697US9494535B2Scatterometry-based imaging and critical dimension metrologyKLA TENCOR CORP·Filed 2015·Granted Nov 15, 2016·23 cites·25 claims
- 0796US10545104B2Computationally efficient X-ray based overlay measurementKLA TENCOR CORP·Filed 2016·Granted Jan 28, 2020·10 cites·20 claims
- 0895US8879073B2Optical metrology using targets with field enhancement elementsKLA TENCOR CORP·Filed 2013·Granted Nov 4, 2014·23 cites·20 claims
- 0993US10006865B1Confined illumination for small spot size metrologyKLA TENCOR CORP·Filed 2017·Granted Jun 26, 2018·8 cites·15 claims
- 1092US9846132B2Small-angle scattering X-ray metrology systems and methodsKLA TENCOR CORP·Filed 2014·Granted Dec 19, 2017·10 cites·13 claims
- 1192US9693439B1High brightness liquid droplet X-ray source for semiconductor metrologyKLA TENCOR CORP·Filed 2014·Granted Jun 27, 2017·20 cites·19 claims
- 1290US10012606B1X-ray based metrology with primary and secondary illumination sourcesKLA TENCOR CORP·Filed 2015·Granted Jul 3, 2018·8 cites·18 claims
- 1389US10801975B2Metrology tool with combined X-ray and optical scatterometersKLA TENCOR CORP·Filed 2013·Granted Oct 13, 2020·6 cites·20 claims
- 1486US9535018B2Combined x-ray and optical metrologyKLA TENCOR CORP·Filed 2013·Granted Jan 3, 2017·7 cites·20 claims
- 1574US9719932B1Confined illumination for small spot size metrologyKLA TENCOR CORP·Filed 2014·Granted Aug 1, 2017·2 cites·11 claims
- 1671US11428650B2Computationally efficient x-ray based overlay measurementKLA CORP·Filed 2019·Granted Aug 30, 2022·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →