Inventor · disambiguated record
Leif Keto
Also filed as: KETO LEIF · KETO LEIF R
7 granted patents·4 pending applications·207 citations·filing 2000–2017
85Inventor score
Top patents by PatentIndex Score
11 records- 0194US6562140B1Apparatus for fabrication of thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted May 13, 2003·107 cites·30 claims
- 0293US6579374B2Apparatus for fabrication of thin filmsASM MICROCHEMISTRY OY·Filed 2001·Granted Jun 17, 2003·80 cites·75 claims
- 0389US10214813B2Apparatus and method for providing a coating to a surface of a substrateBENEQ OY·Filed 2016·Granted Feb 26, 2019·4 cites·18 claims
- 0474US7833352B2Apparatus for fabrication of thin filmsASM INT·Filed 2003·Granted Nov 16, 2010·14 cites·36 claims
- 0569US9683291B2Apparatus for processing surface of substrate and nozzle headBENEQ OY·Filed 2013·Granted Jun 20, 2017·1 cites·19 claims
- 0662US2013263783A1Atomic layer deposition reactorASM INT·Filed 2013·Application pending·0 cites
- 0761US10273579B2Apparatus for processing two or more substrates in a batch processBENEQ OY·Filed 2014·Granted Apr 30, 2019·1 cites·18 claims
- 0859US2008241387A1Atomic layer deposition reactorASM INT·Filed 2007·Application pending·0 cites
- 0952US2009255470A1Ald reactorBENEQ OY·Filed 2006·Application pending·0 cites
- 1049US10513776B2Method for coating a substrateBENEQ OY·Filed 2017·Granted Dec 24, 2019·0 cites·17 claims
- 1134US2018258536A1Apparatus for processing a surface of substrate and method operating the apparatusBENEQ OY·Filed 2016·Application pending·0 cites
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