Inventor · disambiguated record
Edwin C. Weldon
Also filed as: WELDON EDWIN C · WELDON EDWIN CHARLES
11 granted patents·2 pending applications·956 citations·filing 1996–2004
94Inventor score
Files withAPPLIED MATERIALS INC13
Top patents by PatentIndex Score
13 records- 0197US6108189AElectrostatic chuck having improved gas conduitsAPPLIED MATERIALS INC·Filed 1997·Granted Aug 22, 2000·255 cites·64 claims
- 0296US6721162B2Electrostatic chuck having composite dielectric layer and method of manufactureAPPLIED MATERIALS INC·Filed 2002·Granted Apr 13, 2004·76 cites·20 claims
- 0394US6414834B1Dielectric covered electrostatic chuckAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·56 cites·34 claims
- 0494US6263829B1Process chamber having improved gas distributor and method of manufactureAPPLIED MATERIALS INC·Filed 1999·Granted Jul 24, 2001·127 cites·55 claims
- 0594US5720818AConduits for flow of heat transfer fluid to the surface of an electrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Feb 24, 1998·150 cites·51 claims
- 0689US6440221B2Process chamber having improved temperature controlAPPLIED MATERIALS INC·Filed 1998·Granted Aug 27, 2002·93 cites·40 claims
- 0782US5729423APuncture resistant electrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Mar 17, 1998·57 cites·45 claims
- 0881US5904776AConduits for flow of heat transfer fluid to the surface of an electrostatic chuckAPPLIED MATERIALS INC·Filed 1997·Granted May 18, 1999·52 cites·12 claims
- 0978US6899798B2Reusable ceramic-comprising component which includes a scrificial surface layerAPPLIED MATERIALS INC·Filed 2001·Granted May 31, 2005·18 cites·16 claims
- 1077US5986875APuncture resistant electrostatic chuckAPPLIED MATERIALS INC·Filed 1998·Granted Nov 16, 1999·42 cites·32 claims
- 1166US6220607B1Thermally conductive conformal mediaAPPLIED MATERIALS INC·Filed 1998·Granted Apr 24, 2001·30 cites·25 claims
- 1244US2004190215A1Electrostatic chuck having dielectric member with stacked layers and manufactureAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 1336US2003188685A1Laser drilled surfaces for substrate processing chambersAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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