Inventor · disambiguated record
Peter Kloesch
Also filed as: KLOESCH PETER
2 granted patents·2 pending applications·3 citations·filing 2011–2018
47Inventor score
Top patents by PatentIndex Score
4 records- 0163US8212992B2Device for damping vibrations in projection exposure apparatuses for semiconductor lithographyKLOESCH PETER·Filed 2011·Granted Jul 3, 2012·2 cites·14 claims
- 0260US9030644B2Projection exposure apparatus for semiconductor lithography including an actuator systemSIGEL BENJAMIN·Filed 2011·Granted May 12, 2015·1 cites·25 claims
- 0354US2019121238A1Projection exposure apparatus for semiconductor lithography including an actuator systemZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 0445US2015316855A1Projection exposure apparatus for semiconductor lithography including an actuator systemZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →