Inventor · disambiguated record
Kyle Tantiwong
Also filed as: TANTIWONG KYLE · TANTIWONG KYLE R · TANTIWONG KYLE ROSS
21 granted patents·6 pending applications·52 citations·filing 2011–2025
92Inventor score
Files withAPPLIED MATERIALS INC22ASM IP HOLDING BV2LUBOMIRSKY DMITRY1RAVI TIRUNELVELI S1TANTIWONG KYLE1
Top patents by PatentIndex Score
27 records- 0194US11728141B2Gas hub for plasma reactorAPPLIED MATERIALS INC·Filed 2022·Granted Aug 15, 2023·2 cites·8 claims
- 0291US10163606B2Plasma reactor with highly symmetrical four-fold gas injectionAPPLIED MATERIALS INC·Filed 2014·Granted Dec 25, 2018·11 cites·20 claims
- 0390US10008368B2Multi-zone gas injection assembly with azimuthal and radial distribution controlAPPLIED MATERIALS INC·Filed 2014·Granted Jun 26, 2018·10 cites·27 claims
- 0485US11244811B2Plasma reactor with highly symmetrical four-fold gas injectionAPPLIED MATERIALS INC·Filed 2018·Granted Feb 8, 2022·1 cites·7 claims
- 0585US9536710B2Tunable gas delivery assembly with internal diffuser and angular injectionAPPLIED MATERIALS INC·Filed 2013·Granted Jan 3, 2017·7 cites·8 claims
- 0681US11139150B2Nozzle for multi-zone gas injection assemblyAPPLIED MATERIALS INC·Filed 2019·Granted Oct 5, 2021·2 cites·3 claims
- 0778US10332772B2Multi-zone heated ESC with independent edge zonesAPPLIED MATERIALS INC·Filed 2014·Granted Jun 25, 2019·4 cites·15 claims
- 0878US9659803B2Electrostatic chuck with concentric cooling baseAPPLIED MATERIALS INC·Filed 2014·Granted May 23, 2017·4 cites·19 claims
- 0974US10410841B2Side gas injection kit for multi-zone gas injection assemblyAPPLIED MATERIALS INC·Filed 2018·Granted Sep 10, 2019·0 cites·14 claims
- 1073US8900399B2Integrated method and system for manufacturing monolithic panels of crystalline solar cellsRAVI TIRUNELVELI S·Filed 2011·Granted Dec 2, 2014·3 cites·17 claims
- 1172US9287147B2Substrate support with advanced edge control provisionsTANTIWONG KYLE·Filed 2013·Granted Mar 15, 2016·4 cites·20 claims
- 1271US9472378B2Multiple zone coil antenna with plural radial lobesAPPLIED MATERIALS INC·Filed 2013·Granted Oct 18, 2016·2 cites·20 claims
- 1366US2025388414A1Substrate handling device and end effectorASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1463US11119051B2Particle detection for substrate processingAPPLIED MATERIALS INC·Filed 2020·Granted Sep 14, 2021·0 cites·20 claims
- 1563US2025218833A13 pillar boat in a load lock chamber and methods of making pillar boat in load locks for semiconductor processing systemsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1661US2024304430A1Real-time detection of particulate matter during deposition chamber manufacturingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1759US10271416B2High efficiency triple-coil inductively coupled plasma source with phase controlAPPLIED MATERIALS INC·Filed 2012·Granted Apr 23, 2019·2 cites·14 claims
- 1853US9312104B2Coil antenna with plural radial lobesAPPLIED MATERIALS INC·Filed 2013·Granted Apr 12, 2016·0 cites·20 claims
- 1952US12002665B2Real-time detection of particulate matter during deposition chamber manufacturingAPPLIED MATERIALS INC·Filed 2020·Granted Jun 4, 2024·0 cites·14 claims
- 2052US2017110292A1Tunable gas delivery assembly with internal diffuser and angular injectionAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 2151US10845317B2Particle detection for substrate processingAPPLIED MATERIALS INC·Filed 2017·Granted Nov 24, 2020·0 cites·15 claims
- 2250US10553398B2Power deposition control in inductively coupled plasma (ICP) reactorsAPPLIED MATERIALS INC·Filed 2014·Granted Feb 4, 2020·0 cites·20 claims
- 2348US11908716B2Image-based in-situ process monitoringAPPLIED MATERIALS INC·Filed 2021·Granted Feb 20, 2024·0 cites·14 claims
- 2444US10510624B2Metrology systems with multiple derivative modules for substrate stress and deformation measurementAPPLIED MATERIALS INC·Filed 2017·Granted Dec 17, 2019·0 cites·14 claims
- 2544US2015181684A1Extreme edge and skew control in icp plasma reactorAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2642US2013276980A1Esc with cooling baseLUBOMIRSKY DMITRY·Filed 2013·Application pending·0 cites
- 2741US10923371B2Metrology system for substrate deformation measurementAPPLIED MATERIALS INC·Filed 2017·Granted Feb 16, 2021·0 cites·14 claims
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