Inventor · disambiguated record
Wenli Collison
Also filed as: COLLISON WENLI · COLLISON WENLI Z
14 granted patents·2 pending applications·601 citations·filing 1998–2013
94Inventor score
Top patents by PatentIndex Score
16 records- 0198US9190302B2System and method for controlling plasma with an adjustable coupling to ground circuitLAM RES CORP·Filed 2013·Granted Nov 17, 2015·154 cites·11 claims
- 0291US6203657B1Inductively coupled plasma downstream strip moduleLAM RES CORP·Filed 1998·Granted Mar 20, 2001·139 cites·11 claims
- 0389US6692649B2Inductively coupled plasma downstream strip moduleLAM RES CORP·Filed 2001·Granted Feb 17, 2004·42 cites·15 claims
- 0489US6229264B1Plasma processor with coil having variable rf couplingLAM RES CORP·Filed 1999·Granted May 8, 2001·85 cites·28 claims
- 0588US6257168B1Elevated stationary uniformity ring designLAM RES CORP·Filed 1999·Granted Jul 10, 2001·57 cites·28 claims
- 0687US6716303B1Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating sameLAM RES CORP·Filed 2000·Granted Apr 6, 2004·20 cites·21 claims
- 0787US6388383B1Method of an apparatus for obtaining neutral dissociated gas atomsLAM RES CORP·Filed 2000·Granted May 14, 2002·28 cites·31 claims
- 0885US6514378B1Method for improving uniformity and reducing etch rate variation of etching polysiliconLAM RES CORP·Filed 2000·Granted Feb 4, 2003·36 cites·20 claims
- 0980US8114246B2Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating sameNI TUQIANG·Filed 2006·Granted Feb 14, 2012·4 cites·20 claims
- 1070US6052176AProcessing chamber with optical window cleaned using process gasLAM RES CORP·Filed 1999·Granted Apr 18, 2000·32 cites·32 claims
- 1162US8518211B2System and method for controlling plasma with an adjustable coupling to ground circuitNI TUQIANG·Filed 2005·Granted Aug 27, 2013·1 cites·16 claims
- 1255US7077971B2Methods for detecting the endpoint of a photoresist stripping processLAM RES CORP·Filed 2002·Granted Jul 18, 2006·2 cites·25 claims
- 1346US7105102B2Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating sameLAM RES CORP·Filed 2004·Granted Sep 12, 2006·0 cites·7 claims
- 1442US2004118344A1System and method for controlling plasma with an adjustable coupling to ground circuitLAM RES CORP·Filed 2002·Application pending·0 cites
- 1540US2004149223A1Inductively coupled plasma downstream strip moduleLAM RES CORP·Filed 2003·Application pending·0 cites
- 1633US6451158B1Apparatus for detecting the endpoint of a photoresist stripping processLAM RES CORP·Filed 1999·Granted Sep 17, 2002·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →