Inventor · disambiguated record
Masaru Umeda
Also filed as: UMEDA MASARU
38 granted patents·13 pending applications·690 citations·filing 1988–2020
98Inventor score
Top patents by PatentIndex Score
51 records- 0193US5110438AReduced pressure surface treatment apparatusOHMI TADAHIRO·Filed 1989·Granted May 5, 1992·113 cites·3 claims
- 0292US7673856B2Vaporizer and various devices using the same and an associated vaporizing methodWATANABE M & CO LTD·Filed 2006·Granted Mar 9, 2010·18 cites·22 claims
- 0388US4917136AProcess gas supply piping systemTADAHIRO OHMI·Filed 1988·Granted Apr 17, 1990·69 cites·24 claims
- 0487US6540840B1Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDWATANABE M & CO LTD·Filed 2000·Granted Apr 1, 2003·32 cites·7 claims
- 0584US7704019B2Levitation transportation device and levitation transportation methodWATANABE M & CO LTD·Filed 2005·Granted Apr 27, 2010·8 cites·19 claims
- 0681US10686043B2Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistorAIST·Filed 2017·Granted Jun 16, 2020·2 cites·12 claims
- 0779US9108120B2Method for cooling and dispersing a carrier gas, and method for vaporizing a carrier gasWACOM R & D CORP·Filed 2014·Granted Aug 18, 2015·1 cites·2 claims
- 0879US9020332B2Center rod for use in the carburetor or carburetor for MOCVDWACOM R & D CORP·Filed 2014·Granted Apr 28, 2015·1 cites·11 claims
- 0979US8897627B2Carburetor, carburetor for MOCVD using same, center rod for use in the carburetor or carburetor for MOCVD, method for dispersing carrier gas, and method for vaporizing carrier gasTODA MASAYUKI·Filed 2010·Granted Nov 25, 2014·1 cites·6 claims
- 1079US4869301ACylinder cabinet piping systemTADAHIRO OHMI·Filed 1988·Granted Sep 26, 1989·51 cites·12 claims
- 1176US5683072AThin film forming equipmentOHMI TADAHIRO·Filed 1995·Granted Nov 4, 1997·24 cites·2 claims
- 1276US5313982AGas supply piping device for a process apparatusOHMI TADAHIRO·Filed 1993·Granted May 24, 1994·42 cites·5 claims
- 1375US5119541AWafer succeptor apparatusOHMI TADAHIRO·Filed 1988·Granted Jun 9, 1992·42 cites·8 claims
- 1474US9818869B2Ferroelectric device and method of its manufactureAIST·Filed 2014·Granted Nov 14, 2017·2 cites·25 claims
- 1574US6074538AThin film forming equipmentOHMI TADAHIRO·Filed 1997·Granted Jun 13, 2000·22 cites·2 claims
- 1671US5362672AMethod of forming a monocrystalline film having a closed loop step portion on the substrateOHMI TADAHIRO·Filed 1989·Granted Nov 8, 1994·35 cites·11 claims
- 1770US11069713B2Semiconductor memory element, other elements, and their production methodsAIST·Filed 2017·Granted Jul 20, 2021·1 cites·22 claims
- 1868US4977855AApparatus for forming film with surface reactionOHMI TADAHIRO·Filed 1988·Granted Dec 18, 1990·24 cites·5 claims
- 1964US8486196B2Vaporizing apparatus and film forming apparatus provided with vaporizing apparatusTODA MASAYUKI·Filed 2008·Granted Jul 16, 2013·0 cites·13 claims
- 2063US6931203B2Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDMOTOYAMA ENG WORKS·Filed 2002·Granted Aug 16, 2005·5 cites·5 claims
- 2163US4984060ASemiconductor device wirings with hillocksOHMI TADAHIRO·Filed 1988·Granted Jan 8, 1991·26 cites·2 claims
- 2262US9644264B2Evaporation method and film deposition methodKK WATANABE SHOKO·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 2361US6394733B1Substrate body transfer apparatusWATANABE M & CO LTD·Filed 1999·Granted May 28, 2002·27 cites·18 claims
- 2460US7246796B2Carburetor, various types of devices using the carburetor, and method of vaporizationWATANABE M & CO LTD·Filed 2002·Granted Jul 24, 2007·6 cites·6 claims
- 2559US11335783B2Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistorAIST·Filed 2020·Granted May 17, 2022·0 cites·7 claims
- 2659US5138105AProcess and apparatus for recovering a lower alcohol from a mixture thereof with waterUBE INDUSTRIES·Filed 1991·Granted Aug 11, 1992·8 cites·15 claims
- 2758US6315501B1Air stream particulate collecting transfer apparatusWATANABE M & CO LTD·Filed 1998·Granted Nov 13, 2001·23 cites·11 claims
- 2857US6398464B1Air stream transfer apparatusWATANABE M & CO LTD·Filed 2001·Granted Jun 4, 2002·8 cites·7 claims
- 2957US5518360AWafer carrying device and wafer carrying methodWATANABE M & CO LTD·Filed 1991·Granted May 21, 1996·25 cites·12 claims
- 3057US5249371AVapor drierHITACHI LTD·Filed 1991·Granted Oct 5, 1993·14 cites·7 claims
- 3155US5160429APiping system for supplying ultra-pure waterOHMI TADAHIRO·Filed 1989·Granted Nov 3, 1992·17 cites·11 claims
- 3255US2015284845A1Film-forming apparatusWATANABE M & CO LTD·Filed 2013·Application pending·0 cites
- 3351US2018130909A1Ferroelectric device and method for manufacturing sameAIST·Filed 2017·Application pending·0 cites
- 3449US9885113B2Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gasUMEDA MASARU·Filed 2012·Granted Feb 6, 2018·0 cites·6 claims
- 3549US5921744AWafer carrying device and wafer carrying methodWATANABE M & CO LTD·Filed 1997·Granted Jul 13, 1999·13 cites·10 claims
- 3645US7744698B2Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDWATANABE M & CO LTD·Filed 2002·Granted Jun 29, 2010·0 cites·8 claims
- 3745US2010104380A1Levitation transportation device and levitation transportation methodTODA MASAYUKI·Filed 2010·Application pending·0 cites
- 3844US2013291797A1VaporizerKUSUHARA MASAKI·Filed 2011·Application pending·0 cites
- 3943US6447217B1Substrate transfer device and operating method thereofTODA MASAYUKI·Filed 1999·Granted Sep 10, 2002·11 cites·10 claims
- 4043US2007289535A1Substrate Surface Treating ApparatusWATANABE M & CO LTD·Filed 2005·Application pending·0 cites
- 4142US5854116ASemiconductor apparatusFiled 1995·Granted Dec 29, 1998·10 cites·15 claims
- 4239US5989722AReduced pressure device and method of makingFiled 1998·Granted Nov 23, 1999·5 cites·2 claims
- 4339US2004041508A1Electrode and device using the sameFiled 2003·Application pending·0 cites
- 4439US2005189620A1Manufacturing method for semiconductor device, and system to which semiconductor is appliedFiled 2004·Application pending·0 cites
- 4538US2006037539A1Vaporizer, various apparatuses including the same and method of vaporizationTODA MASAYUKI·Filed 2003·Application pending·0 cites
- 4637US2005064724A1Method and apparatus for forming low permittivity film and electronic device using the filmFiled 2002·Application pending·0 cites
- 4737US2004084775A1Solid state device and its manufacturing methodFiled 2002·Application pending·0 cites
- 4837US2004157472A1Deposition method, deposition apparatus, insulating film and semiconductor integrated circuitFiled 2002·Application pending·0 cites
- 4937US2004241964A1Method and apparatus for forming film having low dielectric constant, and electronic device using the filmFiled 2002·Application pending·0 cites
- 5035US5591267AReduced pressure deviceFiled 1995·Granted Jan 7, 1997·4 cites·16 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Masaru Umeda files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →