Assignee
TADAHIRO OHMI
JP·25 granted patents·19 pending applications·659 citations·filing 1988–2011
Top patents by PatentIndex Score
44 records- 0197US6615871B2Fluid control apparatusTADAHIRO OHMI·Filed 2002·Granted Sep 9, 2003·61 cites·12 claims
- 0289US6286454B1Plasma process deviceTADAHIRO OHMI·Filed 2000·Granted Sep 11, 2001·35 cites·27 claims
- 0388US5858106ACleaning method for peeling and removing photoresistTADAHIRO OHMI·Filed 1997·Granted Jan 12, 1999·106 cites·25 claims
- 0488US4917136AProcess gas supply piping systemTADAHIRO OHMI·Filed 1988·Granted Apr 17, 1990·69 cites·24 claims
- 0587US5988217AShutoff-opening deviceTADAHIRO OHMI·Filed 1997·Granted Nov 23, 1999·57 cites·6 claims
- 0684US7001855B2Flash memory device and fabrication process thereof, method of forming a dielectric filmTADAHIRO OHMI·Filed 2003·Granted Feb 21, 2006·16 cites·10 claims
- 0783US5931722AChemical mechanical polishing apparatusTADAHIRO OHMI·Filed 1997·Granted Aug 3, 1999·82 cites·10 claims
- 0882US6998355B2Flash memory device and a fabrication process thereof, method of forming a dielectric filmTADAHIRO OHMI·Filed 2004·Granted Feb 14, 2006·14 cites·1 claims
- 0979US4869301ACylinder cabinet piping systemTADAHIRO OHMI·Filed 1988·Granted Sep 26, 1989·51 cites·12 claims
- 1069US6612898B1Method for forming oxidation-passive layer, fluid-contacting part, and fluid feed/discharge systemTADAHIRO OHMI·Filed 1997·Granted Sep 2, 2003·30 cites·4 claims
- 1167US7008598B2Reactor for generating moistureTADAHIRO OHMI·Filed 2004·Granted Mar 7, 2006·7 cites·20 claims
- 1267US6018136ASystem for supervising piping workTADAHIRO OHMI·Filed 1999·Granted Jan 25, 2000·26 cites·3 claims
- 1365US6039814ACleaning method utilizing degassed cleaning liquid with applied ultrasonicsTADAHIRO OHMI·Filed 1997·Granted Mar 21, 2000·19 cites·4 claims
- 1463US7538012B2Fluorine-containing carbon film forming methodTADAHIRO OHMI·Filed 2004·Granted May 26, 2009·8 cites·11 claims
- 1558US6408879B1Fluid control deviceTADAHIRO OHMI·Filed 1998·Granted Jun 25, 2002·17 cites·1 claims
- 1658US2009263566A1Reduced Pressure Deposition Apparatus and Reduced Pressure Deposition MethodTADAHIRO OHMI·Filed 2005·Application pending·0 cites
- 1757US2007231225A1Apparatus and reactor for generating and feeding high purity moistureTADAHIRO OHMI·Filed 2007·Application pending·0 cites
- 1857US2010166956A1Vapor deposition apparatusTADAHIRO OHMI·Filed 2010·Application pending·0 cites
- 1956US4976815ADraft chamberTADAHIRO OHMI·Filed 1989·Granted Dec 11, 1990·28 cites·7 claims
- 2054US5937399ASemiconductor integrated circuitTADAHIRO OHMI·Filed 1994·Granted Aug 10, 1999·15 cites·12 claims
- 2152US2011139334A1Bonding method and resin member bonded therebyTADAHIRO OHMI·Filed 2011·Application pending·0 cites
- 2251US2006196593A1Atmosphere-controlled resin-bonding apparatus, bonding method and resin member bonded therebyTADAHIRO OHMI·Filed 2005·Application pending·0 cites
- 2350US2006278162A1Vacuum treatment apparatus and vapor deposition apparatusTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 2449US7436999B2Data analysis device and data recognition deviceTADAHIRO OHMI·Filed 2004·Granted Oct 14, 2008·5 cites·16 claims
- 2547US2008003441A1Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and systemTADAHIRO OHMI·Filed 2007·Application pending·0 cites
- 2646US2005272266A1Semiconductor device and its manufacturing methodTADAHIRO OHMI·Filed 2005·Application pending·0 cites
- 2745US8030182B2Semiconductor device manufacturing method and semiconductor manufacturing apparatusTADAHIRO OHMI·Filed 2005·Granted Oct 4, 2011·0 cites·22 claims
- 2845US2006281323A1Method of cleaning substrate processing apparatusTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 2944US2010221495A1Method of Manufacturing a Transparent Member and Plastic MemberTADAHIRO OHMI·Filed 2005·Application pending·0 cites
- 3043US6456532B1Semiconductor memory deviceTADAHIRO OHMI·Filed 1999·Granted Sep 24, 2002·9 cites·17 claims
- 3142US7329609B2Substrate processing method and substrate processing apparatusTADAHIRO OHMI·Filed 2002·Granted Feb 12, 2008·0 cites·9 claims
- 3242US2009272721A1Athmosphere-Controlled Bonding Apparatus, Bonding Method, and Electronic DeviceTADAHIRO OHMI·Filed 2005·Application pending·0 cites
- 3341US2002124894A1Fluid control deviceTADAHIRO OHMI·Filed 2002·Application pending·0 cites
- 3440US7474383B2Mask making method, mask making device, and mask drawing deviceTADAHIRO OHMI·Filed 2004·Granted Jan 6, 2009·0 cites·20 claims
- 3540US2007137575A1Plasma processing apparatusTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 3638US2006127245A1PumpTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 3738US2006158865A1Circuit board, electronic device employing circuit board, and mehtod of producing circuit boardTADAHIRO OHMI·Filed 2003·Application pending·0 cites
- 3837US2006252160A1Electron beam exposure device and exposure methodTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 3936US2008315201A1Apparatus for Producing Electronic Device Such as Display Device, Method of Producing Electronic Device Such as Display Device, and Electronic Device Such as Display DeviceTADAHIRO OHMI·Filed 2005·Application pending·0 cites
- 4036US2006214224A1Semiconductor device and process for producing the sameTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 4135US6893970B2Plasma processing methodTADAHIRO OHMI·Filed 2001·Granted May 17, 2005·0 cites·11 claims
- 4234US2006104413A1Mask repeater and mask manufacturing methodTADAHIRO OHMI·Filed 2004·Application pending·0 cites
- 4333US5530283ALead frame and lead frame materialTADAHIRO OHMI·Filed 1995·Granted Jun 25, 1996·3 cites·6 claims
- 4430US5539171AWelding system for superhigh purity fluid supply pipe systemTADAHIRO OHMI·Filed 1992·Granted Jul 23, 1996·1 cites·9 claims
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