Inventor · disambiguated record
Costas J. Spanos
Also filed as: SPANOS COSTAS · SPANOS COSTAS J · SPANOS COSTAS JOHN
17 granted patents·2 pending applications·375 citations·filing 2000–2019
94Inventor score
Files withONWAFER TECHNOLOGIES INC6KLA TENCOR CORP5UNIV CALIFORNIA5MUNDT RANDALL S1NAT UNIV SINGAPORE1
Top patents by PatentIndex Score
19 records- 0196US6691068B1Methods and apparatus for obtaining data for process operation, optimization, monitoring, and controlONWAFER TECHNOLOGIES INC·Filed 2000·Granted Feb 10, 2004·148 cites·41 claims
- 0290US6738722B2Data collection and correction methods and apparatusONWAFER TECHNOLOGIES INC·Filed 2002·Granted May 18, 2004·54 cites·29 claims
- 0389US7960670B2Methods of and apparatuses for measuring electrical parameters of a plasma processKLA TENCOR CORP·Filed 2005·Granted Jun 14, 2011·13 cites·18 claims
- 0489US7299148B2Methods and apparatus for low distortion parameter measurementsONWAFER TECHNOLOGIES INC·Filed 2005·Granted Nov 20, 2007·20 cites·23 claims
- 0588US7403834B2Methods of and apparatuses for controlling process profilesUNIV CALIFORNIA·Filed 2005·Granted Jul 22, 2008·16 cites·31 claims
- 0686US7016754B2Methods of and apparatus for controlling process profilesONWAFER TECHNOLOGIES INC·Filed 2003·Granted Mar 21, 2006·44 cites·21 claims
- 0780US7531984B2Sensor apparatus power transfer, communication and maintenance methods and apparatusKLA TENCOR CORP·Filed 2006·Granted May 12, 2009·15 cites·17 claims
- 0880US6741945B2Sensor geometry correction methods and apparatusONWAFER TECHNOLOGIES INC·Filed 2002·Granted May 25, 2004·25 cites·29 claims
- 0979US7580767B2Methods of and apparatuses for maintenance, diagnosis, and optimization of processesKLA TENCOR CORP·Filed 2005·Granted Aug 25, 2009·12 cites·21 claims
- 1077US8698037B2Methods of and apparatuses for maintenance, diagnosis, and optimization of processesMUNDT RANDALL S·Filed 2011·Granted Apr 15, 2014·3 cites·7 claims
- 1172US7282889B2Maintenance unit for a sensor apparatusONWAFER TECHNOLOGIES INC·Filed 2004·Granted Oct 16, 2007·24 cites·37 claims
- 1267US12058213B2Device-free human identification and device-free gesture recognitionUNIV CALIFORNIA·Filed 2019·Granted Aug 6, 2024·1 cites·19 claims
- 1358US9029728B2Methods of and apparatuses for measuring electrical parameters of a plasma processKLA TENCOR CORP·Filed 2014·Granted May 12, 2015·0 cites·14 claims
- 1453US11988600B2Gas sensor MEMS structures and methods of fabrication thereofNAT UNIV SINGAPORE·Filed 2017·Granted May 21, 2024·0 cites·8 claims
- 1553US11894880B2Automatic fine-grained radio map construction and adaptionUNIV CALIFORNIA·Filed 2019·Granted Feb 6, 2024·0 cites·20 claims
- 1649US12340295B2Intelligent IoT device with wireless-enabled device-free occupancy sensingUNIV CALIFORNIA·Filed 2019·Granted Jun 24, 2025·0 cites·18 claims
- 1749US2009292506A1Methods of and apparatuses for maintenance, diagnosis, and optimization of processesKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 1841US12035166B2Unsupervised WiFi-enabled device-user association for personalized location-based serviceUNIV CALIFORNIA·Filed 2019·Granted Jul 9, 2024·0 cites·17 claims
- 1937US2005028049A1Sensor methods and apparatusFiled 2004·Application pending·0 cites
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