Methods of and apparatuses for maintenance, diagnosis, and optimization of processes

Abstract

One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.

1 - 18 . (canceled) 
     
     
         19 . A method of determining the performance of a process tool for a selected process, the method comprising the steps of:
 providing a perturbation model for the operation of the process tool;   providing reference process conditions and reference process results data for the reference process conditions;   providing at least one performance criteria;   using the perturbation model to generate at least one responsivity for the reference process conditions;   determining the deviation between the at least one responsivity and the process results data for the reference process so as to determine whether the at least one performance criteria is met.   
     
     
         20 . The method of the  claim 19  further comprising the steps of:
 identifying at least one information factor that provides a descriptive characterization of the process results data for the reference process and for the at least one responsivity;   deriving at least one information factor for the reference process results data;   deriving at least one information factor for the responsivity; and   wherein, the step of determining the deviation includes determining the deviation between the at least one information factor for the reference process results data and the at least one information factor for the responsivity.   
     
     
         21 . The method of the  claim 19  wherein the process results data comprise a process measurement as a function of time, the method further comprising the steps of:
 identifying at least one information factor that provides a descriptive characterization of the process results data for the reference process and the at least one responsivity, the at least one information factor being selected from the group consisting of
 average rate of change for the process measurement, 
 range of process measurement change at a predetermined time, 
 curvature of process measurement change at a predetermined time, 
 tilt of process measurement change at a predetermined time, 
 average steady-state value of the process measurement at a predetermined time, and 
 the range of steady-state value of the process measurement at a predetermined time; 
   deriving at least one information factor for the reference process results data;   deriving at least one information factor for the at least one responsivity; and   wherein, the step of determining the deviation includes determining the deviation between the at least one information factor for the reference process results data and the at least one information factor for at least one responsivity.   
     
     
         22 . The method of the  claim 19  wherein the process results data comprise temperature measurement as a function of time, the method further comprising the steps of:
 identifying at least one information factor that provides a descriptive characterization of the process results data for the reference process results data and the at least one responsivity, the at least one information factor being selected from the group consisting of
 average rate of temperature rise, 
 range of temperature rise at a predetermined time, 
 curvature of temperature rise at a predetermined time, 
 tilt of temperature rise at a predetermined time, 
 average steady-state temperature rise at a predetermined time, and 
 the range of steady-state temperature rise at a predetermined time; 
   deriving at least one information factor for the reference process results data;   deriving at least one information factor for the process results data for the at least one responsivity; and   wherein, the step of determining the deviation includes determining the deviation between the at least one information factor for the reference process results data and the at least one information factor for the responsivity.   
     
     
         23 . The method of  claim 19  wherein the step of providing reference process conditions and process results data comprises executing a design of experiments for the reference process. 
     
     
         24 . The method of the  claim 19  wherein the process results data comprise at least one of the process measurements temperature, pressure, optical radiation, charge, ion flux, heat flux, etch rate, deposition rate, and current. 
     
     
         25 . The method of the  claim 19  wherein the perturbation model data are collected using a sensor apparatus. 
     
     
         26 . The method of the  claim 19  wherein the responsivity is for the process tool operating with a predetermined failure. 
     
     
         27 . The method of the  claim 19  wherein the responsivity is for the process tool operating with an optimized process. 
     
     
         28 . A system for monitoring the performance of a process tool for processing workpieces, the system comprising:
 a data source configured for providing process data; and   a computer memory for storing executable commands, the memory being configured so as to receive the process data from the data source, the memory being encoded with executable steps for deriving information factors for the process data, the memory being encoded with executable steps for determining deviations for at least two information factors.   
     
     
         29 . The system of  claim 28  wherein the memory is encoded with information factors for at least one of:
 a plurality of processes and   a plurality of process tools.   
     
     
         30 . The system of  claim 28  further comprising the memory being encoded with executable steps for applying the process data to a template so as to allow extracting the information factors according to a predetermined set of rules. 
     
     
         31 . The system of  claim 28  further comprising a data mining module connected with the computer memory so as to allow data mining the information factors. 
     
     
         32 . A method for process monitoring, fault detection, or fault identification for one or more process tools and processes used for processing a workpiece, the method being performed using a comparison module configured for comparing data and a computer information storage memory containing a data structure for at least one process and at lease one process tool, the data structure containing at least one of:
 a perturbation model,   responsivities from a perturbation model, and   information factors from a perturbation model,   the method comprising the steps of:
 A. providing comparison rules; 
 B. providing reference data for a reference process; 
 C. providing at least one of the perturbation model, the responsivities, and the information factors from the data structure; 
 D. comparing the at least one of the perturbation model, the responsivities, and information factors from the data structure with the reference data according to the comparison rules; and 
 E. providing a decision or instructions in response to the comparison. 
   
     
     
         33 . The method of  claim 32  further comprising the step of displaying the comparison results. 
     
     
         34 . The method of  claim 32  wherein step D comprises using information factors for the reference data. 
     
     
         35 . The method of  claim 32  wherein step D comprises using the responsivities. 
     
     
         36 . The method of  claim 32  wherein step D comprises using the perturbation model. 
     
     
         37 . The method of  claim 32  wherein step D further comprises determining whether there is an error or malfunction for the reference process. 
     
     
         38 . The method of  claim 32  wherein step D further comprises determining whether the reference process meets predetermined production specifications. 
     
     
         39 . The method of  claim 32  wherein step D further comprises diagnosing a fault for the reference process. 
     
     
         40 - 53 . (canceled)